KEY FEATURES OF 300MM SINGLE ARM ATMOSPHERIC WAFER HANDLING ROBOT Key Features
Patented edge grip technology Patented Automated Self Teach Through-beam wafer mapping Advanced wafer cassette error detection Direct drive technology Continuous rotation State-of-the-art motion control Off center pick and place Machine tool quality construction High resolution optical encoders on all axes Reduced wear Z axis counter balance
OPTIONS 4th axis: supinator wafer flipper Vacuum end effectors (200mm and 300mm) Reflective mappers E-diagnostics with GUI
MultiLink Single Arm with supinator wafer flipper
Through-beam wafer mapping
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