KENSINGTON ROBOT PLATFORMS Kensington Robots
STANDARD ATMOSPHERIC ROBOT PLATFORMS Kensington Laboratories’ atmospheric robots are designed to the most rigorous performance standards. Its machine tool quality construction and the meticulous selection of its long-life components contribute to our robots unsurpassed reliability and performance.
PREALIGNERS
Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.
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