Brief Introduction to Wafer Handling Equipment & Stage Repair SCARA Wafer Robot
Due to the growing numbers of semiconductor FABs, the demand for robotic systems is getting high as it plays a vital role in handling the material from both front-end and back-end. There are several processes, including the transformation of wafers can be made by the wafer handling equipment to increase the speed of the machines.
How Robot Handling Systems Support in Task Manipulation? The essential functions of robot handling systems for task manipulation are given below: • The RHS allows a restricted straight-line movement to place the wafer in the center position. • Once the wafer sets the positioning in the center, the straight line segment connects the process chamber, open cassette, FOUP with the longitudinal axis. • The linear motion coordinated with vertical movement to adjust the inaccurate positioning of the robotic-arm deflection. • Based on the straight line segment, the wafer handling equipment works on the distinct RHS mechanical structures and functions to manipulate the task operations.
Types of Wafer Handling Equipment/ Wafer Handling Robots • Multilink Scara Wafer Robot The Multilink Scara wafer robot is the reliable and robust semiconductor wafer handling robot/equipment which fulfills the needs of quartz substrate by using the beam wafer sensors and endgrip end-effector. Multiple link wafer robots of SCARA include the semiconductor spectrum; likewise, the etch systems and deposition systems, thermal processing, and reticle process systems.
• Random Access Cylindrical Wafer Handling Robot
It is another fully reliable cylinder-shaped wafer managing robot that gives high-throughput, broad recovery intelligence, simple commands, real-time sensing, an off-axis barcode reader to maintain the process. Moreover, WFH proffers a class 1 cleanroom applications, exceptional repeatability, flexible Wafer end-effectors to meet the high standards of performance capabilities.
The innovative functionalities of wafer handling equipment, stage repair are the one-stop solutions to increase the performance of semiconductors.
CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com
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Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com
Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130
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