Meet your 300mm Automation Partner Advanced Robotics Technologies

Meet your 300mm Automation Partner

Advanced Robotics Technologies Kensington Laboratories’ is an advanced robotics technology leader committed to developing and manufacturing the highest quality, most reliable and cost effective atmospheric wafer handling robots in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership.

PATENTED EDGE GRIP TECHNOLOGY Kensington Laboratories’ exclusive patented edge grip technology is a prime example of our technology leadership in automation systems. Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination.

Our field proven edge grip technology enables our 300mm robots to provide true edge grip, virtually eliminating the potential for defects due to particulate generation and improving your process yields.

FEATURES • Patented Edge Grip Technology • Patented Automated Self-Teaching System Continuous Rotation Capability • State-Of-The-Art Motion Control • Capable Machine Tool Quality Construction • High Resolution Optical Encoders on All

PATENTED SELF-TEACH SYSTEM The advantage of our self-teaching system begins with its installation. An expert technician is required to teach other robotics systems, a time consuming process taking many hours, perhaps days. With its built in sensor, a Kensington robot is capable of “seeing� and measuring its environment and performing an automated self-teach. In effect putting an automation expert inside the system itself, reducing the time required to bring the system online and providing for easy interchangeability of our robots.

INTEGRATED TRANSMISSIVE OPTICAL SENSOR An eye safe LED is integrated into the robot end effector and provides the robot with superior sensing capabilities. Allowing the robot to not only accurately map the location and presence of wafers in a cassette, but also to detect common errors, such as missing, doubled, or cross-slotted wafers. Built in sensor technology, enables the robot to measure its environment, providing the robot with the wafer’s elevation and edge locations.

STANDARD ATMOSPHERIC ROBOT PLATFORMS Kensington Laboratories’ atmospheric robots are designed to the most rigorous performance standards. Its machine tool quality construction and the meticulous selection of its long-life components contribute to our robots unsurpassed reliability and performance. Our modular design and patented self-teaching capability allow our robots to be used both in new systems and as a drop-in field replaceable unit (FRU) in existing systems. Our attention to detail and our focus on performance and reliability ensure our robots provide the highest throughput and lowest cost of ownership available.

REACH CONFIGURATIONS

WORKING ENVELOPE

Z TRAVEL OPTIONS

TRACK SYSTEMS Kensington Laboratories’ standard track solutions provide high acceleration and overall speed in a reliable and proven design. The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered systems. Our track systems can also be equipped with integrated alignment features that assure the locational accuracy of other critical automation elements of the system, such as 300mm pod doors and load ports.

External Our external prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach.

Integrated The integrated prealigner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and prealigner system and maximizing cleanliness, accuracy, and reliability.

PREALIGNERS Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.

SUPINATION Kensington Laboratories’ single arm robots can be equipped with a supinating wrist for an additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Kensington Laboratories, LLC

Service - Kensington robot

Phone: 510.324.0126

and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

6200 Village Parkway Dublin , CA 94568 Fax: 510.324.0130

www.kensingtonlabs.com

Our Toll Free Number 1-888-977-7800