Preloaded Piezo Actuators_CoreMorrow

V21 Version

Preloaded Piezo Actuators

Preloaded Piezo Actuators

Preloaded piezo actuators are with casings and load pretightening of piezo stacks, which can not only output the performance of piezo stacks, but also protect them and make them suitable for dynamic applications.

Piezo·Nano·Motion

Preloaded Piezo Actuators mechanical preload force is suitable for high load, high dynamic applications. The blocking force is up to 50,000 N, making it ideal for machine tools, active vibration insulation or adaptive mechanics. The small size and high resonant frequency of them make it ideal for applications such as scanning microscopy, laser tuning, beam deflection, patch clamp or microlithography.

Structure

Heat management “Thermostable”

Moving part

It can increase 2~3 times power and realize highfrequency motion.

Preload mechanical structure Stainless steel casing Piezo ceramic Coaxial Cable

Product customization Screw base(fixed end)

Adapter

Plane

Sphere

Internal thread External thread

Withstand torque

Bottom lead

Add the cooling

Series Models

Mechanism

High voltage

Voltage

Page

0~150V

003

Max displacement to 114μm Open/closed loop Low temperature version optional Various sizes are available

0~150V

006

Max stroke to 260μm Driving voltage: 1000V Max load to 70000N

0~1000V

008

Max displacement to 190μm Max blocking force to 25000N Open/closed loop Low temperature, vacuum version optional

Low voltage

External-thread

Features

Direct Driving

001

Preloaded Piezo Actuators

Preloaded piezo actuators offer nanometer resolution with stroke up to 260μm, microsecond response time. The high internal

Applications

Preloaded Piezo Actuators Stiffness Test

Phased Array Antenna

Cavity Tuning

Fiber End Inspection

002

Piezo·Nano·Motion

Low Voltge Preloaded Piezo Actuators

• Nanoscale resolution

• could withstand the pulling force

• Max displacement 190μm

• Max blocking force 25000N

Closed loop and Open loop Packaged piezoceramic actuators are available in open loop (no position feedback sensor) and closed loop (integrated position feedback sensor) versions. About open loop, the resolution is infinitely high, limited only by the noise of the control device, but due to the hysteresis and creep characteristics of the piezo ceramic, the repeatability and stability are low. The closed-loop version eliminates hysteresis and creep to make it linear.

Higher Height, Larger Displacement

Large OD, Greater Blocking force Min 9mm

Max 45mm

Large height corresponds to large displacement Max 199mm

Max. displacement 190μm

Min 19mm

Large OD corresponding to large blocking force Max. blocking force 25000N

Closed loop Displacement [μm]

Open Loop (μm) S

100 90 80 70

Closed loop

60

Open loop

50

ΔS

40

ΔE

E(V)

30 20

Hysteresis

10

Creep

0

Notes: Amendment nonlinearity used closed-loop sensor.

1~9 channels Computer software, Analog input, Rotary knob Open/closed loop Ave. current: 291/58mA

E53

1 channel Computer software, Analog input Open/closed loop Ave. current: 58mA

1

2

3

4

5

6

7

8

9

10 Voltge[V]

Closed-loop linearity 0.1%F.S., Repeatability 0.05%F.S.

Recommend Controllers E01

0

LEMO sensors connector E63.C

1 channel Open loop Computer software Bandwidth：700Hz（-3dB）

003

Preloaded Piezo Actuators

Features

Drawings

L

3±0.5

Ø9 Ø3

Ø9

6

M2

Ø9 Ø3

SW2mm

6±0.5

2

M23

Ø3

M34

3

VS10

L 4±0.5 Ø10

M3 6±0.5

2

M34

Ø4

M4

L

2

Ø15

Ø6

M44

Ø12 SR1.5

Ø5 4±0.5

Sphere

Plane

Ø15 Ø6

SW5mm

7±0.5

2

M44

SW 5mm

Plane

5±0.5

Ø15 Ø6 M4

4±0.5

Ø5

SW4mm

7±0.5

13

4±0.5

3

Ø4

Sphere

External thread

VS15

Ø10 SR1.5

Ø12

M34

SW 4mm

Plane

5±0.5

Ø12 Ø5

10

Ø5

M44

4±0.5

Ø12

L 3

3±0.5

Ø10 SW3mm

External thread

VS12

Ø3

Sphere

Ø10 Ø4

8 Ø4

M34

3

Ø9 SR1

4±0.5

External thread

Ø15 SR2

5±0.5

External thread

Ø6 4±0.5

Sphere

Plane

L

VS20

5

17

4±0.5

M5

Ø8 Ø20

M55

M87

Ø20 Ø8

L

VS25

Ø20

5

4±0.5

Ø8

SW6mm

8±0.5

SW 6mm

3

Ø20 SR3

6±0.5

External thread

Ø8 4±0.5

Sphere

Plane

22 Ø25 Ø10 M6

M66 Ø10 Ø25

M87

Preloaded Piezo Actuators

VS9

Ø25

8±0.5

SW 8mm

Ø10

SW8mm 3

External thread

6±0.5

Ø25 SR3

Ø10 4±0.5

Sphere

Plane

Notes: Cable length: 1.5m; Connector: LEMO; Optional processing: heat sink, Thermal stability, open/closed loop.(VS9 is only open loop vision). Standard adapter is internal thread

004

Piezo·Nano·Motion

Technical data Stroke [μm]±10%*

Stiffness [N/μm]±20%

Push/pull force [N]

El.capacitance [μF]±20%

Resonant frequency [kHz]

Length L [mm]±0.3

PSt150/4/7 VS9

9

25

200/30

0.17

40

19

PSt150/4/20 VS9

19

12

200/30

0.34

30

28

PSt150/5/7 VS10

9

50

550/100

0.35

40

19

PSt150/5/20 VS10

19

25

550/100

0.8

30

28

PSt150/5/40 VS10

38

12

550/100

1.6

20

46

PSt150/5/60 VS10

57

8

550/100

2.4

15

64

PSt150/5/80 VS10

76

6

550/100

3.2

12

82

PSt150/5/100 VS10

95

5

550/100

4

10

100

PSt150/7/7 VS12

9

120

1200/200

0.7

40

19

PSt150/7/20 VS12

19

60

1200/200

1.8

30

28

PSt150/7/40 VS12

38

25

1200/200

3.6

20

46

PSt150/7/60 VS12

57

15

1200/200

5.4

15

64

PSt150/7/80 VS12

76

12

1200/200

7.2

12

82

PSt150/7/100 VS12

95

10

1200/200

9

10

100

PSt150/7/120 VS12

114

8

1200/200

11

8

118

PSt150/7/140 VS12

133

7

1200/200

13

6

136

PSt150/7/160 VS12

152

6

1200/200

15

5

154

PSt150/10/7 VS15

9

240

2300/500

1.8

40

19

PSt150/10/20 VS15

19

120

2300/250

3.6

30

28

PSt150/10/40 VS15

38

60

2300/250

7.2

20

46

PSt150/10/60 VS15

57

35

2300/250

11

14

64

PSt150/10/80 VS15

76

25

2300/250

14

12

82

PSt150/10/100 VS15

95

20

2300/250

18

10

100

PSt150/10/120 VS15

114

15

2300/250

21

8

118

PSt150/10/140 VS15

133

14

2300/250

25

7

136

PSt150/10/160 VS15

152

13

2300/250

28

6

154

PSt150/10/180 VS15

171

11

2300/250

33

5

172

PSt150/10/200 VS15

190

10

2300/250

37

4

190

PSt150/14/7 VS20

9

350

4700/700

3.6

40

26

PSt150/14/20 VS20

19

250

4700/700

7

30

35

PSt150/14/40 VS20

38

120

4700/700

14

20

53

PSt150/14/60 VS20

57

70

4700/700

22

14

71

PSt150/14/80 VS20

76

50

4700/700

30

12

89

PSt150/14/100 VS20

95

40

4700/700

39

10

107

PSt150/14/120 VS20

114

35

4700/700

47

8

125

PSt150/14/140 VS20

133

30

4700/700

55

7

143

PSt150/14/160 VS20

152

25

4700/700

63

6

161

PSt150/14/180 VS20

171

22

4700/700

71

5

179

PSt150/14/200 VS20

190

20

4700/700

80

4

197

PSt150/20/20 VS25

19

500

7300/1000

14.5

28

37

PSt150/20/40 VS25

38

250

7300/1000

29

18

55

PSt150/20/60 VS25

57

160

7300/1000

43.5

13

73

PSt150/20/80 VS25

76

100

7300/1000

58

11

91

PSt150/20/100 VS25

95

80

7300/1000

72.5

9

109

PSt150/20/120 VS25

114

65

7300/1000

87

7

127

PSt150/20/140 VS25

133

55

7300/1000

101.5

6

145

PSt150/20/160 VS25

152

50

7300/1000

116

5

163

PSt150/20/180 VS25

171

45

7300/1000

130.5

4

181

PSt150/20/200 VS25

190

40

7300/1000

145

3

199

*Nominal Stroke corresponding drive voltage 0-150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Closed-loop linearity and repeatability are better.

005

Preloaded Piezo Actuators

Model

External-thread Preloaded Piezo Actuators

is easy to install and fix with external mechanical structure. It is mainly used for beam deflection, optical adjustment, lens adjustment, angular motion applications, etc. For got max stiffness, the piezo actuator uses lock nut.

Features • External-thread piezo actuators

• Max blocking force to 1200N

• Max displacement to 114μm

• Quick response

• Linear nano meter motion

• Customezed is available

External Thread

Locknut

The thread size on the outer casing is M14×1 and the

There is a standard locknut with a external thread preloaded

thread length is 20mm. The size can be customized.

piezo actuator to increase the stiffness.

Motion Regulation M14 has two motion adjustment modes, one is the position

Adapter

adjustment (coarse adjustment) through the external thread;

Plane, sphere, internal thread, external thread are optional

the other is the ultra-precise adjustment of the position of

and customiezd is available.

the internal piezo stacks by voltage signal control , when the voltage is applied, the piezo actuator can follow the voltage signal to generate an elongation, contraction and

Voltage VS Displacement

reciprocating motion.

FPSt150/7/20M14

Customized

21 Displacement [μm]

Preloaded Piezo Actuators

M14 external thread preloaded piezo actuator is a threaded piezoel actuator outside the mechanical package coating. It

18

The size, connection, displacement, voltage are custom

15

manufactured to your specifications.

12 9 6 3 0 0

1

2

3

4

5

6

7

8

9

10

Input voltage[V]

006

Piezo·Nano·Motion

M14×1

Ø5

Ø5

M4

5

1

4±0.5

SW 4mm

SW 4mm

1.

Ø13

2

SR

SW12

4±0.5

7±0.5

Ø5

3 4±0.5 Ø5

20

SW18

External thread

Plane

Internal thread

Applications Light beam deflection, Light Adjustment, Shock absorption and vibration reduction, Precision Machining

Technical data Stroke [μm]±10%*

Stiffness [N/μm]±20%*

Push/pull force [N]

FPSt150/7/7 M14

9

120

1200/200

0.7

40

19

FPSt150/7/20 M14

19

60

1200/200

1.8

30

28

FPSt150/7/40 M14

38

25

1200/200

3.6

20

46

FPSt150/7/60 M14

57

15

1200/200

5.4

15

64

FPSt150/7/80 M14

76

12

1200/200

7.2

12

82

FPSt150/7/100 M14

95

10

1200/200

9

10

100

FPSt150/7/120 M14

114

8

1200/200

11

8

118

Models

El. capacitance Resonant frequency [μF]±10% [kHz]±20%

Length L [mm]±0.3

*Nominal Stroke corresponding drive voltage 0-150V , Recommended voltage 0~120V for long-term operation to extend lifetime.

Customized is available.

Recommand Controllers Application Frame deflection structure E53.A

E63.A

E63.C

tilt range fix holder coarse adjust by fine pitch thread

piezo cartridge reset spring tilt plate

bearing

007

1 channel

1 channel

1 channel

Open loop

Open loop

Open loop

Analog input

Analog input

Cpmputer software

Ave. current 60mA

Ave. current 20mA

Ave. current 2mA

Preloaded Piezo Actuators

L

M3x 4

Drawings

High Voltge Preloaded Piezo Actuators

withstand certain amount of tension, built-in large output piezo stacks, blocking force is up to 50000N, mainly used for dynamic applications of large loads.

Features • Driving voltage: 1000V

• Max stroke to 260μm

• Parameters could be customized

• Max load to 70000N

• Low electric capacitance

• Open/closed loop version is optional • OD: Ø18mm，Ø25mm，Ø35mm，Ø45mm

Applications Shock wave generation, stabilization, testing and acceleration sensors, active vibration damping, fuel injection, active engine mounting, and various positioning tasks require high loads and/or extreme acceleration.

High dynamic

Large blocking force Blocking force is proportional to CSA. Larger outer diameter,

El. capacitance is relatively small, the operating frequency is

greater blocking force. The blocking force of VS45 series

relatively high. More suitable for high dynamic use.

could reach 50,000 N and the load could reach 70,000 N. 60000 50000 Blocking force[N]

Preloaded Piezo Actuators

High-voltage piezo actuator is piezo stack with driving voltage of 1000V and preloaded mechanical actuator. It could

40000 30000 20000 10000 0

High voltage 0

10

20

30

40

Operating frequency

50

Outer diameter [mm]

Thermo-stable 50000[N]

High voltage piezo actuator

10000 20000 30000 40000 50000 60000 Low voltage piezo actuator

Low voltage

CoreMorrow could Blocking force[N]

provide "thermo-stable" for dynamic operation.

25000[N]

Heat could be efficiently transferred from ceramic

Open/closed loop version

to housing. Thermo-stable

High-voltage piezo actuators are available in open-loop and

housing material is highly efficient thermally conductive

closed-loop versions. Open-loop version has fast response,

metal.

but has the hysteresis and creep characteristics of piezo

Thermo-stable does not change the size of piezo actuator,

ceramics. Closed-loop version has closed-loop sensor that

and the power could be increased by 2~3 times.

allows the control voltage and displacement to a linear

E.g.: PSt1000/16/150VS25 heating stability and heat sink,

relationship that eliminates hysteresis and creep.

the frequency can be up to 500Hz at max displacement.

008

Piezo·Nano·Motion

Recommend piezo controller

Preloaded Piezo Actuators

High-voltage preloaded piezo actuator is driven by high-voltage controller, and CoreMorrow E00/E01 series high-voltage piezo controller could output voltage to 0~1000V.

E01.D1

E00.D3

Drawings

L

18 8

15

M5

Ø18

4±0.5

Ø8

5

M55

VS18

18

8±0.5

Ø10 L

8±0.5

8

Sphere

25 10

25

M6

10

SW8mm

8±0.5

Plane

25 SR3

6±0.5

M87

External thread

30

M88

VS35

4±0.5

3

22

SW 8mm

8

10 4±0.5

3

4±0.5

Ø25

L 5

M66

External thread

VS25

18 SR3

6±0.5

M55

SW 6mm

8

SW6mm

35 14 M8

Ø14 Ø35

Sphere

Plane

35 SW12mm

14±0.5

14

35 SR4

11±0.5

14

6

8±0.5

SW 12mm

L

Sphere

Plane

40

8±0.5

Ø20 Ø45

8

M88

VS45

External thread

M88

45 20

45

M8

20

SW17mm

14±0.5

11±0.5

45 SR5

20

6

8±0.5

SW 17mm

M88

External thread

Sphere

Plane

Notes: Cable length: 1.5m; Connector: LEMO; Optional processing: heat sink, Thermal stability, open/closed loop. Standard adapter is internal thread

009

Technical data

Preloaded Piezo Actuators

Resonant frequency [kHz]

Push/pull force [N]

300

40

4000/700

45

150

35

4000/700

42

85

100

30

4000/700

55/40

51

110

75

27

4000/700

PSt1000/10/60 VS18

80/60

69

170

50

23

4000/700

PSt1000/10/80 VS18

105/80

87

220

35

20

4000/700

PSt1000/10/100 VS18

130/100

105

270

30

15

4000/700

PSt1000/10/125 VS18

160/125

125

330

25

10

4000/700

PSt1000/10/150 VS18

220/150

145

390

17

5

4000/700

PSt1000/10/200 VS18

260/200

185

510

10

3

4000/700

PSt1000/16/7 VS25

12/7

29

60

800

40

12000/1500

PSt1000/16/20 VS25

27/20

35

150

400

35

12000/1500

PSt1000/16/40 VS25

55/40

53

360

200

30

12000/1500

PSt1000/16/60 VS25

80/60

71

540

120

27

12000/1500

PSt1000/16/80 VS25

105/80

89

720

90

23

12000/1500

PSt1000/16/100 VS25

130/100

107

900

75

20

12000/1500

PSt1000/16/125 VS25

160/125

127

1100

60

15

12000/1500

PSt1000/16/150 VS25

200/150

147

1400

50

7

12000/1500

PSt1000/16/200 VS25

260/200

187

1900

35

4

12000/1500

PSt1000/25/7 VS35

12/7

33

140

1800

40

25000/4000

PSt1000/25/20 VS35

27/20

42

350

900

35

25000/4000

PSt1000/25/40 VS35

55/40

60

800

450

30

25000/4000

PSt1000/25/60 VS35

80/60

78

1250

300

27

25000/4000

PSt1000/25/80 VS35

105/80

96

1700

200

23

25000/4000

PSt1000/25/100 VS35

130/100

114

2150

180

20

25000/4000

PSt1000/25/125 VS35

160/125

134

2500

150

15

25000/4000

PSt1000/25/150 VS35

200/150

154

3200

120

7

25000/4000

PSt1000/25/200 VS35

260/200

194

3700

90

5

25000/4000

PSt1000/35/7 VS45

12/7

33

300

4000

37

50000/6000

PSt1000/35/20 VS45

27/20

42

800

2000

33

50000/6000

PSt1000/35/40 VS45

55/40

60

1600

1000

28

50000/6000

PSt1000/35/60 VS45

80/60

78

2500

600

25

50000/6000

PSt1000/35/80 VS45

105/80

96

3300

450

21

50000/6000

PSt1000/35/100 VS45

130/100

114

4100

350

18

50000/6000

PSt1000/35/125 VS45

160/125

134

4900

300

14

50000/6000

PSt1000/35/150 VS45

200/150

154

5700

220

7

50000/6000

PSt1000/35/200 VS45

260/200

194

6500

150

4

50000/6000

Max/Stroke [μm]±15%*

Length L [mm]±0.3

PSt1000/10/7 VS18

12/7

24

20

PSt1000/10/20 VS18

27/20

33

PSt1000/10/25 VS18

35/25

PSt1000/10/40 VS18

Model

El.capacitance Stiffness [nF]±20% [N/μm]±20%

*Nominal Stroke corresponding drive voltage 0-1000V, max stroke drive voltage -200V~1000V. Recommended voltage 0~800V for long-term operation to extend lifetime. Closed-loop linearity and repeatability are better.

010

Harbin Core Tomorrow Science & Technology Co., Ltd. Tel：0451-86268790 Fax：0451-86267847 Postcode：150080 Email：info@coremorrow.com Web：www.coremorrow.com Address：6F, No.41 Hanguang Street Nangang Distric,Harbin

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