Cage Structure Optical Systems Application of CoreMorrow Piezo Nano‐Motion Products In recent years, with the continuous development and progress of science and technology, more and more research fields have put forward higher requirements for micro‐nano control, and piezo nano‐positioning systems have also achieved continuous breakthroughs and innovations. Harbin Core Tomorrow Science & Technology Co., Ltd. focuses on the research and development, production and sales of nano‐level precision positioning products, providing domestic and foreign customers with precision positioning technology solutions and products, which can achieve sub‐ nanometer resolution and nanometer positioning accuracy. CoreMorrow’s piezo nano‐motion products use high‐reliability piezo ceramic actuators, which can ensure the stability of piezo ceramics in extreme environments. Compared with traditional driving mechanisms, CoreMorrow’s piezo motion platform uses flexible hinge mechanism that has the advantages of no mechanical friction, fast response speed, and high repeat positioning accuracy. The flexible hinge is a component that is not affected by static and dynamic friction. The flexible unit has high rigidity and load‐bearing capacity, and the hinge guide does not require maintenance and there is no wear.
At present, the company's products have been widely used in semiconductor technology, optoelectronics, communications and integrated optics, optical instruments and equipment, medical biological microscopy equipment, life sciences, precision processing equipment, new drug design and medical technology, data storage technology, nanotechnology, nanomanufacturing and nano‐automation, aerospace, image processing and other fields, and has been widely used in cage structures.
Cage Structure The traditional adjustment frame in the optical system construction is very inconvenient. The traditional optical machinery is a system without reference, and it is impossible to judge the coaxial error between the components in the system. It is difficult to build a system that meets the design
requirements, so a new type of optical machinery ‐cage structure was introduced. When an optical system is built on an optical platform with a cage structure, the optical axis is referenced based on the optical platform. The components in the system use the precision of machining to ensure the coaxiality, and there is a reference system. The image optical axis, cage rod and optical table are parallel and have a reference.
The Integration of CoreMorrow's Piezo Nano‐Motion Products & Cage Structure CoreMorrow designed and developed a piezo motion product specially applied to the cage structure optical system, which can meet the adjustment of straight line and angle, and has very strong flexibility. The shape and structure can be customized, and the aperture reserved for the cage structure makes it very easy to integrate into the structure. The following are a few examples of the integration of core tomorrow's products into the cage structure. 1. Micro‐nano Scanning Below is CoreMorrow’s P76 series Z‐direction piezo objective lens positioner integrated in a cage structure to perform single‐axis Z‐direction micro‐nano scanning, providing millisecond‐level fast response and 2.5nm resolution, which can perform quick high‐precision sample scan. In this structure, the P76 is directly installed in the cage structure through a 45‐degree connecting frame.
2. Surface Plasmon Resonance Analysis System SPR
Surface Plasmon Resonance technology, abbreviated as SPR, is a new technology developed from the 1990s. It uses the principle of SPR to detect the relationship between the ligand and the analyte on the biosensor chip. The interaction between the two is widely used in various fields. The cage structure below is a surface plasmon resonance analysis system built by Ruiguang Kaiqi Company. The P70.Z series piezo nano positioning stage designed by CoreMorrow is used in this system. The P70.Z series piezo nano positioning stage can produce a stroke of 8μm in the Z direction, the step is controlled by voltage, and the step resolution can reach 0.6nm.
3. Optical Tweezers Operating System The figure below shows the optical tweezers operating system, which was also built by Ruiguang Kaiqi Company. Among them, the P70.Z series piezo nano positioning stage is also used, which is used to precisely adjust the distance between the focal point and the sample after focusing by the objective lens, so as to cooperate with the completion of the optical tweezers operation.
4. Interference Phase Shift The picture below shows a ZT50M14 phase shifter for cage structure custom‐designed by CoreMorrow, which integrates a two‐dimensional manual adjustment frame, and has reserved cage structure mounting holes. It is equipped with CoreMorrow M14 series piezo actuator with a lens bonding surface at the moving end, which is used to move the position of the mirror surface in nanometer steps, thereby adjusting the optical path of the reflected light. The range of motion stroke of the ZT50M14 phase shifter is freely selected within the range of 0~114μm.
5. The Piezo Deflection Mirror Integrated into the Cage Structure The picture below shows a customized piezo deflection mirror. The S38 piezo deflection mirror is installed in a connection adapter with a 90° angle. The S38 piezo deflection mirror adopts a custom‐ designed threaded moving end and is equipped with a lens cap. The fixed mounting cap can directly
fix the lens on the surface, making it easy to install the lens. The 90° corner adapter directly reserves a cage structure mounting hole, and the piezo deflection mirror can be directly integrated into the cage structure, and the light path can be precisely adjusted with an accuracy of nano‐ radian level.
6. The Piezo Screw Lens Adjustment Frame Integrated Into the Cage Structure The figure below is still a mirror frame integrated in the cage structure designed by CoreMorrow. The two‐dimensional adjustment of the lens is driven by two CoreMorrow N81 linear piezo screws. The two piezo screws cooperate to produce the reflecting lens motion. The deflection movement has a larger deflection angle, which is suitable for a relatively large range of optical path adjustment. The linear motion stroke of the piezo screw is controlled by the electrical signal output by the CoreMorrow E53.C4K piezo controller, and the adjustment speed is faster and more convenient.
7. White Light Interferometer The following figure shows the cage structure of the white light interferometer, which is still built by Ruiguang Kaiqi Company. Among them, a CoreMorrow encapsulated piezo ceramic actuator is used for nano‐stepping phase shift adjustment. CoreMorrow’s piezo ceramic actuator is small in size and has a nanometer‐level high resolution, making it a highly reliable and high‐speed piezo phase shifter in white light interferometers.
8. Michelson Interferometer The following picture shows the Michelson interferometer built by Ruiguang Kaiqi Company. Among them, CoreMorrow’s encapsulated piezo ceramic actuator is also used for nano‐stepping phase shift adjustment.