FEATURE – Nanotechnology Additive Manufacturing
Melbourne Centre for Nanofabrication Feature Source: Sally Wood
The Melbourne Centre for Nanofabrication (MCN) combines cutting-edge technology with the skills and experience of expert process engineers to form a world-class nanofabrication centre. MCN is a joint venture that functions in collaboration with six Victorian Universities (Monash University, Deakin University, The University of Melbourne, RMIT, La Trobe University, Swinburne University and Victoria University) and the CSIRO. MCN represents a $50+ million investment in micronanotechnology infrastructure. MCN is proud to be part of the Australian National Fabrication Facility (ANFF), and is the largest and broadest capability within the ANFF network. Being a node of the ANFF enables MCN to connect with other national research facilities in micro and nanofabrication, allowing for the identification of partners, collaboration and innovation. MCN provides a pipeline for the design, fabrication, characterisation and testing of nanotechnology materials and devices at a single facility, which enhances productivity and quality gains for users. As such, MCN enables smooth transition from concept to prototype, while also offering the possibility to scale up to trial batch production, which creates a comprehensive user experience. By providing cutting-edge facilities and end-to-end services, MCN aims to be a world leader for the development and realisation of breakthrough technologies that harness nano and microfabrication.
MCN Services MCN is home to class 10,000 and class 100 clean room spaces, state-of-theart instrumentation, reconfigurable biochemistry and PC2 laboratories, and a world-class microscopy laboratory. These facilities enable MCN to provide services in key areas, including:
Lithography MCN offers a wide range of lithographic techniques and instruments, including: - Focused ion beam lithography 54 | JUNE 2020
Packaging MCN provides the necessary equipment required for wafer bonding, dicing and wire bonding, which is necessary for the completion of most nano and microfabrication devices.
Etching MCN houses two Reactive Ion Etching (RIE) systems, which are used extensively in the fields of LEDs, semiconductors, electronics, MEMs, communication technology, microfluids, optoelectronics, and photovoltaics.
Case Studies A vast array of research is currently being undertaken at MCN in multiple fields. Some of these projects include: - - - - - - - -
Electron beam lithography Hot embossing Nano imprint lithography Thermal scanning probe lithography PDMS soft lithography Direct write lithography Photolithography Spin coating and wafer development
Thin Film Deposition MCN offers a wide array of techniques and instruments for thin film deposition, including: - Atomic layer deposition - E-Beam evaporation - Thermal evaporation - Diamond deposition - Chemical vapour deposition - Polymer electronics glovebox - Sputtering - Electroplating - Furnace systems for oxide and nitride growth
Characterisation MCN features a broad range of instruments for the characterisation and imaging phase of fabrication processes, including: - Atomic force microscopy - Scanning electron microscopy - Spectroscopic ellipsometry - Laser doppler vibrometry - Profilometry - Laser scanning confocal microscopy - Laser TIRF - Microspectrometry - Hyperspectral imaging BACK TO CONTENTS
Colour Coded Chemicals Researchers at La Trobe University, in collaboration with RMIT, have been investigating novel ways to analyse chemicals using visible light. This research has been facilitated by MCN’s facilities. The device they have developed uses the interactions between photons and electrons to filter out colours to create an ‘optical barcode’ that is unique to a sample and can be compared to a library of known material signatures. The tuneable and potentially portable device can help to quickly identify concentrations of chemicals and can be used for a variety of sensing applications, such as monitoring water pollutants and inspecting soil quality. The device does not chemically change or modify the solution being analysed, which means that it has the potential to be used for real-time monitoring, allowing for applications in food and pharmaceutical production industries. The device uses microfluidic channels to direct a liquid sample over a silver coating. Light is able to pass through the device thanks to an array of nanometresized holes that feature on the coating. Broadband light is passed through the liquid and is observed from the other side, enabling the identification of a sample. As it passes through the liquid and the array, all but one colour is filtered out, depending on the refractive index of the sample. WWW.MATERIALSAUSTRALIA.COM.AU