XP62X Nanopositioning Stages
Key Specifications/Special Features:
Type:XP-620.1SL, XP-621.1SL, XP-623.1SL XP-620.1OL, XP-621.1OL, XP-623.1OL
Active axes: X
Travel: 12~48um
Closed-loop travel: 17~68um
Open-loop resolution: 0.15~0.5nm
Closed-loop resolution 0.5~2nm
Closed-loop linearity: 0.1%F.S.
Closed-loop repeatability: 0.05%F.S.
Stiffness in motion direction: 40~10N/um
Unloaded response frequency: 4.2~2.5kHz
Response frequency @120g: 2.8~2.0kHz
Push/pull force capacity in motion direction: 480/160N
Load capacity: 100N
El.capacitance: 1.8~7.2uF
Weight: 0.15~0.45kg
Cable length: 1.5m
Cable way: side lead
