Performix System - High Performance 300mm EFEM

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The Performix 300mm EFEM is an innovative, high quality equipment front end solution that provides exceptional throughput and world class tool availability.

Kensington Laboratories is an advanced technology leader committed to developing and manufacturing the highest quality, most reliable, and cost effective automation solutions in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership. All Kensington Laboratories’ products are backed by our global service and support network.

TM

Kensington Laboratories

d

FM27207

+1.510.620.0235 ext. 718 • www.kensingtonlabs.com

© 2006 Kensington Laboratories. All rights reserved. Performix, MultiLink, and Automated Self Teach are trademarks of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.

All other trademarks are property of their respective owners.

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High Performance 300mm EFEM

Performance Excellence

Kensington Laboratories offers Performix™, a 300mm equipment front-end module (EFEM) wafer handling environment designed for ISO Class 1 specifications, to address the growing constraints faced by the semiconductor industry.

Performix combines the best of newly developed advanced robotic technologies and industry-proven equipment. Available in 2, 3, and 4 port configurations, the Performix system’s monocoque construction, a unibody frame, provides a sturdy foundation for the four major components, each uniquely designed to provide the speed, accuracy, and flexibility to meet your particular needs.

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ADO Load Port The ADO 300mm load port accesses the wafer in up to 6 seconds, 1.5 to over 3 times better than competitive products.

Stringent device requirements have forced IC manufacturers to focus on increasingly complex process development, relying on experts in the automation sector to provide the necessary

• Best in class FOUP interoperability: Kensington Laboratories’ patented latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition, ensuring excellent repeatability.

clean environment, system performance, and throughput. Managing the higher cost of production mandates an unparalleled level

• Built to last: A robust design and precision assembly ensures exceptional lifetime and performance.

of automation. The Performix EFEM responds to that call with an integrated sub-system for metrology and process equipment

• Superior reliability: Demonstrated MCBF >600,000 cycles at 90% confidence level.

that leverages Kensington Laboratories’ 25 years of advanced robotic experience. The result is a product with high reliability,

2 Wide Performix EFEM

world-class tool availability, and exceptional throughput needed

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for volume production at the 90 nm technology node and below.

Performix combines the best of newly developed advanced robotic technologies

Performix is a self-contained mini-environment which utilizes precision robotics in an ultra-clean wafer handling area. SEMI

and industry-proven equipment.

compliant and configured for two to four BOLTS-compliant ports, the Performix design facilitates interfacing among fab equipment. The major automation components include the ADO

MultiLink Robotic Systems

300mm load port, MultiLink™ robotic system for wafer handling, prealigner, and optional central controller.

3 Wide Performix EFEM ADO-S 300mm load port with wafer mapper

Introduced in 1995, MultiLink robotic systems combine mature, proven technology with state of the art performance. These robots are mainstays in fabs throughout the industry.

• Exceptional throughput: Proprietary z axis design enables market leading peak speeds of 55 inches/second and acceleration rates of up to 200 inches/second2.

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• Precision wafer placement: High performance design provides precise motion control and eliminates structural deflection and creep.

• Fast swap times: Dual arm systems have demonstrated swap times of less than 3 seconds and throughput greater than 360 wph on a 4 port configuration.

• 300mm installed base: MultiLink robots are currently installed at 98% of all 300mm fabs.

4 Wide Performix EFEM

Optional control rack and GUI

MultiLink Dual Arm robot, track, and prealigner

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Performix System

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High Performance 300mm EFEM

Performance Excellence

Kensington Laboratories offers Performix™, a 300mm equipment front-end module (EFEM) wafer handling environment designed for ISO Class 1 specifications, to address the growing constraints faced by the semiconductor industry.

Performix combines the best of newly developed advanced robotic technologies and industry-proven equipment. Available in 2, 3, and 4 port configurations, the Performix system’s monocoque construction, a unibody frame, provides a sturdy foundation for the four major components, each uniquely designed to provide the speed, accuracy, and flexibility to meet your particular needs.

d

ADO Load Port The ADO 300mm load port accesses the wafer in up to 6 seconds, 1.5 to over 3 times better than competitive products.

Stringent device requirements have forced IC manufacturers to focus on increasingly complex process development, relying on experts in the automation sector to provide the necessary

• Best in class FOUP interoperability: Kensington Laboratories’ patented latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition, ensuring excellent repeatability.

clean environment, system performance, and throughput. Managing the higher cost of production mandates an unparalleled level

• Built to last: A robust design and precision assembly ensures exceptional lifetime and performance.

of automation. The Performix EFEM responds to that call with an integrated sub-system for metrology and process equipment

• Superior reliability: Demonstrated MCBF >600,000 cycles at 90% confidence level.

that leverages Kensington Laboratories’ 25 years of advanced robotic experience. The result is a product with high reliability,

2 Wide Performix EFEM

world-class tool availability, and exceptional throughput needed

d d

for volume production at the 90 nm technology node and below.

Performix combines the best of newly developed advanced robotic technologies

Performix is a self-contained mini-environment which utilizes precision robotics in an ultra-clean wafer handling area. SEMI

and industry-proven equipment.

compliant and configured for two to four BOLTS-compliant ports, the Performix design facilitates interfacing among fab equipment. The major automation components include the ADO

MultiLink Robotic Systems

300mm load port, MultiLink™ robotic system for wafer handling, prealigner, and optional central controller.

3 Wide Performix EFEM ADO-S 300mm load port with wafer mapper

Introduced in 1995, MultiLink robotic systems combine mature, proven technology with state of the art performance. These robots are mainstays in fabs throughout the industry.

• Exceptional throughput: Proprietary z axis design enables market leading peak speeds of 55 inches/second and acceleration rates of up to 200 inches/second2.

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• Precision wafer placement: High performance design provides precise motion control and eliminates structural deflection and creep.

• Fast swap times: Dual arm systems have demonstrated swap times of less than 3 seconds and throughput greater than 360 wph on a 4 port configuration.

• 300mm installed base: MultiLink robots are currently installed at 98% of all 300mm fabs.

4 Wide Performix EFEM

Optional control rack and GUI

MultiLink Dual Arm robot, track, and prealigner

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PRECISION

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Ease of Use The Performix advantage resides in its ease of use. The impact is superior system availability.

SPEED

Automated Self Teach robotics

• Largest installed base of edge grip end effectors is the result of industry leading, proprietary edge grip wafer handling technology, ensuring low backside wafer particle contamination.

• Simplified command set from the central controller allows for fast, intuitive customer programming of the Performix EFEM automation.

Prealigner High-speed prealignment provides state of the art placement accuracy in both vacuum chuck and edge contact configurations.

• Automated Self Teach™ is patented software that speeds system start ups in a highly repeatable manner. To utilize Automated Self Teach, an operator simply selects pre-programmed, approximate locations for the load port, prealigner, and process equipment.

Kensington Laboratories’ patented, optical through-beam wafer locating system automatically registers these locations and calibrates the robot with high accuracy through a short motion operation.

• Embedded E-Diagnostics enable remote, high level functional testing of components for fault isolation/detection, and provide software teaching of automated material handling system drop off position.

Key Patents • Latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition

Central Controller The optional central controller provides a simple single wire host interface, coordinating all EFEM operations. A straightforward, user-friendly command set makes interfacing and controlling the Performix fast and easy.

System Features The Performix system’s unique monocoque frame forms a rigid enclosure that reduces vibration and enhances stability. This design eliminates the need for a traditional skin-on-frame EFEM design.

A patented datum plane serves as a reference point to ensure precision alignment of components and eliminate tolerance variability.

More importantly, the datum plane puts precision where it is needed – in the automation components – thus eliminating high tolerance requirements in auxiliary sub-systems. The prealigned, preleveled Performix EFEM simplifies system integration, providing faster installation and start up, and guaranteeing repeatable load port and robotic alignment, and wafer position.

• FOUP latchkeys require no vacuum door attachment • Dual end effector, multiple link robot arm system with corner reach-around and extended reach capabilities • High torque, synchronously operating multiple link robot arm mechanism • Continuously rotatable multiple link robot arm mechanism • Robot arm with specimen edge gripping end effector • Robot arm with specimen sensing and edge gripping end effector • Self-teaching robot arm position method • Through-beam wafer mapping

Through-beam wafer mapper end effector

d Zero Preventative Maintenance is an integral part of all Kensington robot systems. No periodic lubrication or adjustments are required under standard operating conditions.

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PRECISION

Page 5

Ease of Use The Performix advantage resides in its ease of use. The impact is superior system availability.

SPEED

Automated Self Teach robotics

• Largest installed base of edge grip end effectors is the result of industry leading, proprietary edge grip wafer handling technology, ensuring low backside wafer particle contamination.

• Simplified command set from the central controller allows for fast, intuitive customer programming of the Performix EFEM automation.

Prealigner High-speed prealignment provides state of the art placement accuracy in both vacuum chuck and edge contact configurations.

• Automated Self Teach™ is patented software that speeds system start ups in a highly repeatable manner. To utilize Automated Self Teach, an operator simply selects pre-programmed, approximate locations for the load port, prealigner, and process equipment.

Kensington Laboratories’ patented, optical through-beam wafer locating system automatically registers these locations and calibrates the robot with high accuracy through a short motion operation.

• Embedded E-Diagnostics enable remote, high level functional testing of components for fault isolation/detection, and provide software teaching of automated material handling system drop off position.

Key Patents • Latchkey opening mechanism opens all SEMI standard FOUP configurations, in any condition

Central Controller The optional central controller provides a simple single wire host interface, coordinating all EFEM operations. A straightforward, user-friendly command set makes interfacing and controlling the Performix fast and easy.

System Features The Performix system’s unique monocoque frame forms a rigid enclosure that reduces vibration and enhances stability. This design eliminates the need for a traditional skin-on-frame EFEM design.

A patented datum plane serves as a reference point to ensure precision alignment of components and eliminate tolerance variability.

More importantly, the datum plane puts precision where it is needed – in the automation components – thus eliminating high tolerance requirements in auxiliary sub-systems. The prealigned, preleveled Performix EFEM simplifies system integration, providing faster installation and start up, and guaranteeing repeatable load port and robotic alignment, and wafer position.

• FOUP latchkeys require no vacuum door attachment • Dual end effector, multiple link robot arm system with corner reach-around and extended reach capabilities • High torque, synchronously operating multiple link robot arm mechanism • Continuously rotatable multiple link robot arm mechanism • Robot arm with specimen edge gripping end effector • Robot arm with specimen sensing and edge gripping end effector • Self-teaching robot arm position method • Through-beam wafer mapping

Through-beam wafer mapper end effector

d Zero Preventative Maintenance is an integral part of all Kensington robot systems. No periodic lubrication or adjustments are required under standard operating conditions.

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PERFORMIX SYSTEM

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Reputation for Leadership in Robotic Technology Performix is backed by Kensington Laboratories’ reputation for high quality design and high performance technology. With a large installed base of robots and systems, Kensington Laboratories’ Performix sub-systems ensure faster start-up times and improved placement accuracies, in an ISO Class 1 mini-environment.

Based upon a history of cutting-edge system design, Performix integrates the highest quality components to achieve performance unrivaled in the marketplace. Kensington has a large installed base of robotic systems with robots numbering in the thousands and wafer sorters exceeding 1,500.

d Performix integrates the highest quality components

Configurable Solutions Flexible load port and robotic components designed for configurable solutions allow Performix to be easily tailored to a variety of automation requirements. Features that make the Performix EFEM configurable to your specific needs include:

Specifications Dimensions* 2 Wide EFEM

73.50" H x 49.81" W x 47.70" D (1866.90 mm H x 1265.17 mm W x 1211.58 mm D)

3 Wide EFEM

90.55" H x 65.76" W x 49.53" D (2299.97 mm H x 1670.30 mm W x 1258.06 mm D)

4 Wide EFEM

87.56" H x 83.18" W x 46.16" D (2224.02 mm H x 2122.77 mm W x 1172.46 mm D)

Utility Connections • ADO load port with or without wafer mapping option.

• MultiLink Dual Arm (4 axes of motion) and MultiLink Single Arm (3 and 4 axes of motion) robots.

• End effector options: 300mm edge grip, 300mm vacuum grip, 300mm supinator wafer flipper, and 300mm batch edge grip – all with through-beam wafer mapper. The integrated through-beam wafer mapper uses an eye safe LED that optically maps the entire FOUP and detects common storage errors.

• Yaw axis robots (trackless) or Track configurations.

Electrical power supply

Vacuum Load port Robot

None required 10 liter/min at 635 mm Hg (21 cft/hr at 25 in Hg)

Compressed air (input) Load port

Min. 60 psi, Max. 145 psi (relative) oil-free purified >5 µm

Consumption Connection Robot

>1 m3/h for 10 cycles/hour One-touch fitting for 1/4" tubing None required

Ambient Conditions Temperature Humidity

based upon a history of

Cleanliness External Communications Compliance

cutting-edge system design.

200 – 240 VAC, 50/60Hz, 1-phase, with a minimum of 3.0kVA capacity

E1.9 E15.1 E47.1 E57 E62 E63 E64 E84 E99 F47 S2/S8/S14 CE

Operation: +15 to +25°C (58 to 77°F) Transport: –25 to +55°C (–13 to 181°F) Operation: 10% to 95% relative humidity Transport: 5% to 95% relative humidity ISO Class 1 RS232 or TCP/IP 300 mm Cassette 300 mm Tool Load Port 300 mm Boxes and Pods Kinematic Couplings 300 mm FIMS BOLTS Interface 300 mm Cart Docking AMHS Parallel I/O Interface CIDRW Electrical Voltage Sag Standard Safety Guidelines EMC, LVD, and MD Directives

*Dimensions are approximate depending on your EFEM configuration.

High Performance 300mm EFEM d

Kensington Laboratories: The Leader in Robotic Technology

Yaw axis robot (trackless)

MultiLink Dual Arm robot with 300mm batch edge grip end effector

300mm edge grip end effector and supinator wafer flipper

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PERFORMIX SYSTEM

Page 7

Reputation for Leadership in Robotic Technology Performix is backed by Kensington Laboratories’ reputation for high quality design and high performance technology. With a large installed base of robots and systems, Kensington Laboratories’ Performix sub-systems ensure faster start-up times and improved placement accuracies, in an ISO Class 1 mini-environment.

Based upon a history of cutting-edge system design, Performix integrates the highest quality components to achieve performance unrivaled in the marketplace. Kensington has a large installed base of robotic systems with robots numbering in the thousands and wafer sorters exceeding 1,500.

d Performix integrates the highest quality components

Configurable Solutions Flexible load port and robotic components designed for configurable solutions allow Performix to be easily tailored to a variety of automation requirements. Features that make the Performix EFEM configurable to your specific needs include:

Specifications Dimensions* 2 Wide EFEM

73.50" H x 49.81" W x 47.70" D (1866.90 mm H x 1265.17 mm W x 1211.58 mm D)

3 Wide EFEM

90.55" H x 65.76" W x 49.53" D (2299.97 mm H x 1670.30 mm W x 1258.06 mm D)

4 Wide EFEM

87.56" H x 83.18" W x 46.16" D (2224.02 mm H x 2122.77 mm W x 1172.46 mm D)

Utility Connections • ADO load port with or without wafer mapping option.

• MultiLink Dual Arm (4 axes of motion) and MultiLink Single Arm (3 and 4 axes of motion) robots.

• End effector options: 300mm edge grip, 300mm vacuum grip, 300mm supinator wafer flipper, and 300mm batch edge grip – all with through-beam wafer mapper. The integrated through-beam wafer mapper uses an eye safe LED that optically maps the entire FOUP and detects common storage errors.

• Yaw axis robots (trackless) or Track configurations.

Electrical power supply

Vacuum Load port Robot

None required 10 liter/min at 635 mm Hg (21 cft/hr at 25 in Hg)

Compressed air (input) Load port

Min. 60 psi, Max. 145 psi (relative) oil-free purified >5 µm

Consumption Connection Robot

>1 m3/h for 10 cycles/hour One-touch fitting for 1/4" tubing None required

Ambient Conditions Temperature Humidity

based upon a history of

Cleanliness External Communications Compliance

cutting-edge system design.

200 – 240 VAC, 50/60Hz, 1-phase, with a minimum of 3.0kVA capacity

E1.9 E15.1 E47.1 E57 E62 E63 E64 E84 E99 F47 S2/S8/S14 CE

Operation: +15 to +25°C (58 to 77°F) Transport: –25 to +55°C (–13 to 181°F) Operation: 10% to 95% relative humidity Transport: 5% to 95% relative humidity ISO Class 1 RS232 or TCP/IP 300 mm Cassette 300 mm Tool Load Port 300 mm Boxes and Pods Kinematic Couplings 300 mm FIMS BOLTS Interface 300 mm Cart Docking AMHS Parallel I/O Interface CIDRW Electrical Voltage Sag Standard Safety Guidelines EMC, LVD, and MD Directives

*Dimensions are approximate depending on your EFEM configuration.

High Performance 300mm EFEM d

Kensington Laboratories: The Leader in Robotic Technology

Yaw axis robot (trackless)

MultiLink Dual Arm robot with 300mm batch edge grip end effector

300mm edge grip end effector and supinator wafer flipper

M-04041EFEM_Brochure8PG.qxd

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8/31/06

3:34 PM

Page 1

The Performix 300mm EFEM is an innovative, high quality equipment front end solution that provides exceptional throughput and world class tool availability.

Kensington Laboratories is an advanced technology leader committed to developing and manufacturing the highest quality, most reliable, and cost effective automation solutions in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership. All Kensington Laboratories’ products are backed by our global service and support network.

TM

Kensington Laboratories

d

FM27207

+1.510.620.0235 ext. 718 • www.kensingtonlabs.com

© 2006 Kensington Laboratories. All rights reserved. Performix, MultiLink, and Automated Self Teach are trademarks of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories.

All other trademarks are property of their respective owners.

M-04041

H I G H

P E R F O R M A N C E

3 0 0 m m

E F E M