P77.D9 Piezo Phase Shifter
P77.D9 Piezo Phase Shifter P77 series piezoelectric phase shifters are specially designed for optical detection of phase shift applications, with travel range of up to 50µm and load capacity of up to 10kg. P77.D9 is one of the P77 series. It has a central through hole of φ140mm, phase shift stroke of up to 32μm, and resolution of 0.5nm. It is suitable for horizontal laser interferometers for measurement of various optical lenses and lenses. Load capacity up to 5kg.
CoreMorrow piezoelectric phase shifters are mainly customized designs, tailored according to customers' equipment applications. Features • Travel range to 0~16/32μm • Aperture Φ140mm • Load to 5kg • Customized Applications • Microscopic imaging • Surface inspection • Phase shift/interference/metering • Precision positioning • Phase shifter • Optical capture 10V step voltage and displacement curve
P77.D9 Piezo Phase Shifter
Applications P77.D9 piezoelectric phase shifter is specially designed for horizontal laser interferometer, loaded with large aperture frame, etc., sub-nanometer stepping phase shift, provides high-precision core components for optical inspection equipment, significantly improve optical inspection Accuracy.
Technical data Active axes: Z Travel range(0~120V): 12.8/25.6μm Travel range(0~150V): 16/32μm Aperture: φ140mm Size: 210×210×56mm Resolution: 0.5nm Pitch/Yaw/Roll: <15μm Unloaded resonant Frequency: 200Hz Load capacity: 5kg Electrical Capacitance: 14.4/28.8μF Material:Aluminum, steel Mass: 4.2kg Operating Temperature: -20~80℃ Control: 1/2 channel Connector: LEMO Cable length: 1.5m
P77.D9 Piezo Phase Shifter
P77 series