Multilink SCARA Semiconductor Pre Aligner End-Effectors Wafer Handling Robots

MULTILINK SCARA SEMICONDUCTOR PRE ALIGNER END-EFFECTORS WAFER HANDLING ROBOTS

ABOUT US Kensington is a leading supplier of wafer handling robots, precision motion control, linear stages, rotary stages and integrated stages designed to meet the most demanding requirements. The systems combine nanometer-scale-precision and fine-resolution capabilities with robust performance to meet customers’ needs for high reliability, long operational life and low cost-of-ownership. One unique feature of Kensington robots and stages is the Zero Backlash design, which delivers precise positioning and enhanced repeatability.

MULTILINK SCARA WAFER ROBOT – SEMICONDUCTOR WAFER HANDLING ROBOT

WFH – WAFER HANDLING ROBOT

PRE ALIGNERS

END-EFFECTORS

MULTILINK SCARA WAFER ROBOT - SEMICONDUCTOR WAFER HANDLING ROBOT Robust, Reliable And Preventive Maintenance Free Atmospheric Wafer Handling And Quartz Substrate Handling System MultiLink SCARA Wafer Handling Robots have addressed the needs for semiconductor wafer and quartz substrate handling for more than a quarter century. Key innovative features developed for semiconductor robot wafer handling : Through Beam Wafer Sensing; 300mm Edge-Grip End-Effector : Robot SelfTeach Functionality. MultiLink SCARA wafer robots are used across the semiconductor equipment spectrum : Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.

WFH – WAFER HANDLING ROBOT High-Throughput/High-Reliability Random Access Cylindrical Coordinate System Wafer Handling Robot

Features – Wafer Handling Robot WFH Series Reliability proven in over two decades of semiconductor equipment wafer handler applications – 10,000 hour MTBF Real-time force-sensing on all axes for operator and wafer safety Cleanliness surpassing Class 1, semiconductor equipment requirements Wafer handler robot with unmatched throughput, precision, reliability Easy-to-use high-level commands; self-teaching; extensive fault and recovery intelligence Integral or off-axis prealigner/barcode reader Direct optical encoding of all axes yields wafer placement repeatability better than 0.1 mil Available 3″ to 8″ semiconductor wafer capability with no electromechanical change overs Integrates with Kensington’s extensive architecture of precision motion control equipment – you can construct tightly integrated, supportable automated wafer handling robot systems economically

PRE ALIGNERS

Wafer Aligner Field Proven In HVM Operations Pre Aligners have a long history of operation in semiconductor wafer fabrication. Several configurations of wafer aligners are available that support wafer sizes from 50 mm to 300 mm. The pre aligner technology is available in stand alone units as well as integrated directly into robots. The alignment technology is used for opaque as well as transparent materials and the wafer aligner supports substrates that are not round. Pre Aligners are used across the semiconductor equipment spectrum: Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.

END-EFFECTORS

Field Proven In HVM Operations And Customizable For Unique And Demanding Applications Demands End-Effectors have a long history of operation in semiconductor wafer fabrication. Several of Kensington’s End-Effector innovations have advanced wafer processing capability. These include 300mm Edge-Grip for reduce particle performance and Through Beam Technology for wafer mapping.

End-Effectors are used across the semiconductor equipment spectrum: Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.

INNOVATION & LEADERSHIP FOR WAFER HANDLING ROBOTS AND PRECISION MOTION CONTROL

Since 1976, Kensington Laboratories, LLC has designed, developed and manufactured innovative automation and precision motion control solutions for a broad range of industrial, scientific and academic applications.

Kensington wafer handling robots and precision stages are designed for extended operating lifetimes and customers are well supported with spare parts, repairs and refurbishments to extend operating live and minimize operational and capital expense.

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Service - Kensington robot and stage repairs, Newport PM500 stage repairs

Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130

www.kensingtonlabs.com

service@kensingtonlabs.com Our Toll Free Number 1-888-977-7800