V21 Version
Preloaded Piezo Actuators
Preloaded Piezo Actuators
Preloaded piezo actuators are with casings and load pretightening of piezo stacks, which can not only output the performance of piezo stacks, but also protect them and make them suitable for dynamic applications.
Piezo·Nano·Motion
Preloaded Piezo Actuators mechanical preload force is suitable for high load, high dynamic applications. The blocking force is up to 50,000 N, making it ideal for machine tools, active vibration insulation or adaptive mechanics. The small size and high resonant frequency of them make it ideal for applications such as scanning microscopy, laser tuning, beam deflection, patch clamp or microlithography.
Structure
Heat management “Thermostable”
Moving part
It can increase 2~3 times power and realize highfrequency motion.
Preload mechanical structure Stainless steel casing Piezo ceramic Coaxial Cable
Product customization Screw base(fixed end)
Adapter
Plane
Sphere
Internal thread External thread
Withstand torque
Bottom lead
Add the cooling
Series Models
Mechanism
High voltage
Voltage
Page
0~150V
003
Max displacement to 114μm Open/closed loop Low temperature version optional Various sizes are available
0~150V
006
Max stroke to 260μm Driving voltage: 1000V Max load to 70000N
0~1000V
008
Max displacement to 190μm Max blocking force to 25000N Open/closed loop Low temperature, vacuum version optional
Low voltage
External-thread
Features
Direct Driving
001
Preloaded Piezo Actuators
Preloaded piezo actuators offer nanometer resolution with stroke up to 260μm, microsecond response time. The high internal
Applications
Preloaded Piezo Actuators Stiffness Test
Phased Array Antenna
Cavity Tuning
Fiber End Inspection
002
Piezo·Nano·Motion
Low Voltge Preloaded Piezo Actuators
• Nanoscale resolution
• could withstand the pulling force
• Max displacement 190μm
• Max blocking force 25000N
Closed loop and Open loop Packaged piezoceramic actuators are available in open loop (no position feedback sensor) and closed loop (integrated position feedback sensor) versions. About open loop, the resolution is infinitely high, limited only by the noise of the control device, but due to the hysteresis and creep characteristics of the piezo ceramic, the repeatability and stability are low. The closed-loop version eliminates hysteresis and creep to make it linear.
Higher Height, Larger Displacement
Large OD, Greater Blocking force Min 9mm
Max 45mm
Large height corresponds to large displacement Max 199mm
Max. displacement 190μm
Min 19mm
Large OD corresponding to large blocking force Max. blocking force 25000N
Closed loop Displacement [μm]
Open Loop (μm) S
100 90 80 70
Closed loop
60
Open loop
50
ΔS
40
ΔE
E(V)
30 20
Hysteresis
10
Creep
0
Notes: Amendment nonlinearity used closed-loop sensor.
1~9 channels Computer software, Analog input, Rotary knob Open/closed loop Ave. current: 291/58mA
E53
1 channel Computer software, Analog input Open/closed loop Ave. current: 58mA
1
2
3
4
5
6
7
8
9
10 Voltge[V]
Closed-loop linearity 0.1%F.S., Repeatability 0.05%F.S.
Recommend Controllers E01
0
LEMO sensors connector E63.C
1 channel Open loop Computer software Bandwidth：700Hz（-3dB）
003
Preloaded Piezo Actuators
Features
Drawings
L
3±0.5
Ø9 Ø3
Ø9
6
M2
Ø9 Ø3
SW2mm
6±0.5
2
M23
Ø3
M34
3
VS10
L 4±0.5 Ø10
M3 6±0.5
2
M34
Ø4
M4
L
2
Ø15
Ø6
M44
Ø12 SR1.5
Ø5 4±0.5
Sphere
Plane
Ø15 Ø6
SW5mm
7±0.5
2
M44
SW 5mm
Plane
5±0.5
Ø15 Ø6 M4
4±0.5
Ø5
SW4mm
7±0.5
13
4±0.5
3
Ø4
Sphere
External thread
VS15
Ø10 SR1.5
Ø12
M34
SW 4mm
Plane
5±0.5
Ø12 Ø5
10
Ø5
M44
4±0.5
Ø12
L 3
3±0.5
Ø10 SW3mm
External thread
VS12
Ø3
Sphere
Ø10 Ø4
8 Ø4
M34
3
Ø9 SR1
4±0.5
External thread
Ø15 SR2
5±0.5
External thread
Ø6 4±0.5
Sphere
Plane
L
VS20
5
17
4±0.5
M5
Ø8 Ø20
M55
M87
Ø20 Ø8
L
VS25
Ø20
5
4±0.5
Ø8
SW6mm
8±0.5
SW 6mm
3
Ø20 SR3
6±0.5
External thread
Ø8 4±0.5
Sphere
Plane
22 Ø25 Ø10 M6
M66 Ø10 Ø25
M87
Preloaded Piezo Actuators
VS9
Ø25
8±0.5
SW 8mm
Ø10
SW8mm 3
External thread
6±0.5
Ø25 SR3
Ø10 4±0.5
Sphere
Plane
Notes: Cable length: 1.5m; Connector: LEMO; Optional processing: heat sink, Thermal stability, open/closed loop.(VS9 is only open loop vision). Standard adapter is internal thread
004
Piezo·Nano·Motion
Technical data Stroke [μm]±10%*
Stiffness [N/μm]±20%
Push/pull force [N]
El.capacitance [μF]±20%
Resonant frequency [kHz]
Length L [mm]±0.3
PSt150/4/7 VS9
9
25
200/30
0.17
40
19
PSt150/4/20 VS9
19
12
200/30
0.34
30
28
PSt150/5/7 VS10
9
50
550/100
0.35
40
19
PSt150/5/20 VS10
19
25
550/100
0.8
30
28
PSt150/5/40 VS10
38
12
550/100
1.6
20
46
PSt150/5/60 VS10
57
8
550/100
2.4
15
64
PSt150/5/80 VS10
76
6
550/100
3.2
12
82
PSt150/5/100 VS10
95
5
550/100
4
10
100
PSt150/7/7 VS12
9
120
1200/200
0.7
40
19
PSt150/7/20 VS12
19
60
1200/200
1.8
30
28
PSt150/7/40 VS12
38
25
1200/200
3.6
20
46
PSt150/7/60 VS12
57
15
1200/200
5.4
15
64
PSt150/7/80 VS12
76
12
1200/200
7.2
12
82
PSt150/7/100 VS12
95
10
1200/200
9
10
100
PSt150/7/120 VS12
114
8
1200/200
11
8
118
PSt150/7/140 VS12
133
7
1200/200
13
6
136
PSt150/7/160 VS12
152
6
1200/200
15
5
154
PSt150/10/7 VS15
9
240
2300/500
1.8
40
19
PSt150/10/20 VS15
19
120
2300/250
3.6
30
28
PSt150/10/40 VS15
38
60
2300/250
7.2
20
46
PSt150/10/60 VS15
57
35
2300/250
11
14
64
PSt150/10/80 VS15
76
25
2300/250
14
12
82
PSt150/10/100 VS15
95
20
2300/250
18
10
100
PSt150/10/120 VS15
114
15
2300/250
21
8
118
PSt150/10/140 VS15
133
14
2300/250
25
7
136
PSt150/10/160 VS15
152
13
2300/250
28
6
154
PSt150/10/180 VS15
171
11
2300/250
33
5
172
PSt150/10/200 VS15
190
10
2300/250
37
4
190
PSt150/14/7 VS20
9
350
4700/700
3.6
40
26
PSt150/14/20 VS20
19
250
4700/700
7
30
35
PSt150/14/40 VS20
38
120
4700/700
14
20
53
PSt150/14/60 VS20
57
70
4700/700
22
14
71
PSt150/14/80 VS20
76
50
4700/700
30
12
89
PSt150/14/100 VS20
95
40
4700/700
39
10
107
PSt150/14/120 VS20
114
35
4700/700
47
8
125
PSt150/14/140 VS20
133
30
4700/700
55
7
143
PSt150/14/160 VS20
152
25
4700/700
63
6
161
PSt150/14/180 VS20
171
22
4700/700
71
5
179
PSt150/14/200 VS20
190
20
4700/700
80
4
197
PSt150/20/20 VS25
19
500
7300/1000
14.5
28
37
PSt150/20/40 VS25
38
250
7300/1000
29
18
55
PSt150/20/60 VS25
57
160
7300/1000
43.5
13
73
PSt150/20/80 VS25
76
100
7300/1000
58
11
91
PSt150/20/100 VS25
95
80
7300/1000
72.5
9
109
PSt150/20/120 VS25
114
65
7300/1000
87
7
127
PSt150/20/140 VS25
133
55
7300/1000
101.5
6
145
PSt150/20/160 VS25
152
50
7300/1000
116
5
163
PSt150/20/180 VS25
171
45
7300/1000
130.5
4
181
PSt150/20/200 VS25
190
40
7300/1000
145
3
199
*Nominal Stroke corresponding drive voltage 0-150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Closed-loop linearity and repeatability are better.
005
Preloaded Piezo Actuators
Model
External-thread Preloaded Piezo Actuators
is easy to install and fix with external mechanical structure. It is mainly used for beam deflection, optical adjustment, lens adjustment, angular motion applications, etc. For got max stiffness, the piezo actuator uses lock nut.
Features • External-thread piezo actuators
• Max blocking force to 1200N
• Max displacement to 114μm
• Quick response
• Linear nano meter motion
• Customezed is available
External Thread
Locknut
The thread size on the outer casing is M14×1 and the
There is a standard locknut with a external thread preloaded
thread length is 20mm. The size can be customized.
piezo actuator to increase the stiffness.
Motion Regulation M14 has two motion adjustment modes, one is the position
Adapter
adjustment (coarse adjustment) through the external thread;
Plane, sphere, internal thread, external thread are optional
the other is the ultra-precise adjustment of the position of
and customiezd is available.
the internal piezo stacks by voltage signal control , when the voltage is applied, the piezo actuator can follow the voltage signal to generate an elongation, contraction and
Voltage VS Displacement
reciprocating motion.
FPSt150/7/20M14
Customized
21 Displacement [μm]
Preloaded Piezo Actuators
M14 external thread preloaded piezo actuator is a threaded piezoel actuator outside the mechanical package coating. It
18
The size, connection, displacement, voltage are custom
15
manufactured to your specifications.
12 9 6 3 0 0
1
2
3
4
5
6
7
8
9
10
Input voltage[V]
006
Piezo·Nano·Motion
M14×1
Ø5
Ø5
M4
5
1
4±0.5
SW 4mm
SW 4mm
1.
Ø13
2
SR
SW12
4±0.5
7±0.5
Ø5
3 4±0.5 Ø5
20
SW18
External thread
Plane
Internal thread
Applications Light beam deflection, Light Adjustment, Shock absorption and vibration reduction, Precision Machining
Technical data Stroke [μm]±10%*
Stiffness [N/μm]±20%*
Push/pull force [N]
FPSt150/7/7 M14
9
120
1200/200
0.7
40
19
FPSt150/7/20 M14
19
60
1200/200
1.8
30
28
FPSt150/7/40 M14
38
25
1200/200
3.6
20
46
FPSt150/7/60 M14
57
15
1200/200
5.4
15
64
FPSt150/7/80 M14
76
12
1200/200
7.2
12
82
FPSt150/7/100 M14
95
10
1200/200
9
10
100
FPSt150/7/120 M14
114
8
1200/200
11
8
118
Models
El. capacitance Resonant frequency [μF]±10% [kHz]±20%
Length L [mm]±0.3
*Nominal Stroke corresponding drive voltage 0-150V , Recommended voltage 0~120V for long-term operation to extend lifetime. Customized is available.
Recommand Controllers Application Frame deflection structure E53.A
E63.A
E63.C
tilt range fix holder coarse adjust by fine pitch thread
piezo cartridge reset spring tilt plate
bearing
007
1 channel
1 channel
1 channel
Open loop
Open loop
Open loop
Analog input
Analog input
Cpmputer software
Ave. current 60mA
Ave. current 20mA
Ave. current 2mA
Preloaded Piezo Actuators
L
M3x 4
Drawings
High Voltge Preloaded Piezo Actuators
withstand certain amount of tension, built-in large output piezo stacks, blocking force is up to 50000N, mainly used for dynamic applications of large loads.
Features • Driving voltage: 1000V
• Max stroke to 260μm
• Parameters could be customized
• Max load to 70000N
• Low electric capacitance
• Open/closed loop version is optional • OD: Ø18mm，Ø25mm，Ø35mm，Ø45mm
Applications Shock wave generation, stabilization, testing and acceleration sensors, active vibration damping, fuel injection, active engine mounting, and various positioning tasks require high loads and/or extreme acceleration.
High dynamic
Large blocking force Blocking force is proportional to CSA. Larger outer diameter,
El. capacitance is relatively small, the operating frequency is
greater blocking force. The blocking force of VS45 series
relatively high. More suitable for high dynamic use.
could reach 50,000 N and the load could reach 70,000 N. 60000 50000 Blocking force[N]
Preloaded Piezo Actuators
High-voltage piezo actuator is piezo stack with driving voltage of 1000V and preloaded mechanical actuator. It could
40000 30000 20000 10000 0
High voltage 0
10
20
30
40
Operating frequency
50
Outer diameter [mm]
Thermo-stable 50000[N]
High voltage piezo actuator
10000 20000 30000 40000 50000 60000 Low voltage piezo actuator
Low voltage
CoreMorrow could Blocking force[N]
provide "thermo-stable" for dynamic operation.
25000[N]
Heat could be efficiently transferred from ceramic
Open/closed loop version
to housing. Thermo-stable
High-voltage piezo actuators are available in open-loop and
housing material is highly efficient thermally conductive
closed-loop versions. Open-loop version has fast response,
metal.
but has the hysteresis and creep characteristics of piezo
Thermo-stable does not change the size of piezo actuator,
ceramics. Closed-loop version has closed-loop sensor that
and the power could be increased by 2~3 times.
allows the control voltage and displacement to a linear
E.g.: PSt1000/16/150VS25 heating stability and heat sink,
relationship that eliminates hysteresis and creep.
the frequency can be up to 500Hz at max displacement.
008
Piezo·Nano·Motion
Recommend piezo controller
Preloaded Piezo Actuators
High-voltage preloaded piezo actuator is driven by high-voltage controller, and CoreMorrow E00/E01 series high-voltage piezo controller could output voltage to 0~1000V.
E01.D1
E00.D3
Drawings
L
18 8
15
M5
Ø18
4±0.5
Ø8
5
M55
VS18
18
8±0.5
Ø10 L
8±0.5
8
Sphere
25 10
25
M6
10
SW8mm
8±0.5
Plane
25 SR3
6±0.5
M87
External thread
30
M88
VS35
4±0.5
3
22
SW 8mm
8
10 4±0.5
3
4±0.5
Ø25
L 5
M66
External thread
VS25
18 SR3
6±0.5
M55
SW 6mm
8
SW6mm
35 14 M8
Ø14 Ø35
Sphere
Plane
35 SW12mm
14±0.5
14
35 SR4
11±0.5
14
6
8±0.5
SW 12mm
L
Sphere
Plane
40
8±0.5
Ø20 Ø45
8
M88
VS45
External thread
M88
45 20
45
M8
20
SW17mm
14±0.5
11±0.5
45 SR5
20
6
8±0.5
SW 17mm
M88
External thread
Sphere
Plane
Notes: Cable length: 1.5m; Connector: LEMO; Optional processing: heat sink, Thermal stability, open/closed loop. Standard adapter is internal thread
009
Technical data
Preloaded Piezo Actuators
Resonant frequency [kHz]
Push/pull force [N]
300
40
4000/700
45
150
35
4000/700
42
85
100
30
4000/700
55/40
51
110
75
27
4000/700
PSt1000/10/60 VS18
80/60
69
170
50
23
4000/700
PSt1000/10/80 VS18
105/80
87
220
35
20
4000/700
PSt1000/10/100 VS18
130/100
105
270
30
15
4000/700
PSt1000/10/125 VS18
160/125
125
330
25
10
4000/700
PSt1000/10/150 VS18
220/150
145
390
17
5
4000/700
PSt1000/10/200 VS18
260/200
185
510
10
3
4000/700
PSt1000/16/7 VS25
12/7
29
60
800
40
12000/1500
PSt1000/16/20 VS25
27/20
35
150
400
35
12000/1500
PSt1000/16/40 VS25
55/40
53
360
200
30
12000/1500
PSt1000/16/60 VS25
80/60
71
540
120
27
12000/1500
PSt1000/16/80 VS25
105/80
89
720
90
23
12000/1500
PSt1000/16/100 VS25
130/100
107
900
75
20
12000/1500
PSt1000/16/125 VS25
160/125
127
1100
60
15
12000/1500
PSt1000/16/150 VS25
200/150
147
1400
50
7
12000/1500
PSt1000/16/200 VS25
260/200
187
1900
35
4
12000/1500
PSt1000/25/7 VS35
12/7
33
140
1800
40
25000/4000
PSt1000/25/20 VS35
27/20
42
350
900
35
25000/4000
PSt1000/25/40 VS35
55/40
60
800
450
30
25000/4000
PSt1000/25/60 VS35
80/60
78
1250
300
27
25000/4000
PSt1000/25/80 VS35
105/80
96
1700
200
23
25000/4000
PSt1000/25/100 VS35
130/100
114
2150
180
20
25000/4000
PSt1000/25/125 VS35
160/125
134
2500
150
15
25000/4000
PSt1000/25/150 VS35
200/150
154
3200
120
7
25000/4000
PSt1000/25/200 VS35
260/200
194
3700
90
5
25000/4000
PSt1000/35/7 VS45
12/7
33
300
4000
37
50000/6000
PSt1000/35/20 VS45
27/20
42
800
2000
33
50000/6000
PSt1000/35/40 VS45
55/40
60
1600
1000
28
50000/6000
PSt1000/35/60 VS45
80/60
78
2500
600
25
50000/6000
PSt1000/35/80 VS45
105/80
96
3300
450
21
50000/6000
PSt1000/35/100 VS45
130/100
114
4100
350
18
50000/6000
PSt1000/35/125 VS45
160/125
134
4900
300
14
50000/6000
PSt1000/35/150 VS45
200/150
154
5700
220
7
50000/6000
PSt1000/35/200 VS45
260/200
194
6500
150
4
50000/6000
Max/Stroke [μm]±15%*
Length L [mm]±0.3
PSt1000/10/7 VS18
12/7
24
20
PSt1000/10/20 VS18
27/20
33
PSt1000/10/25 VS18
35/25
PSt1000/10/40 VS18
Model
El.capacitance Stiffness [nF]±20% [N/μm]±20%
*Nominal Stroke corresponding drive voltage 0-1000V, max stroke drive voltage -200V~1000V. Recommended voltage 0~800V for long-term operation to extend lifetime. Closed-loop linearity and repeatability are better.
010
Harbin Core Tomorrow Science & Technology Co., Ltd. Tel：0451-86268790 Fax：0451-86267847 Postcode：150080 Email：info@coremorrow.com Web：www.coremorrow.com Address：6F, No.41 Hanguang Street Nangang Distric,Harbin