Kensington Robot Repariring & Automation Solutions

ABOUT US Kensington’s success is connected to the success of our customers’ business. That’s one of the reasons why so many companies count on Kensington for a comprehensive, customer-focused approach that helps them maximize productivity and profits with wafer handling robots and precision motion control solutions, stages.

Kensington has built its reputation by providing OEMs and end users with precision motion control and wafer handling robot solutions manufactured for low cost of ownership and a lifetime of dependable, high-precision results.

Repairs And Spares

Kensington builds wafer handling robots and precision motion control stages then supports them with exceptional service for a lifetime of productivity. The wafer handling robots and precision motion control stage Spares & Repairs programs are designed to help you maximize operating life, avoid obsolescence and optimize capital investment in equipment.

End Effectors Kensington’s End-Effector innovations have

advanced

wafer

processing

capability. These include 300mm EdgeGrip for reduce particle performance and Through Beam Technology for wafer mapping. End-Effectors are used across the semiconductor equipment spectrum: Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.

Pre Aligners Several configurations of wafer aligners are available that support wafer sizes from 50 mm to 300 mm. The pre aligner technology is available in stand alone units as well as integrated

directly

into

robots.

The

alignment technology is used for opaque as well as transparent materials and the wafer aligner supports substrates that are not round. Pre Aligners are used across the semiconductor

equipment

spectrum:

Metrology Systems; Deposition Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.

Wafer Handling Robot

High-Throughput/High-Reliability Random Access Cylindrical Coordinate System Wafer Handling Robot.

Reliability proven in over two decades of semiconductor

equipment

wafer

handler

applications – 10,000 hour MTBF. Real-time force-sensing on all axes for operator and wafer safety Cleanliness surpassing Class 1, semiconductor equipment requirements Wafer handler robot with unmatched throughput, precision, reliability.

MultiLink SCARA Wafer Robot Kensington’s Atmospheric MultiLink SCARA Wafer Handling Robots have addressed the needs for semiconductor wafer and quartz substrate handling for more than a quarter century. Key innovative features developed for semiconductor robot wafer handling : Through Beam Wafer Sensing; 300mm Edge-Grip

End-Effector

:

Robot

Self-Teach

Functionality. MultiLink SCARA wafer robots are used

across

spectrum

:

the

semiconductor

Metrology

Systems;

equipment Deposition

Systems; Etch Systems; Reticle Process Systems; Thermal Processing Systems.

Contract Manufacturing Services Stages

Kensington

provides

contract

manufacturing

services for stages in addition to manufacturing its own products. Customers gain both a technical

and

commercial

benefit

using

Kensington for outsource production at stages.

Commercial benefits include: variable cost work force; no inventory cost; variable cost experience engineering team & procurement. Technical benefits

include

experience

in

Kensington’s

manufacturing

precision automation products.

history highly

and

reliable

Gantry Stage Precision Motion Control System

Kensington’s gantry stage platforms provide superior performance and flexibility with highly

customizable/configurable

precision

motion control packages. Designs can be modified to meet acceleration, velocity, and travel range requirements with high precision performance.

Integrated Precision X-Y-Z-Θ Stages Kensington’s integrated precision xyzΘ stage and rotary stage solutions have addressed the needs for precision motion control for more than a quarter century. The multiple axis stages position samples, silicon wafers and photonic devices, quickly with precision and repeatably.

Integrated photonic and wafer stage designs range from dual axis to 4 axis (x, y, z, Θ) designs. Vertical axis designs utilize the Mini-z stage for small movements or can be fully integrated with vacuum ballast z-wedge for long travel and heavy pay loads.

Precision Motion Control - The 33LR Integrated X, Y, Θ Stage Compact integrated precision motion control X, Y, Θ stage built with Kensington’s precision single axis linear stage and precision rotary stage technology. The precision xyΘ stage 33LR has linear stage X-Y travel distance of 80 mm x 80 mm with continuous 360° rotation. The precision motion control 33LR unit is used as a stand alone system or integrated with other Kensington or 3rd party precision motion control systems to address a wide range of applications requiring precision xyΘ stages.

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Kensington Laboratories, LLC

Service -

Phone: 510.324.0126

Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

6200 Village Parkway Dublin , CA 94568 Fax: 510.324.0130

www.kensingtonlabs.com

Our Toll Free Number 1-888-977-7800