Multilink Robot- Dual Arm Atmospheric Wafer Handling Robot
About Us Kensington Labs 300mm capable MultiLink Dual Arm atmospheric wafer handling robot meets the industry’s most rigorous 300mm performance standards. The Dual Arm robot achieves extremely high throughput in a small footprint, providing a significant cost of ownership advantage. Kensington Laboratories, a leader in advanced robotics technology, is committed to developing and manufacturing the highest quality and most cost effective atmospheric robots in the industry – all backed by Kensington Laboratories’ global service and support network.
Key Features • • • • • • • • • • •
Minimal swept volume of less than 21 inches Patented edge grip technology Patented Automated Self Teach Transmissive beam wafer mapping Advanced wafer cassette error detection Direct drive technology Continuous rotation State-of-the-art motion control Machine tool quality construction High resolution optical encoders on all axes Reduced-wear Z axis vacuum counter balance
Key Patents • Dual End Effector, Multiple Link Robot Arm System with Corner Reach-around and extended Reach Capabilities, 5765444 • High Torque, Synchronously Operating Multiple Link Robot Arm Mechanism, 6098484 • Continuously Rotatable Multiple Link Robot Arm Mechanism, 5741113 • Robot Arm with Specimen Edge Gripping End Effector, 6256555 • Robot Arm with Specimen Sensing and Edge Gripping End Effector, 6275748 • Self-Teaching Robot Arm Position Method, 6360144
• High Throughput: Kensington Labs proprietary vacuum counter-balancing system eliminates robot settling time in the Z axis. This, in combination with a rapid swap time of less than 3 seconds, significantly increases throughput. In four pod 300mm systems, greater than 360 wafers per hour throughput is achieved.
• Low CoO: A minimal swept volume of less than 21 inches allows the Dual Arm robot to handle wafers within a very compact design, reducing overall system footprint.
• Automated Self Teach: The patented
Automated Self Teach feature reduces time required to bring systems online and provides faster time to production ramp.
• Accurate Wafer Placement: High
performance design provides precise motion control and eliminates structural deflection and creep. All robot axes are guided by preloaded bearings mounted on monolithic frames machined from single ingots of highly stable aircraft-quality aluminum.
• High Reliability: The MultiLink Dual Arm robot
achieves exceptional MCBF by employing direct-drive DC servo motors with real-time force feedback and non-contacting glass scale encoders that monitor actual drive train output.
• Zero Preventative Maintenance:
Superior precision design requires no periodic lubrication or adjustments, increasing system availability for production.
Specifications • Repeatability Radial axis
±0.001" (±0.025 mm)
Theta axis
±0.01 degrees
Z axis
±0.001" (±0.025 mm)
• Maximum Velocity Radial axis
34 inches/sec (0.86 m/sec)
Theta axis
1000 degrees/sec
Z axis
18 inches/sec (0.46 m/sec)
• Maximum Acceleration Radial axis
400 inches/sec2 (10.16 m/sec2)
Theta axis
5000 degrees/sec2
Z axis
80 inches/sec2 (2.03 m/sec2)
• Range of Motion Radial axis Theta axis Z axis
Two links at 5.25" or 7.00" (133.35 mm or 177.80 mm) Continuous 11.25", 14.25", 20.25" (285.75 mm, 361.95 mm, 514.35 mm)
• Reliability MCBF
10 million cycles
• Compliance S2
S2-93A
• Mounting Specifications Overall dimensions
Robot mounting type Bolt pattern Minimum swept radius End effector
Mounting face: 22.2" (563.88 mm) to bottom of can; robot can diameter: 9.72" (246.89 mm); robot hole diameter: 10.00" (254 mm) Side or top mount Top mount: 3 x 1/4-20 x 0.50" DP equally spaced on a 10.375" (263.53 mm) bolt circle 20.2" (513.08 mm) 6 x #2-56 on a 1.625" (41.28 mm) bolt circle
• General Specifications Swap time <3 seconds Maximum Z axis load 8 lbs (3.64 kg) Z drop (distance and time) With vacuum <1 mil; without vacuum <7 mils Weight Robot: 110 lbs (50 kg); Controller: 19 lbs (8.64 kg) Vacuum required 10 l/min at 635 mm Hg (25 SCFH at 25" Hg) Power required 100-220 VAC 47-63 Hz (600W PS) Mapper Throughbeam standard; reflective optional Communications RS232, IEEE-488, or Device Net™ Cleanliness ISO Class 1
Options • Vacuum end effectors (200mm and 300mm) • E-diagnostics with GUI • Integral pre-aligner
CONTACT US
Sales –
Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com
Service -
Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126
Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com
Fax: 510.324.0130
www.kensingtonlabs.com
Our Toll Free Number 1-888-977-7800