Advanced Robotics Technologies- Kensington Labs

Advanced Robotics Technologies

Meet your 300mm Automation Partner

About us Kensington Laboratories is an advanced robotics technology leader committed to developing and manufacturing the highest quality, most reliable and cost effective atmospheric wafer handling robots in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership.

PREALIGNERS Both integrated and external pre-aligners use transmissive sensors located within the pre-aligner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features.

External Our external pre-aligner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability.

It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach.

Integrated The integrated prealigner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and prealigner system and maximizing cleanliness, accuracy, and reliability.

Supination Kensington Laboratories single arm robots can be equipped with a supinating wrist for an additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.

Track Systems Kensington Laboratories standard track solutions provide high acceleration and overall speed in a reliable and proven design.

The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered systems. Our track systems can also be equipped with integrated alignment features that assure the locational accuracy of other critical automation elements of the system, such as 300mm pod doors and load ports.

END EFFECTORS Wafer end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications.

CONTACT US Sales – Kensington Robots & Stages, Newport PM500 Stages, Spare Parts sales@kensingtonlabs.com

Service -

Kensington robot and stage repairs, Newport PM500 stage repairs service@kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village Parkway Dublin , CA 94568 Phone: 510.324.0126 Fax: 510.324.0130

www.kensingtonlabs.com

Our Toll Free Number 1-888-977-7800