Key Features of 300mm Single Arm Atmospheric Wafer Handling Robot

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KEY FEATURES OF 300MM SINGLE ARM ATMOSPHERIC WAFER HANDLING ROBOT Key Features

Patented edge grip technology Patented Automated Self Teach Through-beam wafer mapping Advanced wafer cassette error detection Direct drive technology Continuous rotation State-of-the-art motion control Off center pick and place Machine tool quality construction High resolution optical encoders on all axes Reduced wear Z axis counter balance

OPTIONS 4th axis: supinator wafer flipper Vacuum end effectors (200mm and 300mm) Reflective mappers E-diagnostics with GUI

MultiLink Single Arm with supinator wafer flipper

Through-beam wafer mapping

FOR LEARN MORE AT REFERENCE: KENSINGTONLABS.COM! WWW.ENTREPRISESCANADA.CA


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