ADO Automatic Door Opener 300mm FOUP Load Port for Automated Wafer Handling Kensington Laboratories, an industry leader in advanced robotic automation, offers the Automatic Door Opener™ (ADO), a 300mm Load Port designed for today’s rigorous wafer isolation and fab requirements. The ADO offers a host of patented, unique design features which combine to provide superior operational speed, cleanliness, reliability, and integration flexibility for loading and unloading SEMI standard 300mm FOUPs. Kensington’s ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington’s global service and support network.
Specifications Wafer size/capacity Load height Height without carriage Width Depth Weight (with carriage) Noise level @ 1 m FOUP type FOUP sensors FOUP load to open time FOUP open to unload time FOUP clamping Docking motion Reproducibility Electronic unit Communications
300 mm/25 900 mm, adjustable ±10 mm 1374 mm 470 mm 591.5 mm Approx. 75 kg <62 dB SEMI standard E47.1-0697 and E62 Placement and Present 6.90 sec., 7.95 sec. with mapper 5.95 sec., 7.75 sec. with mapper Active independent center lock 70 mm <0.1 mm Microcontroller, Flash Firmware up-loadable Serial, ASCII, 9 pin D-Sub
Utility Connections Electrical power supply 96 watts max @ idle, 240 watts peak, 100240VAC /50-60 Hz standard, +24VDC optional Compressed air (input) Min. 60 psi, Max. 145 psi (relative) oil-free purified <5 μm Consumption <1 m3/h for 10 cycles/hour Connection One-touch fitting for 1/4” tubing Vacuum None required Cleanliness Better than Class 1 operation(when operating in Class 100 or better environment) Ambient Conditions Temperature Humidity Cleanliness Shipping Crate Length Width Height Weight
Operation: +15 to +25°C (58 to 77°F) Transport: -25 to +55°C (-13 to 131°F) Operation: 10% to 95% rel. humidity Transport: 5% to 95% rel. humidity Operation: Class 100 or better on operator side Plywood case 1700 mm 700 mm 900 mm Approx. 50 kg
Complies with applicable portion of industry standards with some intentional exceptions taken for improved performance and interoperability. Specifications are subject to change without notice.
510-620-0235 ext 718 or visit www.kensingtonlabs.com