Field Replaceable Spares: Kensington Robot, Kensington Stage, Newport PM500

Field Replaceable Spares: Kensington Robot, Kensington Stage, Newport PM500

About us Kensington is a leading supplier of wafer handling robots, precision motion control, linear stages, rotary stages and integrated stages designed to meet the most demanding requirements. The systems combine nanometer-scaleprecision and fine-resolution capabilities with robust performance to meet customers’ needs for high reliability, long operational life and low cost-of-ownership. One unique feature of Kensington robots and stages is the Zero Backlash design, which delivers precise positioning and enhanced repeatability.

Newport M500 Kensington FRUs, Kensington robot spare parts and Newport PM500 spare parts Field Replaceable Units, are designed to minimize downtime and maximize productivity and can be quickly and easily installed on-site by customers without special tools or testing.

The Kensington robot spare and Newport PM500 spare FRU assemblies are the same components used for new Kensington robot and stage manufacturing and in the repair center, with additional testing for field replacement certification.

Features • Smooth rapid movement immune to linkage backlash • Hysteresis and wear eliminated by non-contacting read-head design • Real-time force-sensing with programmable soft limits for safe operation • EMO features halts motion immediately • System initialization not required to restart after EMO • Quite operation without resonances or excessive heat • No PID parameter tuning with high step-and-settle performance via mechanical controls and design • Resolution : Linear – 100nm, 50nm and 25nm; Rotary – 0.0003° • Bi-directional : Linear – 200nm, 100nm and 50nm; Rotary – 0.0006° • Acceleration : 0.001 to 0.25g • Velocity range

Electronics • Axis cards which feature current versions of firmware • Single Board Computers (SBC) which feature current versions of firmware • Kensington M4000 Controller, Newport PM500 Controller

Sub-Assemblies • • • •

Robots – Multilink and WFH Tri-CCD Modules, WFH Pre-Aligner CCD Modules for all Multilink and stand alone pre-aligners Stages – Kensington 6000 Series, Kensington 8500 Series and Newport PM500 Series

End-Effectors • • • • •

Available as new products for immediate installation MultiLink Through-Beam End-Effectors MultiLink Edge Grip End-Effectors MultiLink Vacuum Grip End-Effectors WFH robot paddles, double and single.

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Kensington Laboratories, LLC

Service - Kensington robot

Phone: 510.324.0126

and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

6200 Village Parkway Dublin , CA 94568 Fax: 510.324.0130

www.kensingtonlabs.com

Our Toll Free Number 1-888-977-7800