DS-01031ADO_0810.qxd
9/8/06
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ADO Automatic Door Opener™ 300mm FOUP Load Port for Automated Wafer Handling Kensington Laboratories, an industry leader in advanced robotic automation, offers the Automatic Door Opener™ (ADO), a 300mm Load Port designed for today’s rigorous wafer isolation and fab requirements. The ADO offers a host of patented, unique design features which combine to provide superior operational speed, cleanliness, reliability, and integration flexibility for loading and unloading SEMI standard 300mm FOUPs. Kensington’s ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington’s global service and support network.
• Interoperability: Fully compatible with all SEMI standard FOUPs. • Cleanliness: Better than Class 1 particle performance when integrated in Class 100 or better environment. • Reliability: Robust design combined with precision assembly achieves superior dependability and lifetime performance. • Zero Preventative Maintenance: Superior precision design requires no periodic lubrication or re-alignment. • Repeatability: Industry leading design utilizes DSP controlled electro-mechanical/pneumatic closed-loop servos for precise repeatable motion. • Wafer Mapping: High performance Break-The-Beam wafer mapping option allows fast, accurate wafer detection. • Fab Customization: Configurable features include programmable lights, buttons, carrier ID, and AMHS options. • Compliance*: SEMI, S2, S8, CE, and F47 compliant. • Bridge Tool: 200mm wafer operation (with insert @ 10mm pitch).
DS-01031ADO_0810.qxd
9/8/06
11:52 AM
Page 2
ADO – Automatic Door OpenerTM 300mm FOUP Load Port for Automated Wafer Handling Specifications Wafer size/capacity Load height Height without carriage Width Depth Weight (with carriage) Noise level @ 1 m FOUP type FOUP sensors FOUP load to open time FOUP open to unload time FOUP clamping Docking motion Reproducibility Electronic unit Communications Utility Connections Electrical power supply Compressed air (input) Consumption Connection Vacuum Cleanliness Ambient Conditions Temperature Humidity Cleanliness Shipping Crate Length Width Height Weight
300 mm/25 900 mm, adjustable ±10 mm 1374 mm 470 mm 591.5 mm Approx. 75 kg <62 dB SEMI standard E47.1-0697 and E62 Placement and Present 6.90 sec., 7.95 sec. with mapper 5.95 sec., 7.75 sec. with mapper Active independent center lock 70 mm <0.1 mm Microcontroller, Flash Firmware up-loadable Serial, ASCII, 9 pin D-Sub
ADO-S load port with through-beam wafer mapper
96 watts max @ idle, 240 watts peak, 100-240VAC / 50-60 Hz standard, +24VDC optional Min. 60 psi, Max. 145 psi (relative) oil-free purified <5 µm <1 m3/h for 10 cycles/hour One-touch fitting for 1/4” tubing None required Better than Class 1 operation (when operating in Class 100 or better environment)
• Carrier ID R/W at dock and undock • Twist and Pull FOUP door attach • Twist and Pull center lock FOUP clamp • Servo control/force feedback motion technology • FEOL and BEOL lockout pins • Five FOUP placement sensors
Operation: +15 to +25°C (58 to 77°F) Transport: -25 to +55°C (-13 to 131°F) Operation: 10% to 95% rel. humidity Transport: 5% to 95% rel. humidity Operation: Class 100 or better on operator side Plywood case 1700 mm 700 mm 900 mm Approx. 50 kg
300 mm Cassette 300 mm Tool Load Port 300 mm Boxes and Pods Kinematic Couplings 300 mm FIMS BOLTS interface
• Programmable AMHS drop off position • Finger safe motion control safety circuit • Flash firmware up-loadable • Integrated self-test diagnostics • Configurable status lights
Options • Mobility stand • Wafer mapper, Break-The-Beam type
Specifications Compliance* E1.9 E15.1 E47.1 E57 E62 E63
Additional Key Features
E64 E-84 E-99 F47 S2/S8/S14 CE
300 mm Cart Docking AMHS Parallel I/O Interface CIDRW Electrical Voltage Sag Standard Safety Guidelines EMC, LVD, and MD Directives
* Complies to applicable portion of industry standards with some intentional exceptions taken for improved performance and interoperability. Specifications are subject to change without notice.
• Manual load/unload button/s • Carrier ID R/W interface – RFID AdvanTag™, HERMOS™, Omron® – IRID SMART-Tag™ – Barcode • AMHS Single and Dual E84 PIO for OHT and AGV/RGV • Info pads sensors • Quartz wafer protrusion sensor • SWIF FOUP-For-One interface
510-620-0235 ext 718 or visit www.kensingtonlabs.com © 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners.
• 200mm Bridge Tool (with insert @ 10mm pitch) DS-01031
• E-diagnostics with GUI