N31 Series Linear Piezoelectric Motor

N31 Series Linear Piezoelectric Motor N31 series of linear piezoelectric motors from CoreMorrow are internally driven by PZT piezoelectric drives. The linear motion stroke can be 25, 50, 100mm, and the resolution can reach sub-nanometer level with optional closed-loop servo sensor (incremental encoder), higher positioning accuracy and optional gliding table.

Features • Large force • Automatically return to position after closed-loop accidental touch • Automatic zero position adjustment after power-on • Optional grating digital closed loop • Using wear-resistant materials, vacuum non-magnetic compatible

N31 Dynamic Demonstration Video https://www.youtube.com/watch?v=fhoiCM8-K24

N31 Dynamic Demonstration Video (With Gliding Table) https://www.youtube.com/watch?v=NgKiH6R76HM N31 Dynamic Demonstration Video (With 10kg Load) https://www.youtube.com/watch?v=THHxYcUu54Y

Application Field • Industrial-grade precision positioning • Semiconductor technology/testing • Wafer inspection • Offset printing • Nanoimprint • Nanometrics • Motion in a strong magnetic and vacuum environment

Large Force The active push-pull force of the N31 series linear piezoelectric motors can reach 50N, and the passive holding force can reach 60N. In addition, when the N31 is placed horizontally, it can carry out high-precision movement under a load of 10kg.

Incremental Encoder Improves Accuracy N31 can be equipped with an incremental encoder as a closed-loop sensor, which can improve the accuracy of linear motion.

Power-Off Self-Locking, Automatic Change, Automatic Return N31 has a self-locking function after the power is off, and when it is powered on again, it will automatically find the change position. In use, if there is an accidental collision, N31 will automatically adjust the home position.

Wear-Resistant Materials The N31 linear piezoelectric motor uses highly wear-resistant materials with a life span of more than one kilometer.

Supporting Controller The E71 series piezoelectric controller is specially designed to drive the N31 linear piezoelectric motor. It is digitally controlled by the upper computer, the movement speed is adjustable, and it adopts the setting method of approaching the target position.

Technical Parameters Model: N31 linear piezoelectric motor Motion type: X Integrated sensor type: incremental encoder Nominal travel range: 25mm, 50mm, 100mm Speed: 10mm/s Closed loop resolution: <10nm Open loop resolution: <0.1nm Push/pull force (active): 50N Holding power (passive): 60N Working temperature: 0~50℃ Material: aluminum, stainless steel Cable length: 1.5m