Piezo Controllers_CoreMorrow

V21 Version

Piezo Controllers

Piezo Controllers Series

Piezo controllers is controlled by analog input o r d i g i t a l i n p u t , w i t h p o we r amplification function, adjustable output voltage and output frequency, and used to drive piezoelectric products.

Piezo·Nano·Motion

Piezo Controllers

Characteristics Single Channel

Multi Channels

E00/E01、E72、E81、E52、E53、XE-650、

E00/E01、E72、E73、E70、C47、E51、

E63.A、E63.C、E61、E62

E81-D、E24、E40、E48、E112

Connection

Driving Principle

压电执行产品 Piezo Product

压电控制 Piezo Controller

压电元件 Piezo Element

压电驱动 Signal Output

位移传感器 Position Sensor Note: No sensor for open 注：开环压电执行产品无传感器 loop piezo products.

Position Command Signal

控制台 Console

位置指令信号

传感信号反馈 Sensor Feedback Signal

By Connector

By Wires

PID Response speed adjustment

Sensor output ternimal Sensor monitor

Control signal Control signal Sensor signal

Appearance According to your channels, power, size and other requirements, one can choose different series piezo controllers.

Modular type

Integrated type

Industrial type

001

Board type

Piez o Controllers

Piezoelectric ceramic controllers are used to drive and control piezoelectric ceramics and nano-positioning platforms.

According to the structure, they are mainly divided into modular, integrated, industrial, and board-type controller products.

Analog, digital, keyboard, I/O and other control methods. Available in open loop, closed loop, single-channel or multi-channel models. It can drive all kinds of piezoelectric products.

Applications

P iez o Controllers Driving Piezo Stage

Driving Piezo Stack Actuator

Driving Piezo Scanner

Driving Piezo Steering Mirror

002

Piezo¡Nano¡Motion

Product Series

Models

Characteristics

Page

E00/E01

Modular

Multi-function modular, Analog control and computer communication, Button control, Channels to >100, Ave. Current from 2.7mA to 625mA

004

3 channels, Open/closed loop, 120V output, Ave. Current to 70mA/channel

007

1 channel Open/closed loop, 0~120V/150V output, Ave. Current 300mA

009

1 channel Open/closed loop, Analog&digital control, 0~120V output, Ave. Current 60mA

011

1 channel Open loop Small size Peak current to 170mA

013

USB power supply, Small size, 0~150V output, Ave. Current 2.5mA, Software control

014

E70

E52

E53

Integrated

E63.A

E63.C

003

P iez o Cont rollers

Series

E00/E01 Series Piezo Controller Piezo Controllers

Piezo controllers are used to drive and control piezoelectric ceramics and nano-positioning platforms. According to the structure, they are mainly divided into modular, integrated, industrial, and board-type controller products. Analog, digital, keyboard, I/O and other control methods. Available in open loop, closed loop, single or multiple channels. It can drive all kinds of piezoelectric products.

Characteristics Modular Combination

Optional Output Voltage

Multi Channels Output

• Power amplifier module

0-120V，0-150V，0-300V

Modular combination,

• Position Sensor Module

0-600V，0-900V，0-1800V

Up to Hundreds of channels

• Display and Interface Module

±120V、±150V，±300V

• Chassis and Power Supply Module

±450V，±900V··

• Custom combination

Optional Modules

Driving Principle

Piezo Amplifier Module

Control

Display/interface

1 channel

PZT Position Sensor Module

Power supply module

3 channels

Botton

Power amplifier

Display and Interface Module

Sensor control module

1 channel

3 channels

Multi-Functions, For All Kinds of Piezo Products

Chassis and Power Supply Module 500mm

280mm

175mm

175mm

Depth：375mm

004

Piezo¡Nano¡Motion

Introduction of each module

Piezo Controllers

Power amplifier module The main function is to amplify the signal

Power indicator

through a voltage and power amplifier circuit

Overcurrent indicator

inside the Power Amplifier Module by using

DC output voltage adjustment knob Analog signal input

a weak external analog input signal or an

High voltage output

analog signal given by the computer through DA or other control signals.

E09 PZT Position Sensor Module E09 series PZT sensing control module provides high precision, high stability and high reliability excitation signals for sensors in nanopositioning mechanisms such as PZT or micro-motion stages, and detects and processes feedback signals from PZT or micro-motion stages. The servo control is done by the internal algorithm circuit. The E09 PZT sensing control module is not a stand-alone device and needs to be integrated into the E00/E01 chassis.

Range adjustment of sensor output signal Zeroing of sensor output signal

Open/closed loop switch Sensor output Sensor input

E18 Display and Interface Module E18 series is a liquid cr ystal display and computer communication module, which has the functions of measuring and displaying the output voltage of Power Amplifier Module and the current displacement value of PZT sensor control module, communication interface receiving and processing control commands from computer, and keyboard, LCD and software for human-computer interaction, and digital closed loop control and other functions. The E18 display and interface module are not a stand-alone device and need to be integrated into the E00/E01 chassis.

D-SUB 9 pins socket

LCD display

USB-B connection socket MDR14 connection socket

Film button

Module Upgrade Available

Sensor Module

B Series

Display/communication module

D Series

A Series

Display/communication module

C Series

005

Sensor Module

D Series

Combination Model Examples

Piezo Controllers

Models E01.A1

E01.B1

E01.C1

E01.D1

E01.D3

E00.D3

1

1

1

1

3

3

Amplifier Module Channels Analog input range

0~10V

0~10V

0~10V

0~10V

0~10V

0~10V

Output voltage

0~120V

0~120V

0~120V

0~120V

0~120V

0~120V

Ripple

5mV

5mV

5mV

5mV

5mV

5mV

Voltage stability

<0.1%F.S./8 hours

<0.1%F.S./8 hours

<0.1%F.S./8 hours

<0.1%F.S./8 hours

<0.1%F.S./8 hours

<0.1%F.S./8 hours

Input impedance

100KΩ±20%

100KΩ±20%

100KΩ±20%

100KΩ±20%

100KΩ±20%

100KΩ±20%

Unloaded full amplitude bandwidth

10kHz

10kHz

10kHz

10kHz

10kHz

10kHz

Ave. Current mA

291mA

291mA

291mA

291mA

58mA

291mA

Peak current mA

1A

1A

1A

1A

1A

1A

Bandwidth, small signal(1/10)

>20kHz

>20kHz

>20kHz

>20kHz

>20kHz

>20kHz

Voltage gain

10 turns

10 turns

10 turns

10 turns

10 turns

10 turns

Knob adjustment

10 turns

10 turns

10 turns

10 turns

10 turns

10 turns

-

SGS

-

SGS

SGS

SGS

Sensor Module Sensor Channels

-

1

-

1

3

1

Sensor port

-

ERA.0S.304.CLL

-

ERA.0S.304.CLL

ERA.0S.304.CLL

ERA.0S.304.CLL

Sensor output port

-

BNC

-

BNC

ERA.05.303.CLL

BNC

Sensor output voltage

-

0~10V

-

0~10V

0~10V

0~10V

Operating temperature

-

0~50℃

-

0~50℃

0~50℃

0~50℃

Display and Interface Module Channels

-

-

1

1

3

1

D/A converter

-

-

16Bit±10V

16Bit±10V

24Bit±10V

16Bit±10V

A/D converter

-

-

16Bit±10V

16Bit±10V

16Bit±10V

16Bit±10V

Output voltage resolution

-

-

1/30000

1/30000

1/100000

1/30000

-

RS-232/422、 USB

RS-232/422、 USB

RS-232/422、 USB

RS-232/422、 USB

AC 220V±10％ 50Hz±10％

AC 220V±10％ 50Hz±10％

AC 220V±10％ 50Hz±10％

AC 220V±10％ 50Hz±10％

AC 220V±10％ 50Hz±10％

Serial/USB Communication

-

Chassis and Power Supply Module Power supply

AC 220V±10％ 50Hz±10％

Current limit

Short circuit protection Short circuit protection Short circuit protection Short circuit protection Short circuit protection Short circuit protection

L×H×D

280×175×375mm

280×175×375mm

280×175×375mm

280×175×375mm

280×175×375mm

500×175×375mm

Functions List Basic control way

Manual adjustment, Analog input

Basic functions

Manual adjustment, Analog input, computer serial/USB interface, spontaneous waveform control

Overcurrent protection, Overtemperature protection, dynamic power protection

Software configuration

-

-

Spontaneous waveform

-

-

Optional sinusoidal, square wave, triangular wave, sawtooth wave, and the frequency not decay within 1kHz-10kHz

LCD keyboard

-

-

Standard (LCD, membrane button, RS-232, RS-422, USB)

006

Piezo·Nano·Motion

E70 Series Piezo Controller controller with small size, high power, low power consumption, high bandwidth and low ripple noise. The controller uses a dedicated operational amplifier circuit to ensure high-voltage and high-current output capability. By optimizing the sensing servo module, the accuracy and stability of control are improved.

The reliable anti-interference design ensures the high-frequency response of the controller.

Characteristics

Frequency, Output Voltage and Load Curves 140

• 3 channels

120

• Small size, high output power

100

Output voltage [V]

• Analog and digital control

• Low static power consumption • Extremly low ripple • High amplifier bandwidth • Excellent frequency response performance

80 60 40 20 0

• Stabile PI regulation and control

0

• DC24V power supply

10

100

1000

10000

0.01μF

0.1μF

0.8μF

1.8μF

3.6μF

7.2μF

10μF

25μF

Frequency [Hz]

• USB/RS-232/RS-422 communication interface

Selection Guide Driving Principle

Open/closed loop

H Sta nd a rd ve r si o n

S Closed loop, with feedback

Analog input

Analog P-I algorithm

I Constant voltage ver sion, with constant output

K Open loop

Control

Display/interface module

Power module

Power amplifier

N umber 2 Ve r si o n No .

High voltage output

E70. D

3

S - H

2

Digital/analog

Sensor output

Signal processing

Cha nnels 3 3 c ha nne l

Series Name(module combination) D Standard version, with closed-loop feedback and software

Panel Introduction Front Panel

Power indicator Sensor monitor Target indicator

Rear Panel

Overcurrent indicator

Power port

Power switch

Open/closed loop switch

PZT&Sensor

Control signal switch

Zeroing

RS-232/422

Analog input

USB port

007

Piezo Controllers

E70 series piezo controller is a 3-channel piezoelectric ceramic

Technical Data

Functions

E70.D3S-H2

E70.D3S-I2

Digital and analog piezo controller

Drive

Input power（W）

56

Peak current（A）

1.1/ channel

Ave.current（mA）

70/ channel

Bandwidth（Hz）

10k/ channel

Bandwidth, 1/10 （Hz） Bandwidth（-3DB） （Hz） Bandwidth,1/10 （-3DB）（Hz）

4-M4 5

11

10k

11

4-M3 5

37k 54k

Ripple（mV）

5/channel（2.2μF）

PZT connector

ECG.1B.314（LEMO）

Input connector

10

0~120V (Optional 0~150V ) The 3rd CH is 120V/150V

90

0-120 （Optional 0-150）

10

0-10

143.2 134 80

0-10

45.5

Output voltage（V）

168.5 120

4-M3 5

10

Analog input（V）

3

90

Channels

10

Piezo Controllers

Models

Dimensions

Pin Definition 1.Sensor Monitor Connector Interface

SMB

Sensor Sensor type Servo

SGS P.I+Low pass+Notch filter

Sensor output connector

EPG.0B.304（LEMO）

Sensor output ripple（mV）

10

No.

Interface Communicate interface

RS-232/422、USB

Pin Definition

0

Housing

1

CH1 sensor output

2

CH2 sensor output

Processor

ARM 32 Bit

D/A converter

16 位 ±10V

3

16 位 ±10V

CH3 sensor output；Null when CH3 is constant voltage output

4

Ground GND

A/D converter Software function

Output voltage and displacement, waveform control, setting parameters.

Waveform

Programmable waveform, standard waveform

Secondary development

VC++, Matlab, LabView use routines and DLL dynamic link library functions, etc.,

2.PZT&Sensor Voltage Output and Sensor Input Interface

Others Operating temperature（℃）

0-50℃

Overcurrent protection

Yes

Static power（W）

11

Heat dissipation

Fan

Size（mm）

168.5×134×45.5

Mass（kg）

1.2

Power supply

24V DC

Control mode

Analog/digital signal control

008

No.

Pin definition

No.

Pin definition

1

CH 1 sensor input "+”

8

CH 3 voltage output

2

CH 1 sensor input “-”

9

CH 2 voltage output

3

CH 2 sensor input “-”

10

CH 1 voltage output

4

CH 3 sensor input “+”

11

Ground GND

5

CH 3 sensor input “-”

12

CH 2 sensor input “+”

6

Ground GND

13

Sensor power supply：DC10V

7

Voltage output ground, HV-GND

14

Ground GND

Piezo·Nano·Motion

E52 Series Piezo Controller applications like driving piezoelectric valve. It has a compact size and an average power of 50W. E52 piezo controller can control one dispensing valve. The dispensing parameters can be changed as required. The control mode is analog control, and easy to operate. Just change the amplitude and frequency of the input signal to adjust the dispensing amount and speed.

Characteristics • Self-developed piezo dispensing valve controller • Step time is only 50μs at 10μF load • Analog control •

Appearance and Functions

40 ms/time dispensing time

Selection Guide Open/closed loop S Closed loop, with sensor

H Standard

K Open loop

I Simplified, low power

Number 2 Version No.

1

E52. B

S - H

2

No.

Function

Description

①

Power indicator

Green, lights when power's on

②

Overcurrent indicator

Red, lights when the output current exceeds the rated value

③

Analog input

Analog voltage input interface

④

Potentiometer

Parameters adjustment(sensing zero, input offset, input gain)

⑤

Sensor monitor

Detect sensor output , voltage range 0-10V

E52.B1S-H2

Medium-size , 1 channel, standard

⑥

Sensor

Sensor input

E52.B1S-I2

Medium-size , 1 channel, simplified

⑦

PZT

Voltage output interface

E52.A1K-H2

Medium-size , 1 channel, open loop

⑧

Servo

Open/closed loop switch

Channels 1

1 channel

Series name（modules combination） B Standard version, closed loop A Standard version, open loop

Models

Frequency, Output Voltage and Load Curves

Characteristics

Driving Principle

Piezo amplifier

Output voltage [V]

Analog input

High voltage output

Offset adjustment

Control mode Frequency [Hz]

009

Open loop Closed loop

Sensor Servo Control

Sensor signal input

Sensor output

Piezo Controllers

E52 micro dispensing valve controller is specially developed for high-power

Technical Data

Piezo Controllers

Models

E52.B1S-H2

E52.B1S-I2

E52.A1K-H2

Functions

Closed loop piezo controller （standard version）

Closed loop piezo controller （simplified version）

Open loop piezo controller

1

1

1

0~10

0~10

0~10

0~120（Optional 0~150）

0~120（Optional 0~150）

0~120（Optional 0~150）

Peak current(A)

17

0.35

17

Ave. current(A)

0.3

0.06

0.3

Bandwidth(kHz)

10

10

10

Ripple(mVpp)

3(0.1μF)

5（2.2μF）

3(0.1μF)

PZT connector

LEMO single core

LEMO single core

LEMO single core

SMB connector

SMB connector

SMB connector

SGS

SGS

-

Analog P-I+notch filter

Analog P-I +low pass filter+notch filter

-

LEMO 4 cores

LEMO 4 cores

-

SMA connector

SMA connector

-

Operating temperature(° C)

0~50

0~50

0~50

Temperature, fan on(° C)

40±5

40±5

40±5

75±5 （Power supply is cut off）

75±5 （Power supply is cut off）

75±5 （Power supply is cut off）

60±5

60±5

60±5

Drive Channel Control input voltage(V) Output voltage(V)

Control input connector Sensor Sensor type Servo characteristics Sensor connector Sensor output connector Others

Over temperature protection(° C) Over temperature protection recovery(° C) Overcurrent protection

Overcurrent indicator lights when Overcurrent indicator lights when Overcurrent indicator lights when output ave.current > 0.3A output ave.current > 0.06A output ave.current > 0.3A

Static power(W)

<8

4.2

<8

Dimensions(mm)

L193×H60×D137.5

L193×H60×D137.5

L193×H60×D137.5

1.76

1.76

1.76

220V AC(198V~242V)

220V AC(198V~242V)

220V AC(198V~242V)

Mass(kg) Power supply

010

Piezo·Nano·Motion

E53 Series Piezo Controller CoreTomorrow develops E53 series piezo controller. It is a singlechannel controller controlled by analog and digital signals. It has three specification versions with different functions. Its the power supply is 24VDC/1A. The body has a heat-dissipating area that quickly conducts the heat generated.

Characteristics • Small Size • Three versions with different functions • Single channel • 24VDC power supply • Easy to integration

Driving Principle

Panel Introduction

E53.A（power amplifier）

E53.A Power amplifier

Analog in

PZT connector

Analog input

High voltage output Power switch Power indicator

E53.B （power amplifier+sensor servo control）

Power High voltage output

Power amplifier

Analog in

E53.B

Offset adjustment

Control mode

Overcurrent indicator

Open loop Closed loop

Sensor signal input

Sensor servo control

Sensor output

Closed loop Sensor connector integral Zeroing

Open/closed loop switch

Overcurrent indicator

Power indicator

E53.D（power amplifier+sensor servo control+software control）

PZT connector

Analog input Low pass filter Sensor monitor

High voltage output

Power amplifier

Analog in

E53.D RS-232/422

Control unit

Communication control

Closed loop integral

Sensor connector Zeroing

Overcurrent indicator

Sensor/servo unit

Communication Interface

Selection Guide Open/closed loop

Analog input Power indicator

H Standard

S Closed loop, with sensor

I Multi-channels, combination

K Open loop

E53. B

Target indicator

USB

Low pass filter

Target indicator

PZT connector

Sensor monitor

Num ber

1

S - H

2

2 Version No. Models

C hannels Series Name(module combination)

1

1 c ha nne l

A 1 channel, open loop, analog control

2

2 c ha nne l

B 1 channel, closed loop, analog control

3

3 c ha nne l

C 1 channel, open loop, analog&digital control

E53.A1K-H2

Features Small size, 1 channel, open loop, standard

E53.B1S-H2

Small size, 1 channel, closed loop, standard

E53.C1K-H2

Small size, 1 channel, open loop, software, standard

E53.D1S-H2

Small size, 1 channel, closed loop, software, standard

RS-232/422 Pin Definition

D 1 channel, closed loop, analog&digital control

011

Piezo Controllers

To m e e t t h e s m a l l - v o l u m e a p p l i c a t i o n r e q u i r e m e n t s ,

Frequency, Ouput Voltage and Load Curves

Dimensions

Output voltage[V]

Frequency[Hz]

Technical Data

E53.B

Appearance Models

through hole

E53.A1K-H2 E53.B1S-H2 E53.C1K-H1 E53.D1S-H2

Channels

1

Control input voltage (V)

0~10

Output voltage (V)

0~120（Optional 0~150）

Peak current(A)

1

Ave. current(mA)

60

Bandwidth(kHz)

10

E53.C

Ripple(mVpp)

10(2.2μF)

PZT connector

LEMO single core

Input connector

SMB connector

Sensor Sensor type

-

SGS

-

SGS

Servo characteristic

-

Analog P-I+Notch filter +Low pass filter

-

Analog P-I+Notch filter +Low pass filter

Sensor connector

-

LEMO 4 cores

-

LEMO 4 cores

Sensor output connector

-

SMA connector

-

SMA connector

C

Piezo Controllers

through hole

E53.A

through hole

Interfaces and operation Communication interface

-

-

USB,RS-422, RS-232

Processor

-

-

32Bit 168MHz

D/A converter

-

-

16Bit

A/D converter

-

-

16Bit

Others Operating temperature(° C) Output current, short-circuit (mA) Overcurrent indication Static power(W) Size(mm) Mass(kg) Power supply

E53.D

0~50 60 Overcurrent indicator lights when output ave. current > 60mA 1.8

<4

<5

<5

L85×H27.5×D80 L123×H27.5×D80 L148×H27.5×D80 L148×H27.5×D80

0.24

0.28

0.35

0.35

24V(20V~30V)DC/1A

012

through hole

Piezo·Nano·Motion

E63.A Series Piezo Controller piezoceramic controller with analog input control and pin-type connection. The product is small in size, and suitable for industrial application.

Characteristics • Output voltage: 0~120V/150V • Single-channel open-loop control • Analog input 0~10V • Suitable for industrial applications

Output Voltage, Frequency and Load Curves

Voltage Drop Curve Output voltage[V]

Frequency[Hz]

10000 1000 100

4.7nF 10nF 0.1μF 0.8μF 1.8μF

10 1 0

20

40

60

80

100

120

140

160

160 150 140 130 120 110 100 90 80

0

5

10

15

20

25

Output current[mA]

Output voltage[V]

Note: The maximum output voltage will decrease as the output current increases.

Pin Definition

Pin No. 1

Function Power supply:+15VDC/0.5A Supply voltage ground and control input ground, 2 AGND Analog voltage input 3 4 Voltage output ground: SGND 5 Analog voltage output Housing Shielding ground GND

Technical Data

Driving Principle

Models

E63.A1K

Function

Analog single channel driver

Analog input

Drive Channels

1

Control input voltage（V）

0~10

Output voltage range（V）

0~120（optional 0~150）

Peak current（mA）

Dimensions

170

Ave. Current（mA）

12

Static power（W）

0.2

Amplifier bandwidth（kHz）

Piezo amplifier

High voltage output

1

Output ripple（mVpp）

5（2.2μF） 5P single row pin (2.54 pitch)

Interface

Others Operating temperature（℃） Size (L×W×H) mm Mass（g） Power supply Heat dissipation

0 ~ 50 60×30×11.5 30 +15VDC/0.5A through hole

The housing needs to be cooled

013

Piezo Controllers

E63.A1K is a small-volume single-channel open-loop low-dynamic

E63.C Series Piezo Controller

Characteristics • Output voltage: 0~150V • Single channel open loop control • Software control • Suitable for Industrial application

Driving Principle

PC

USB connect

Control Unit

Voltage, Step Time and Load Curve

Driving circuit

LEMO connect

Load Step time ms

Piezo Controllers

E63.C1K is a small-volume single-channel open-loop low-dynamic piezoelectric ceramic controller with USB power supply and computer software control, and suitable for industrial applications.

The product is only the size of the U disk, which is convenient for the integrated controller and is the first choice for the open-loop small-volume piezoelectric controller.

Technical Data Models

Peak-peak voltage[V]

E63.C1K

Function

USB 1-channel driver

Channels

1

Units

Application

Power supply

5 / 500

V/mA

Output voltage

0~150

V

32

bit/MHz

Processor D/A converter

12bit

A/D converter

-

Peak current

35

mA

Ave. Current

2.5

mA

6

mA

Output current, short-circuit Short circuit protection

Yes（6mA）

Input power

1.2

W

Static power

0.4

W

1

kHz

8（2.2 μF）

mVpp

0 ~ 50

℃

Size

89×30×14

mm

Mass

52

g

Amplifier bandwidth Output ripple Operating temperature

Heat dissipation PZT connector Connector

Below image shows that E63.C1K driving a preloaded piezo actuator, which is very compact and easy to integrate, making it ideal for applications such as interferometers.

Dimensions

The housing needs to be cooled

LEMO single core USB-A

014

Harbin Core Tomorrow Science & Technology Co., Ltd. Tel：0451-86268790 Fax：0451-86267847 Postcode：150080 Email：info@coremorrow.com Web：www.coremorrow.com Address：6F, No.41 Hanguang Street Nangang Distric,Harbin

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