EASE OF USE PERFORMIX SYSTEM HIGH PERFORMANCE 300 MM EFEM
The Performix advantage resides in its ease of use. The impact is superior system availability.
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AUTOMATED SELF TEACH™
Automated Self Teach™ is patented software that speeds system start ups in a highly repeatable manner. To utilize Automated Self Teach, an operator simply selects pre-programmed, approximate locations for the load port, prealigner, and process equipment.
Kensington Laboratories’ pate ted, optical through-beam wafer locating system automatically registers these locations and calibrates the robot with high accuracy through a short motion operation.
2 Largest installed base of edge grip end effectors is the result of industry leading, proprietary edge grip wafer handling technology, and ensuring low backside wafer particle contamination.
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SIMPLIFIED COMMAND SET
Simplified command set from the central controller allows for fast, intuitive customer programming of the Performix EFEM automation.
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EMBEDDED E-DIAGNOSTICS
Embedded E-Diagnostics enable remote, high level functional testing of components for fault isolation/detection, and provide software teaching of automated material handling system drop off position. VISIT KENSINGTONLABS.COM FOR MORE!