Kensington XYZ Precision Stage Ensures Reasonable Reliability

The XYZ precision stage is designed by combining three existing DOF motion stages via nested structure. Through the use of previously developed stages, this approach has apparently decreased the effort for the design and analysis steps and offer reasonable reliability. To implement it successfully, electrical link to the engaged stages, electrical isolation, and additional floating frames are launched for the chosen DOF motion stages.

There are variety of applications in micro and nanotechnologies such as optical cross connect, scanning probe microscopy, and microscopical imaging, these are based on high-density data

storage so they demand the potential of positioning over a motion range of micrometers along the three independent axes.

So the development of XYZ precision stages has evolved swiftly during the past years.

Mems bases positioning stages are attractive due to their low costs, faster responses, and small sizes. In addition to all this, it also offers flexibility for the system integration.

The wafer handling systems can easily be assembled into complete micro and nano positioning systems. These can also act as simple manipulators as well as fussy micro and nano robots. The clients can use these micro and nano positioning systems which will meet all their requirements.

The various positioning systems developed include 2D manipulator which consists of two SLC1780-S positioners which are mounted on the top of each other. This manipulator can be used down to high vacuum. Nearly all the positioners can be stacked onto each other to build the stages with more than two degrees of freedom (DOF).

The 3D gimbal mount include 3 positioners and is very compact and suitable for the positioning systems which demands higher angular accuracy in all three Euler angles. It can be customized to various loads as per the requirement.