Piezo Objective Scanner_CoreMorrow

V21 Version

Piezo Objective Scanners

Piezo Objective Scanner Series

Based on piezoelectric ceramics as driving sources, and piezo objective scanner is mainly used for driving objective lens to make nano-stepping motion in microscope or laser processing system.

Piezo·Nano·Motion

Piezo Objective Scanner hinge parallel guiding mechanism design, and has super high focusing stability. The piezo objective scanner can be integrated into the microscopic detection/measurement or the observation device to drive the lens, which can improve positioning precision of the system, and can be used with a variety of high-resolution microscopes.

More Than three Versions High Dynamics -P72

Long Travel-P73

Large Load Capacity-P76

The low-profile objective positioner adopts the parallelogram design principle, high rigidity, and can move at a high speed with a load of 200g.

This scanner features large travel and high precision, and its travel can reach 500μm.

This large-load piezo objective scanner features large load capacity, fast response, and excellent linearity of Z-axis motion. It can be loaded with 500g load at high frequency.

Adjustable response time

Can match a variety of brands, sizes of objectives

With different controls and loads, the response time can be Thread sizes

adjusted.

Travel[μm]

(Specified location)

A variety of thread sizes are available, and can be

Time[msec]

configured with different brands of objective lenses, as well as threaded adapters for transfer.

Driving and Control

Closed-Loop Curve

External sensor device

Travel[μm]

Control device

Control input voltage[V]

Lens focusing Piezo controller

001

Piezo O b j ective Scanner

Piezo objective scanner is specially designed for the focusing microscopy of the objective lens. It adopts a frictionless flexible

Applications

Piezo O b j ective Scanner Microscope Stepping imaging

Laser Processing-Wafer Cutting

White Light Interferometer

Inverted Microscope Imaging

002

Piezo·Nano·Motion

Applications • Image processing

• Confocal microscope

• Semiconductor inspection

• Laser processing

• Interference shape measurement

Product Series

Features

Models

Active axis

Travel [μm]

Resolution [nm]

Resonant frequency Load capacity [kHz] [kg]

High dynamics

P72.Z100

Z

100

2.5

0.35

0.2

004

Long travel

P73.Z500

Z

500

7

0.17

0.4

006

Long travel

P73.Z200

Z

200

5

0.28

0.2

006

Large load

P76.Z100

Z

100

2.5

0.8

0.5

008

Factory Test

Microfocus Experiment

Fluorescence Microscope

Cold Atomic Microscope Imaging

003

Page

Piezo O b j ective Scanner

• Adjustment focus

P72 Series Piezo Objective Scanner Piezo O b j ective Scanner

P72 series piezoelectric objective scanner is a Z-axis motion piezoelectric objective positioner specially designed for objective lens focusing microscopy. It adopts a frictionless flexible hinge parallel guiding mechanism design, with super high focusing stability. The objective positioner is loaded with a microscopic detection/measurement or observation device, and can take lens to generate Z-direction focus to improve accuracy and can be used with a variety of high resolution microscopes.

Characteristics • Travel to 100μm • Load capacity to 0.2kg • Millisecond response time • Closed loop for higher repeatability • Open/closed loop

Typical Applications

Thread Adapter for Easy Integration

• 3D imaging

• Interference/metering

P72 series objective positioner is connected to the objective lens

• Surface structure analysis

• Confocal microscope

through an adapter to quickly make the objective lens in the desired

• Biotechnology

• Semiconductor test

position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36”, M25×0.75, W0.8×1/36”, etc., which can also

Small Size, High Dynamics, Good Linearity

be customized for easy integration with the microscope.

P72 Piezo Objective Scanner is very compact, enabling displacements

Closed-Loop Step Time

up to 100μm. Its body uses a flexible hinge mechanism, which is frictionless and has a very high resolution. Because of its no-load

100

resonant frequency up to 350Hz, and it can carry 200g load for high-

10ms

speed precision motion, it has been widely used in optical scanning, 80 Displacement [μm]

confocal microscopy and other fields. A closed-loop version is available for ultra-high positioning accuracy.

Resonant frequency [Hz]

Frequency and Load Curve

60

40

20

0

0

5

10

15

20

25

30

35

40

45

50

Time [ms]

Recommended Controllers Load [g]

E00/E01

Reciprocal of percentage

Positioning Accuracy

E52

E53

Linearity Repetability 1 channel

1 channel

1 channel

Digital, analog, knob control

Analog control

Digital, analog control

Open/closed loop

Open/closed loop

Open/closed loop

Ave.current 291mA/58mA

Ave.current 300mA

Ave.current 60mA

Note: please see "Piezo Controller Series" for detailed information.

Number of test groups

004

Piezo·Nano·Motion

Open/Closed-loop Curves

Application Cases

Displacement [μm]

microscopy, cold atom microscopy and so on.

Closed loop Open loop

Control input voltage [V]

Displacement Measurement The displacement is measured using a capacitance micrometer.

Technical Data Models

Load Step Time With a load of 200g, the step time of P72.Z100S is about 30ms.

Suffix S-Closed loop Suffix K-Open loop

P72.Z100S P72.Z100K

Units

Active axis

Z

Travel range（0~120V）

80

μm±20%

Travel range（0~150V）

100

μm±20%

Sensor type

SGS/-

Resolution

5/2.5

nm

Linearity

0.1/-

%F.S.

Repeatability

0.05/-

%F.S.

Push/pull force

110/15

N

1.4

N/μm±20%

Stiffness in motion direction Unloaded resonant frequency

350

Hz±20%

Unloaded step time Closed-loop 10% travel unloaded operating 100% travel frequency Load capacity

10/3

ms±20%

El.capacitance

50 15

Hz±20%

0.2

kg

3.6

μF±20%

Material

Steel

Mass

150

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

Dimensions P72.Z100

(Model)

Cable length :1.5m

005

Piezo O b j ective Scanner

P72 piezoelectric objective scanner can be used for automatic cell

P73 Series Piezo Objective Scanner 200μm and 500μm in Z direction. It also adopts flexible hinge design mechanism, no friction, good linearity and high positioning accuracy.

The seperate thread adapter design can be adapted to a wide range of microscopes and is widely used in long-travel scanning of microscopic imaging, two-photon microscopy and other fields.

Characteristics • Optional travels of 200μm or 500μm • Load capacity to 0.4kg • Millisecond response time • Closed loop for higher repeatability

Long Travel, Fast Response, High Resolution

• Excellent focus stability

Closed-Loop Step Time

P73 Piezo Objective Scanner is a large-displacement, high-speed, piezoceramic-driven, focused microscopy device that is small in size but achievable with displacements up to 500 μm.

P73 adopts flexible hinge guiding mechanism, no mechanical friction, nano-scale resolution, ultra-high positioning accuracy and ultra-fast response speed.

L a rg e s t i f f n e s s a n d h i g h re s o n a n c e f re q u e n c y a re t h e characteristics of the series of piezoelectric objective ppositioner.

The P73.Z500S can realize the step time of 20ms to reach the maximum travel, and the step time loading 150g load is less than 30ms and the repeatability is 0.05% F.S. P73 Piezo Objective Scanners can be used to match a variety of standard lenses such as Zeiss, Nikon, Olympus, and Leica.

The step time loading 150g load is about 30ms to reach the maximum travel.

Thread Adapter for Easy Integration

Surface Analysis

P73 series objective positioner is connected to the objective lens through an adapter to quickly make the objective lens in the desired position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36”, M25×0.75, W0.8×1/36”, etc., which can also be customized for easy integration with the microscope.

Typical Applications • 3D imaging

• Interference/metering

• Semiconductor test

• Biotechnology • Surface structure analysis • Confocal microscope

Frequency and Load Curve

Recommended Controllers

180 Resonant frequency [Hz]

Piezo O b j ective Scanner

P73.Z500 series piezoelectric objective scanner features a large of

E00/E01

160

E53

XE-650

P73.Z500

140 120 100 80 60 40 20 0

0

50

100

150

200

1 channel

1 channel

1 channel

Digital, analog, knob control

Digital, analog control

Digital, knob, I/O control

Open/closed loop

Open/closed loop

Open/closed loop

Ave.current 291mA/58mA

Ave.current 60mA

Ave.current 50mA

Note: please see "Piezo Controller Series" for detailed information.

Load [g]

006

Piezo·Nano·Motion

Application Cases

Linearity

Number of test groups

Open/Closed-loop Curves（with 200g load）

Fluorescence Imaging

Dimensions

Displacement [μm]

P73.Z500

P73.Z500 Closed loop Open loop

Control input voltage [V]

Technical Data P73.Z500S P73.Z500K

P73.Z200S P73.Z200K

Z

Z

Travel range（0~120V）

400

160

μm±20%

Travel range（0~150V）

500

200

μm±20%

Sensor type

SGS/-

SGS/-

Resolution

18/7

11/5

nm

Linearity

0.1/-

0.1/-

%F.S.

Repeatability

0.05/-

0.05/-

%F.S.

Push/pull force

80/10

80/10

N

Stiffness in motion direction

0.2

0.25

N/μm±20%

Unloaded resonant frequency

170

280

Hz±20%

20/10

20/10

ms±20%

10% travel

40

40

100% travel

10

10

Load capacity

0.4

0.2

kg

El.capacitance

14

7.2

μF±20%

Steel, Al

Steel, Al

450

360

Models

Suffix S-Closed loop Suffix K-Open loop

Active axis

Unloaded step time Closed-loop unloaded operating frequency

Material Mass

Units (Model)

Cable length :1.5m

P73.Z200

Hz±20%

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

007

Cable length :1.5m

Piezo O b j ective Scanner

Reciprocal of percentage

Linearity

P76 Series Piezo Objective Scanner load capacity up to 500g, Z-axis linear motion range up to 100μm, adopting flexible hinge design mechanism, no friction, good linearity, high closed-loop positioning accuracy. The seperate thread adapter design accommodates a wide range of microscopes.

Characteristics • Travel to 100μm • Load capacity to 500g • Millisecond response time • Closed loop for higher repeatability • Excellent focusing stability

Large Load Capacity, High Frequency and Resolution

Displacement Measurement

P76 Nano-Scan Focusing System is designed for high-load, large-aperture objectives to achieve the fastest step times in modern high-resolution microscopy applications.

Its extremely rugged design provides very fast settling times and scanning frequency, even when carrying a few hundred grams of objective. The rotationally symmetric alignment of multiple piezoelectric actuators and the optimized design of the flexure and lever elements give it a high stiffness while ensuring excellent guiding accuracy and dynamics.

P76 Piezo Objective Scanner has a maximum clear aperture of 22 mm and a maximum load of 500 g. It is compatible with large field of view objectives commonly used in multiphoton microscopy and confocal microscopy applications. P76 Piezo Objective Positioner can be used to match a variety of standard lenses such as Zeiss, Nikon, Olympus, and Leica. It can also be used in conjunction with a manual adjustment stage via an adapter.

The displacement is measured using a capacitance micrometer.

Frequency and Load Curve Open/Closed-loop Curve（with 500g load）

Displacement [μm]

Resonant frequency [g]

Piezo O b j ective Scanner

P76 series piezoelectric objective scanner features a large

Closed loop Open loop

Load [g]

Typical Applications • 3D imaging

• Interference/metering

• Auto focusing system

• Confocal microscope

• Wafer cutting

• Semiconductor test

Control input voltage [V]

Recommended Controllers E00/E01

E52

E53

Thread Adapter for Easy Integration P76 series objective positioner is connected to the objective lens through an adapter to quickly make the objective lens in the desired position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36”, M25×0.75, W0.8×1/36”, etc., which can also be customized for easy integration with the microscope.

1 channel

1 channel

1 channel

Digital, analog, knob control

Analog control

Digital, analog control

Open/closed loop

Open/closed loop

Open/closed loop

Ave.current 291mA/58mA

Ave.current 300mA

Ave.current 60mA

Note: please see "Piezo Controller Series" for detailed information.

008

Piezo·Nano·Motion

Positioning Accuracy

Piezo O b j ective Scanner

Reciprocal of percentage

Linearity Repetability

Number of test groups

Material Analysis

Load Step Time Technical Data

With a load of 300g, the step time of P76.Z100S objective scanner to reach the maximum travel is about <15ms。

Models

Suffix S-Closed loop Suffix K-Open loop

Active axis

Application Cases

P76.Z100S P76.Z100K

Units

Z

Travel range（0~120V）

80

μm±20%

Travel range（0~150V）

100

μm±20%

Sensor type

SGS/-

Resolution

5/2.5

nm

Linearity

0.05/-

%F.S.

Repeatability

0.02/-

%F.S.

Push/pull force

70/10

N

Stiffness in motion direction

0.8

N/μm±20%

Unloaded resonant frequency

800

Hz±20%

Unloaded step time

5/2

ms±20%

Closed-loop unloaded operating frequency

10% travel

400

100% travel

50

Load capacity El.capacitance Material Mass

Hz±20%

0.5

kg

7.2

μF±20%

Steel, Al 520

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

Wafer Cutting

Dimensions P76.Z100

(Model)

Cable length :1.5m

009

Assembly Method of Piezoelectric Objective Scanner Piezo O b j ective Scanner

Microscope connection

Microscope connection

Adapter

Piezo objective scanner

Piezo objective scanner Locking screw Tool Tool

Objective lens adapter

Objective lens 1,Screw the adapter into the microscope connection and lock it.

2,Screw the objective lens into the objective scanner.

3,Attach the mounted objective scanner and adapter, and lock the locking screw with a tool.

1. Screw the objective lens adapter into the objective scanner and lock it with the tool.

2. Screw the objective lens into the objective lens adapter and lock it.

3. Screw the mounted objective scanner into the microscope connection and lock it.

Objective lens

Locking ring Adapter Adapter Piezo objective scanner

Piezo objective scanner Locking screw Tool

Tool

Locking screw Objective lens adapter

Objective lens adapter

Objective lens

1. Screw the locking ring into the adapter and screw it into the microscope connection end and lock it through the locking ring.

2. Screw the objective lens into the objective lensadapter and insert it into the objective lens scanner. Lock the locking screw with the tool.

3. Connect the mounted objective scanner with the adapter, and lock the locking screw with the tool.

010

1. Screw the adapter into the microscope connection and lock it.

2. Screw the objective lens adapter into the objective lens scanner first, then screw the objective lens into the objective lens adapter.

3. Connect the mounted objective scanner with the adapter, and lock the locking screw with the tool.

Objective lens

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