V21 Version
Piezo Objective Scanners
Piezo Objective Scanner Series
Based on piezoelectric ceramics as driving sources, and piezo objective scanner is mainly used for driving objective lens to make nano-stepping motion in microscope or laser processing system.
Piezo·Nano·Motion
Piezo Objective Scanner hinge parallel guiding mechanism design, and has super high focusing stability. The piezo objective scanner can be integrated into the microscopic detection/measurement or the observation device to drive the lens, which can improve positioning precision of the system, and can be used with a variety of high-resolution microscopes.
More Than three Versions High Dynamics -P72
Long Travel-P73
Large Load Capacity-P76
The low-profile objective positioner adopts the parallelogram design principle, high rigidity, and can move at a high speed with a load of 200g.
This scanner features large travel and high precision, and its travel can reach 500μm.
This large-load piezo objective scanner features large load capacity, fast response, and excellent linearity of Z-axis motion. It can be loaded with 500g load at high frequency.
Adjustable response time
Can match a variety of brands, sizes of objectives
With different controls and loads, the response time can be Thread sizes
adjusted.
Travel[μm]
(Specified location)
A variety of thread sizes are available, and can be
Time[msec]
configured with different brands of objective lenses, as well as threaded adapters for transfer.
Driving and Control
Closed-Loop Curve
External sensor device
Travel[μm]
Control device
Control input voltage[V]
Lens focusing Piezo controller
001
Piezo O b j ective Scanner
Piezo objective scanner is specially designed for the focusing microscopy of the objective lens. It adopts a frictionless flexible
Applications
Piezo O b j ective Scanner Microscope Stepping imaging
Laser Processing-Wafer Cutting
White Light Interferometer
Inverted Microscope Imaging
002
Piezo·Nano·Motion
Applications • Image processing
• Confocal microscope
• Semiconductor inspection
• Laser processing
• Interference shape measurement
Product Series
Features
Models
Active axis
Travel [μm]
Resolution [nm]
Resonant frequency Load capacity [kHz] [kg]
High dynamics
P72.Z100
Z
100
2.5
0.35
0.2
004
Long travel
P73.Z500
Z
500
7
0.17
0.4
006
Long travel
P73.Z200
Z
200
5
0.28
0.2
006
Large load
P76.Z100
Z
100
2.5
0.8
0.5
008
Factory Test
Microfocus Experiment
Fluorescence Microscope
Cold Atomic Microscope Imaging
003
Page
Piezo O b j ective Scanner
• Adjustment focus
P72 Series Piezo Objective Scanner Piezo O b j ective Scanner
P72 series piezoelectric objective scanner is a Z-axis motion piezoelectric objective positioner specially designed for objective lens focusing microscopy. It adopts a frictionless flexible hinge parallel guiding mechanism design, with super high focusing stability. The objective positioner is loaded with a microscopic detection/measurement or observation device, and can take lens to generate Z-direction focus to improve accuracy and can be used with a variety of high resolution microscopes.
Characteristics • Travel to 100μm • Load capacity to 0.2kg • Millisecond response time • Closed loop for higher repeatability • Open/closed loop
Typical Applications
Thread Adapter for Easy Integration
• 3D imaging
• Interference/metering
P72 series objective positioner is connected to the objective lens
• Surface structure analysis
• Confocal microscope
through an adapter to quickly make the objective lens in the desired
• Biotechnology
• Semiconductor test
position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36”, M25×0.75, W0.8×1/36”, etc., which can also
Small Size, High Dynamics, Good Linearity
be customized for easy integration with the microscope.
P72 Piezo Objective Scanner is very compact, enabling displacements
Closed-Loop Step Time
up to 100μm. Its body uses a flexible hinge mechanism, which is frictionless and has a very high resolution. Because of its no-load
100
resonant frequency up to 350Hz, and it can carry 200g load for high-
10ms
speed precision motion, it has been widely used in optical scanning, 80 Displacement [μm]
confocal microscopy and other fields. A closed-loop version is available for ultra-high positioning accuracy.
Resonant frequency [Hz]
Frequency and Load Curve
60
40
20
0
0
5
10
15
20
25
30
35
40
45
50
Time [ms]
Recommended Controllers Load [g]
E00/E01
Reciprocal of percentage
Positioning Accuracy
E52
E53
Linearity Repetability 1 channel
1 channel
1 channel
Digital, analog, knob control
Analog control
Digital, analog control
Open/closed loop
Open/closed loop
Open/closed loop
Ave.current 291mA/58mA
Ave.current 300mA
Ave.current 60mA
Note: please see "Piezo Controller Series" for detailed information.
Number of test groups
004
Piezo·Nano·Motion
Open/Closed-loop Curves
Application Cases
Displacement [μm]
microscopy, cold atom microscopy and so on.
Closed loop Open loop
Control input voltage [V]
Displacement Measurement The displacement is measured using a capacitance micrometer.
Technical Data Models
Load Step Time With a load of 200g, the step time of P72.Z100S is about 30ms.
Suffix S-Closed loop Suffix K-Open loop
P72.Z100S P72.Z100K
Units
Active axis
Z
Travel range（0~120V）
80
μm±20%
Travel range（0~150V）
100
μm±20%
Sensor type
SGS/-
Resolution
5/2.5
nm
Linearity
0.1/-
%F.S.
Repeatability
0.05/-
%F.S.
Push/pull force
110/15
N
1.4
N/μm±20%
Stiffness in motion direction Unloaded resonant frequency
350
Hz±20%
Unloaded step time Closed-loop 10% travel unloaded operating 100% travel frequency Load capacity
10/3
ms±20%
El.capacitance
50 15
Hz±20%
0.2
kg
3.6
μF±20%
Material
Steel
Mass
150
g±5%
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
Dimensions P72.Z100
(Model)
Cable length :1.5m
005
Piezo O b j ective Scanner
P72 piezoelectric objective scanner can be used for automatic cell
P73 Series Piezo Objective Scanner 200μm and 500μm in Z direction. It also adopts flexible hinge design mechanism, no friction, good linearity and high positioning accuracy. The seperate thread adapter design can be adapted to a wide range of microscopes and is widely used in long-travel scanning of microscopic imaging, two-photon microscopy and other fields.
Characteristics • Optional travels of 200μm or 500μm • Load capacity to 0.4kg • Millisecond response time • Closed loop for higher repeatability
Long Travel, Fast Response, High Resolution
• Excellent focus stability
Closed-Loop Step Time
P73 Piezo Objective Scanner is a large-displacement, high-speed, piezoceramic-driven, focused microscopy device that is small in size but achievable with displacements up to 500 μm. P73 adopts flexible hinge guiding mechanism, no mechanical friction, nano-scale resolution, ultra-high positioning accuracy and ultra-fast response speed. L a rg e s t i f f n e s s a n d h i g h re s o n a n c e f re q u e n c y a re t h e characteristics of the series of piezoelectric objective ppositioner. The P73.Z500S can realize the step time of 20ms to reach the maximum travel, and the step time loading 150g load is less than 30ms and the repeatability is 0.05% F.S. P73 Piezo Objective Scanners can be used to match a variety of standard lenses such as Zeiss, Nikon, Olympus, and Leica.
The step time loading 150g load is about 30ms to reach the maximum travel.
Thread Adapter for Easy Integration
Surface Analysis
P73 series objective positioner is connected to the objective lens through an adapter to quickly make the objective lens in the desired position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36”, M25×0.75, W0.8×1/36”, etc., which can also be customized for easy integration with the microscope.
Typical Applications • 3D imaging
• Interference/metering
• Semiconductor test
• Biotechnology • Surface structure analysis • Confocal microscope
Frequency and Load Curve
Recommended Controllers
180 Resonant frequency [Hz]
Piezo O b j ective Scanner
P73.Z500 series piezoelectric objective scanner features a large of
E00/E01
160
E53
XE-650
P73.Z500
140 120 100 80 60 40 20 0
0
50
100
150
200
1 channel
1 channel
1 channel
Digital, analog, knob control
Digital, analog control
Digital, knob, I/O control
Open/closed loop
Open/closed loop
Open/closed loop
Ave.current 291mA/58mA
Ave.current 60mA
Ave.current 50mA
Note: please see "Piezo Controller Series" for detailed information.
Load [g]
006
Piezo·Nano·Motion
Application Cases
Linearity
Number of test groups
Open/Closed-loop Curves（with 200g load）
Fluorescence Imaging
Dimensions
Displacement [μm]
P73.Z500
P73.Z500 Closed loop Open loop
Control input voltage [V]
Technical Data P73.Z500S P73.Z500K
P73.Z200S P73.Z200K
Z
Z
Travel range（0~120V）
400
160
μm±20%
Travel range（0~150V）
500
200
μm±20%
Sensor type
SGS/-
SGS/-
Resolution
18/7
11/5
nm
Linearity
0.1/-
0.1/-
%F.S.
Repeatability
0.05/-
0.05/-
%F.S.
Push/pull force
80/10
80/10
N
Stiffness in motion direction
0.2
0.25
N/μm±20%
Unloaded resonant frequency
170
280
Hz±20%
20/10
20/10
ms±20%
10% travel
40
40
100% travel
10
10
Load capacity
0.4
0.2
kg
El.capacitance
14
7.2
μF±20%
Steel, Al
Steel, Al
450
360
Models
Suffix S-Closed loop Suffix K-Open loop
Active axis
Unloaded step time Closed-loop unloaded operating frequency
Material Mass
Units (Model)
Cable length :1.5m
P73.Z200
Hz±20%
g±5%
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
007
Cable length :1.5m
Piezo O b j ective Scanner
Reciprocal of percentage
Linearity
P76 Series Piezo Objective Scanner load capacity up to 500g, Z-axis linear motion range up to 100μm, adopting flexible hinge design mechanism, no friction, good linearity, high closed-loop positioning accuracy. The seperate thread adapter design accommodates a wide range of microscopes.
Characteristics • Travel to 100μm • Load capacity to 500g • Millisecond response time • Closed loop for higher repeatability • Excellent focusing stability
Large Load Capacity, High Frequency and Resolution
Displacement Measurement
P76 Nano-Scan Focusing System is designed for high-load, large-aperture objectives to achieve the fastest step times in modern high-resolution microscopy applications. Its extremely rugged design provides very fast settling times and scanning frequency, even when carrying a few hundred grams of objective. The rotationally symmetric alignment of multiple piezoelectric actuators and the optimized design of the flexure and lever elements give it a high stiffness while ensuring excellent guiding accuracy and dynamics. P76 Piezo Objective Scanner has a maximum clear aperture of 22 mm and a maximum load of 500 g. It is compatible with large field of view objectives commonly used in multiphoton microscopy and confocal microscopy applications. P76 Piezo Objective Positioner can be used to match a variety of standard lenses such as Zeiss, Nikon, Olympus, and Leica. It can also be used in conjunction with a manual adjustment stage via an adapter.
The displacement is measured using a capacitance micrometer.
Frequency and Load Curve Open/Closed-loop Curve（with 500g load）
Displacement [μm]
Resonant frequency [g]
Piezo O b j ective Scanner
P76 series piezoelectric objective scanner features a large
Closed loop Open loop
Load [g]
Typical Applications • 3D imaging
• Interference/metering
• Auto focusing system
• Confocal microscope
• Wafer cutting
• Semiconductor test
Control input voltage [V]
Recommended Controllers E00/E01
E52
E53
Thread Adapter for Easy Integration P76 series objective positioner is connected to the objective lens through an adapter to quickly make the objective lens in the desired position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36”, M25×0.75, W0.8×1/36”, etc., which can also be customized for easy integration with the microscope.
1 channel
1 channel
1 channel
Digital, analog, knob control
Analog control
Digital, analog control
Open/closed loop
Open/closed loop
Open/closed loop
Ave.current 291mA/58mA
Ave.current 300mA
Ave.current 60mA
Note: please see "Piezo Controller Series" for detailed information.
008
Piezo·Nano·Motion
Positioning Accuracy
Piezo O b j ective Scanner
Reciprocal of percentage
Linearity Repetability
Number of test groups
Material Analysis
Load Step Time Technical Data
With a load of 300g, the step time of P76.Z100S objective scanner to reach the maximum travel is about <15ms。
Models
Suffix S-Closed loop Suffix K-Open loop
Active axis
Application Cases
P76.Z100S P76.Z100K
Units
Z
Travel range（0~120V）
80
μm±20%
Travel range（0~150V）
100
μm±20%
Sensor type
SGS/-
Resolution
5/2.5
nm
Linearity
0.05/-
%F.S.
Repeatability
0.02/-
%F.S.
Push/pull force
70/10
N
Stiffness in motion direction
0.8
N/μm±20%
Unloaded resonant frequency
800
Hz±20%
Unloaded step time
5/2
ms±20%
Closed-loop unloaded operating frequency
10% travel
400
100% travel
50
Load capacity El.capacitance Material Mass
Hz±20%
0.5
kg
7.2
μF±20%
Steel, Al 520
g±5%
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
Wafer Cutting
Dimensions P76.Z100
(Model)
Cable length :1.5m
009
Assembly Method of Piezoelectric Objective Scanner Piezo O b j ective Scanner
Microscope connection
Microscope connection
Adapter
Piezo objective scanner
Piezo objective scanner Locking screw Tool Tool
Objective lens adapter
Objective lens 1,Screw the adapter into the microscope connection and lock it. 2,Screw the objective lens into the objective scanner. 3,Attach the mounted objective scanner and adapter, and lock the locking screw with a tool.
1. Screw the objective lens adapter into the objective scanner and lock it with the tool. 2. Screw the objective lens into the objective lens adapter and lock it. 3. Screw the mounted objective scanner into the microscope connection and lock it. Objective lens
Locking ring Adapter Adapter Piezo objective scanner
Piezo objective scanner Locking screw Tool
Tool
Locking screw Objective lens adapter
Objective lens adapter
Objective lens
1. Screw the locking ring into the adapter and screw it into the microscope connection end and lock it through the locking ring. 2. Screw the objective lens into the objective lensadapter and insert it into the objective lens scanner. Lock the locking screw with the tool. 3. Connect the mounted objective scanner with the adapter, and lock the locking screw with the tool.
010
1. Screw the adapter into the microscope connection and lock it. 2. Screw the objective lens adapter into the objective lens scanner first, then screw the objective lens into the objective lens adapter. 3. Connect the mounted objective scanner with the adapter, and lock the locking screw with the tool.
Objective lens
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