EFEM - Equipment Front End Module - Kensingtonlabs

Performix Equipment Front-End Module (EFEM)

ABOUT US Kensington’s success is connected to the success of our customers’ business. That’s one of the reasons why so many companies count on Kensington for a comprehensive, customerfocused approach that helps them maximize productivity and profits with wafer handling robots and precision motion control solutions, stages.

Equipment Front-End Module (EFEM) EFEM is an integrated sub-system for a wide range of semiconductor process applications, and had been deployed in the following applications areas Metrology; Dry Wafer Processing; Wet Wafer Processing; Lithography; Wafer Level Packaging. The EFEM is configurable for different wafer sizes as well as different substrate shapes and formats while using the BOLTS interface.

Features of EFEM  Unibody frame for simple and sturdy foundation  Configurable using Kensington full line of Multilink Robots, Pre-Aligners     

and FOUP Load Ports SEMI Complaint and CE Certified Three sizes – 2 FOUP Wide, 3 FOUP Wide and 4 FOUP Wide BOLTS interface for ADO as well as alternative substrate handling platforms Class 1 Cleanliness Options  BOLTS interface for non-wafer applications  BOLTS interface for small wafer applications  Chemical Filtration  AMHS Options  Programmable lights, light tower and buttons

CUSTOMER COMMITMENT Kensington is committed to providing the most reliable and innovative wafer handling robots and precision motion control stages, we put or guarantee on every product we touch.

EFEM Configurable For A Wide Range Of Semiconductor Substrate Processing Applications

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts

Kensington Laboratories, LLC

sales@kensingtonlabs.com

Dublin , CA 94568

Service -

Kensington robot and stage repairs, Newport PM500 stage repairs

6200 Village Parkway Phone: 510.324.0126 Fax: 510.324.0130

www.kensingtonlabs.com

service@kensingtonlabs.com Our Toll Free Number 1-888-977-7800