A p p lications
Semiconductor
In the semiconductor field, our company provides various solutions based on piezoelectric ceramics, including long-life piezoelectric elements for shock absorption, and ultra-high-performance large-stroke nano-positioning ceramics for positioning. Other precision motion products include piezoelectric deflection stages for fast beam stabilization/angle correction, piezoelectric flexible nanopositioning stages for nanometer measurement applications, and nano alignment system for mask alignment, a new hybrid large-stroke nanopositioning stage for horizontal and vertical positioning.
Applications
Solutions
Nanoimprint; CD test;
Multi-axis piezoelectric system;
Mask and wafer alignment;
Nano positioning stage;
Objective lens precision
Piezo actuator;
positioning/lithography
Nano focusing system
Optical interferometry
Typical Products Customized 6-axis precision piezoelectric positioning stage; P16 nanometer precision positioning scanning stage; P72 piezo objective lens positioner
Customized long travel objective scanner;
Closed-loop piezoelectric actuators
XP-63X high-precision nanopositioner;
and flexible guiding system
Cable splicing
Piezoelectric bender actuators
Optical test/6-axis
Micro-positioning system of
positioning
6-axis parallel mechanism
XP-620 piezoelectric positioning stages
Piezoelectric bending disk
H60 6-axis positioning system; Customized large stroke Hexapod system
Hinge amplified piezoelectric
P11.XYZ piezoelectric positioning
Large stroke nano-
actuator;
stage;
alignment system
1~6 axis piezoelectric flexible
Piezoelectric actuator with ultrahigh
positioning stage
blocking force
Optical beam scanning and stability;
P35 piezo deflection mirror; Fast piezo steering mirrors system
P33 high dynamic piezo deflection
Optical path correction
mirror
Large blocking force piezo actuator; Active damping
High-voltage piezo stacks;
Piezoelectric ceramic actuator
Piezoelectric fiber actuator/sensor
Longitudinal wafer
Piezoelectric Z/tip/tilt deflection
positioning
stage
Customized 6-axis precision piezoelectric nanopositioning stage; S51 Z/tip/tilt positioning stage
* In addition to the above, we may have other products more suitable for your application. Please contact our application engineer or visit www.coremorrow.com/en
www.coremorrow.com/en/
4
sjl@coremorrow.com