KENSINGTON LABORATORIES
AUTOMATIC DOOR OPENER– FOUP LOAD PORT 300 mm Wafer FOUP Load Port With Proven HVM Wafer Handling Performance
FEATURE FOUP door opener Preventive Maintenance Not Required Lubrication free lead screw and bearings Alignment of door and advance plate not required FOUP Load Port Fully compatible with all SEMI Standard FOUPs DSP controlled electromechanical/pneumatic closed-loop servos for precise repeatable motion Smooth pod advance with precision motion SEMI Complaint, RoHS Complaint and CE Certified Class 1 Cleanliness Options Wafer mapping with Kensington’s proven Through-Beam technology Scanners: RFID; IRID; Barcode; OCR AMHS Options Programmable lights and buttons
SOURCE: WWW.KENSINGTONLABS.COM/ADO 1-888-977-7800