EFEM- Reputation for Leadership in Robotic Technology

EFEM

Reputation for Leadership in Robotic Technology

About Performix is backed by Kensington Laboratories’ reputation for high quality design and high performance technology. With a large installed base of robots and systems, Kensington Laboratories’ Performix sub-systems ensure faster start-up times and improved placement accuracies, in an ISO Class 1 mini-environment. Based upon a history of cutting-edge system design, Performix integrates the highest quality components to achieve performance unrivaled in the marketplace.

Configurable Solutions Flexible load port and robotic components designed for configurable solutions allow Performix to be easily tailored to a variety of automation requirements. Features that make the Performix EFEM configurable to your specific needs include: • ADO load port with or without wafer mapping option.

• Multilink Dual Arm (4 axes of motion) and MultiLink Single Arm (3 and 4 axes of motion) robots.

• End effector options: 300mm edge grip, 300mm vacuum grip, 300mm supinator wafer flipper, and 300mm batch edge grip – all with throughbeam wafer mapper. The integrated through-beam wafer mapper uses an eye safe LED that optically maps the entire FOUP and detects common storage errors.

• Yaw axis robots (trackless) or Track configurations.

Specifications

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126

Service - Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

Fax: 510.324.0130

www.kensingtonlabs.com

Our Toll Free Number 1-888-977-7800