WE LOOK FORWARD TO MEETING YOU AT MNE2017 INL - International Iberian Nanotechnology Laboratory Avenida Mestre José Veiga s/n 4715-330 Braga - Portugal
Visit the website and subscribe our newsletter: http://mne2017.org/
Phone: Tel. (351) 253 140 112 Fax: (351) 253 140 119 Email: info@mne2017.org
FULL PROGRAM Monday, Sep 18th CONFERENCE SITE OPENING 9:00 - 18:00
Conference Activities Short Courses
REGISTRATION
Registration and Reception
17:00 - 19:00
Registration
WELCOME
Welcome words from the organization
19:00 - 20:00
Refreshments
THEATRO CIRCO
Tuesday, Sep 19th OPENING
Opening
9:30 - 10:00
Conference opening at Theatro Circo
PLENARY TALK
Plenary talk
10:00 - 10:45
Frank Schuurmans (ASML, The Netherlands) - “The story of ASML – from spin off to a leading semiconductor lithography company”
PERFORMANCE
Performance
10:45 - 11:15
“Sounds and Movements inspired by Nano Engineering” - Theatro Circo
PLENARY TALK
Plenary talk
11:15 - 12:00
Olivier Joubert (CEA-LETI, France) - 20 years celebration talk – “New trends in plasma etching for ultra large scale integration technology”
TRANSFER
Transfer
12:00 - 12:30
Transfer to INL facilities
LUNCH
Lunch
12:30 - 13:30
Lunch at INL
MNE2017
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Tuesday, Sep 19th SESSIONS 13:30 - 15:00
SESSION 1A
Room A / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes
Sub-topics 1.1. Photon Lithography, 1.2. Electron and Ion Beam Lithography 13:30
Invited - EUV insertion at the N5 node Victor Blanco IMEC, Belgium
SESSION 2A
Room B / Parallel Session
Topic: 3. Micro/Nano Engineering for Physical and
Structures, Devices and Systems
Chemical Applications
Sub-topics: 2.2. Fabrication & Integration of
Sub-topics: 3.4. Optics and Photonics
MEMS/NEMS “Nanocrystalline graphite coatings for lateral silicon MEMS transistors”
“3D metamaterials at optical frequencies”
Jamie Dean Reynolds :: Sunil Rana :: Ting Ying
nae So1 :: Jungho Mun1 :: Rho1 1 - Pohang University of Science and Technology (POSTECH)
1
2
Ling :: Liam Anand Boodhoo :: Suan Hui Puan :: 1
3
Dinesh Pamunuwa2 :: Harold Chong1 1 - University of Southampton; 2 - University of Bristol; 3 - University of Southampton Malaysia Campus
“Wafer-scale Printing of 62nm Line/Space Patterns using a 193 nm ArF Laser” Li Wang1 :: Christian Dais1 :: Francis Clube1 :: Andreas Amrein1 :: Harun Solak1 1Eulitha AG, 5416 Kirchdorf, Switzerland
Inki Kim1 :: Gwanho Yoon1 :: Minkyung Kim1 :: Su-
“Fabrication and Characterization of a Hammer-Shaped BEOL-Embedded CMOS-Nanoelectromechanical Relay”
“Mapping Photoemission and Hot-Electron Emission from Plasmonic Nanoantennas”
Martin Riverola1 :: Arantxa Uranga1 :: Francesc
:: Yujia Yang2 :: Franz Kärtner3 :: Karl Berggren2 1 - Trinity College Dublin; 2 - Massachusetts Institute of Technology; 3 - Center for Free-Electron Laser Science, Deutsches Elektronen-Synchrotron, Hamburg, Germany
Torres1 :: Nuria Barniol1 1 - Universitat Autònoma de Barcelona
14:00
Room C / Parallel Session
Topic: 2. Fabrication and Integration of Micro/Nano
3
13:45
SESSION 3A
Invited - “Conformal nanogaps fabricated by cleavage of single-crystal silicon on MEMS” Toshiyuki Tsuchiya Kyoto University, Japan
Richard Hobbs1 :: William Putnam2 :: Arya Fallahi3
“Photothermal probing of metallic nanoparticles on nanomechanical string resonators to study plasmonic heating effects” Varadarajan Padmanabhan Rangacharya1 :: Kaiyu Wu1 :: Peter Emil Larsen1 :: Tomas Rindzevicius1 :: Anja Boisen1 MNE2017
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Tuesday, Sep 19th 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Technical University of Denmark 14:15
“A novel method to find the best (iso-focal) process point in electron beam lithography” Ulrich Hofmann1 :: Nezih Ünal1 :: Safak Sayan2 :: Gerald Lopez3 1GenISys GmbH; 2IMEC; 3University of Pennsylvania
“RF characterisation of CMOS-compatible Silicon-on-Insulator Nanoelectromechanical Resonators” Yoshishige Tsuchiya1 :: Naoaki Harada1,2 :: Christos Giotis1 :: Joshua Lamb1 :: Faezeh Arab Hassani1 :: Mitsuhiro Shikida2 :: Cecilia Dupre3 :: Eric Ollier3 :: Sebastian Bartsch4 :: Adrian Mihai Ionescu4 :: Hiroshi Mizuta1,5 1 - Naonelectronics and Nanotechnology Research Group, Department of Electronics and Computer Science, University of Southampton; 2 - Hiroshima City University; 3 - CEA-Leti; 4 EPFL; 5 - JAIST
14:30
“Free-standing metasheets with opposite side metasurfaces by transmitted electron beam lithography” Bing-Rui Lu1 :: Jianan Deng1 :: Yifang Chen1 :: 1 - Nanolithography and Application Research Group, State key lab of Asic and System, School of Information Science and Engineering, Fudan
“Novel magnetic sensing principle for MEMS displacement readout” Rosana Dias1; Eurico E. Moreira2; S. Cardoso3; Paulo P Freitas1; Luis A. Rocha2; Joao Gaspar1 1 - INL-International Iberian Nanotechnology Laboratory; 2 - CMEMS, Universidade do Minho; INESC MN, Lisbon
“Photothermal analysis of direct-write purified gold nanostructures with nanomechanical resonator” Mostafa Moonir Shawrav1,2; Miao-Hsuan Chien1; Philipp Taus2,3; Heinz D. Wanzenboeck2; Emmerich Bertagnolli2; Silvan Schmid1 1 - Micro and Nanosensors Group, Institute of Sensors and Actuator Systems, TU WIEN; 2 - Bionanobeam Group, Institute of Solid State Electronics, TU WIEN; 3 - Institute of Science and Technology
Invited - “Vacuum Rabi splitting in a plasmonic cavity at the single quantum emitter limit” Ora Bitton Weizmann Institute, Israel
University, Shanghai 14:45
“Review of functional silicon nanostructures defined by focused ion beam implantation” Jordi Llobet1 :: Christian Pinto-Gómez2 :: Xavier MNE2017
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Tuesday, Sep 19th 14:45
Borrisé3; Francesc Pérez-Murano2 1 - International Iberian Nanotechnology Laboratory; 2 - Institute of Microelectronics of Barcelona; 3 - Catalan Institute of Nanoscience and Nanotechnology & The Barcelona Institute of Science and Technology
POSTER
Poster
15:00 - 15:15
Invited Poster Pitch 1 - 10 posters
COFFEE BREAK
Coffee Break
15:15 - 17:00
Coffee Break / Exhibition Poster Session 1
SESSIONS 17:00 - 18:30
17:00
SESSION 1B Room A / Parallel Session
SESSION 2B Room A / Parallel Session
SESSION 4A Room A / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrica-
Topic: 2. Fabrication and Integration of Micro/Nano
tion Methods and Processes
Structures, Devices and Systems
Sub-topic: 1.3. Nanoimprint Lithography and
Sub-topic: 2.2. Fabrication & Integration of
Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topic: 4.1. Bio-Inspired Technologies, 4.2. Bio-Mimetic Surfaces
Replication Methods
MEMS/NEMS
“Wafer-Level Nanoimprint Lithography towards Single Nanometer Resolution” Thomas Glinsner1; Martin Eibelhuber1; Dominik Treiblmayr1; Barbara Schamberger1; Mustapha Chouiki1; Claudia Lenk2; Yana Krivoshapkina2; Martin Hoffmann2; Steve
Invited - “Fabrication of piezoelectric actuators with a pure twisting response” David Elata Israel Institute of Technology, Israel
“Single step fabrication and loading of biopolymer microcontainers for oral drug delivery” Zarmeena Abid1; Ritika Singh Petersen1; Stephan Sylvest Keller1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug MNE2017
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Tuesday, Sep 19th Lenk2; Ivo Rangelow2 1 - EVGroup; 2 - TU Ilmenau
Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Technical University of Denmark
17:15
“Fabrication of Dual-Scale Nanoimprint Molds Using Polymer Stencil Membranes” Junseo Choi1; Sunggook Park1 1 - Louisiana State University
“Soft nanometer-thin membranes based on entangled PDMS for tissue-like foldable bioelectronics” Töpper Tino1; Siketanc Matej1; Osmani Bekim1; Lörcher Samuel1; Müller Bert1 1 - University of Basel
17:30
“Fabrication of UV resin stamps from sharp nanostructures and their performance for thermal NIL” Zheng Jia1; Junseo Choi1; Sunggook Park1 1 - Louisiana State University
“Fabrication of air-filled waveguide filter with pillar array using 3D printing and MEMS copper-plating method” Yeonsu Lee1; Sung-Min Sim1; Hye-Lim Kang1; Fermin Mira2; Ignacio Llamas-Garro2; Yi Wang3; Yun-Ho Jang4; Jung-Mu Kim1 1 - Chonbuk National University; 2 - Centre Tecnològic de Telecomunicacions de Catalunya; 3 - University of Greenwich; 4 - Microfluidics for all, Inc.
“Maskless Exposure System Compatible with Nozzle Array and Optical Microscope for 3D Parallel Single-Cell Assembly” Shota Hiratsuka1; Sho Kawaharada1; Shogo Sato1; Takayuki Shibata1; Moeto Nagai1 1 - Toyohashi University of Technology
17:45
”μ-R2R: Fabrication of seamless microstructured tools for multi-material replication” Andreas Striegel1; Norbert Schneider1; Marc Schneider1; Matthias Worgull1 1 - Karlsruhe Institute of Technology, Institute of Microstructure Technology
“Self-folding process for integrated 3D structures in complex microsystems” José Fernandes1; Luís Rocha1; Paulo Mendes2; João Gaspar1 1 - INL; 2 - UMinho
“Multi-photon Direct Laser Writing and 3D imaging of Free-standing 3D Architectures for Cell Colonization” Angelo Accardo1; Marie-Charline Blatche1; Remi Courson1; Isabelle Loubinoux2; Christophe Thibault1; Laurent Malaquin1; Christophe Vieu1 1 - LAAS-CNRS; 2 - TONIC-INSERM
18:00
“Mold-based replication methods for integrated polymer micro-manufacturing: an opportunity for organ-on-chip systems” Paola Fanzio1; Pieter Kapel1; Luigi Sasso1
“Development of a MEMS Loudspeaker or ‘The Role of Luck in MEMS development” Shay Kaplan AudioPixels, Israel
“Study of stability and bioactivity of bevacizumab-loaded PLGA nanoparticles towards its controlled release” Flávia Sousa1; Andrea Cruz2; Teresa Neves-PeMNE2017
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Tuesday, Sep 19th 1 - Delft University of Technology, Dept. of Precision and Microsystems Engineering
tersen3; Inês Mendes Pinto2; Bruno Sarmento1 1 - I3s, instituto de investigação e inovação em saúde; 2 - INL; 3 - Aalborg University
18:15
“Nanoimprint enabled dynamic surfaces: tailoring the wetting properties of amphiphobic surfaces” Ariadna Fernandez1; Achille Francone1; Markus Guttmann3; Clivia M. Sotomayor Torres2; Nikolaos Kehagias1 1 - Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and The Barcelona Institute of Science and Technology, UAB; 2 - ICREA, Institució Catalana de Recerca i Estudis Avançats; 3 - Karlsruhe Institute of Technology (KIT)
“2D Microscale Engineering and Gradient Deposition of Novel Protein based Nanoparticles for Cell Guidance” Witold Tatkiewicz1; Joaquim Seras-Franzosob2; Adriana Kyvic1; Elena García-Fruitós2; Esther Vazquez2; Antoni Villaverde2; Jaume Veciana1; Imma Ratera1 1 - Institut de Ciència de Materials de Barcelona (ICMAB-CSIC)/CIBER-BBN; 2 - 3Institut de Biotecnologia i de Biomedicina (IBB), Universitat Autònoma de Barcelona/ CIBER-BBN
18:30
“The 2017 EIPBN Best overall Poster - Thermal nanoimprinting of mid-IR antireflective moth-eye nanostructures on chalcogenide glass windows” M. R. Lotz1, M. H. Jakobsen1, R. J. Taboryski1 1 - DTU Nanotech, Technical University of Denmark
18:30
Projects
Tours
European projects and platforms
Lab tours to INL flagship facilities Refreshments
19:00
Special Session NFFA Special Session
20:00 20:30 MNE2017
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Wednesday, Sep 20th PLENARY TALK
Plenary Talk
9:00 - 9:45
Goran Stemme (KTH, Sweden) - 10 years celebration talk – “MEMS technology for medical applications”
PLENARY TALK
Plenary Talk
9:45 - 10:30
Mark Hutchinson (CNBP, Australia) - “The Importance of Knowing You are Sick: Nanoscale Biophotonics For The ‘Other’ Brain”
COFFEE BREAK
Coffee Break
10:30 - 11:00
Coffee Break / Exhibition
SESSIONS
SESSION 1C Room A / Parallel Session
SESSION 3B
Topic: 1. Novel Developments in Nano/Micro Fabrica-
Topic: 3. Micro/Nano Engineering for Physical and
tion Methods and Processes
Chemical Applications
Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics: 4.3. Micro and Nano Fluidic Systems
Sub-topics: 1.5. Pattern Transfer
Sub-topics: 3.4. Optics and Photonics
and Their Fabrication,
11:00 - 12:30
Room B / Parallel Session
SESSION 4B
Room C / Parallel Session
4.4. Applications of Micro and Nano Engineeried Fluidic Systems for Life Sciences 11:00
“Functional nanostructured silicon surfaces fabricated by block-copolymer nanolithography” Agnieszka Telecka1; Tao Li1; Sokol Ndoni1; Rafael Taboryski1 1 - Technical University of Denmark
“Photosynthetic photonic crystals structures in plants, lessons for light harvesting devices” Martin Lopez-Garcia1; Matt Jacobs2; O.-P Phrathep2; Tracy Lawson3; Ruth Oulton4; Heather Whitney2 1 - International Iberian Nanotechnology Laboratory; 2 - School of Biological Sciences, University of Bristol (UK); 3 - School of Biological Sciences, University of Essex (UK); 4 - Department of Elect.& Electro. Engin., Univ. of Bristol (UK)
Invited - “Micro/nano devices and systems for biofilm exploration and eradication” Reza Ghodssi University of Maryland, USA
MNE2017
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Wednesday, Sep 20th 11:15
“Scaling up nanoxerography by electrical micro-contact printing for photoluminescent anti-counterfeiting solutions” David Poirot1; Etienne Palleau1; François Guérin1; Thomas Alnasser1; Laurence Ressier1 1 - Université de Toulouse, LPCNO
“Aluminium plasmonics: SERS substrates made of structured polymers and aluminium for detection of early degradation products in modern and contemporary artworks” Manuel Gomez1; Massimo Lazzari1 1 - CIQUS, Research Center for Biological Chemistry and Molecular Materials, Santiago de Compostela University
11:30
“Design, characterization and lithographic application of Si nanocrystals patterns via templated dewetting” Monica Bollani1; Marco Salvalaglio2; Mario Lodari1; Meher Naffouti13; Rainer Backofen2; Thomas Bottein3; Alex Voigt2; Thomas David3; Abdelmalek Benkouider3; Luc Favre3; Antoine Ronda3; Isabelle Berbezier3; Marco Abbarchi3 1 - IFN-CNR; 2 - TU Dresden; 3 - IM2NP -CNRS
“Switching single quantum dot emission in nanophotonic integrated circuits” Leonardo Midolo1; Sofie Lindskov Hansen1; Weili Zhang2; Camille Papon1; Rüdiger Schott3; Arne Ludwig3; Andreas Wieck3; Peter Lodahl1; Søren Stobbe1 1 - Niels Bohr Institute, University of Copenhagen; 2 - Key Laboratory of Optical Fiber Sensing and Communications (Education Ministry of China), University of Electronic Science and Technology of China; 3 - Lehrstuhl für Angewandte Festkörperphysik, Ruhr-Universität Bochum
“A microfluidic-integrated nanopore array for chemical stimulation and electrophysiology of cells” Peter D. Jones1,2; Dieter P. Kern2; Martin Stelzle1 1 - NMI Natural and Medical Sciences Institute at University of Tübingen, Reutlingen, 72770, Germany; 2 - Institute for Applied Physics, University of Tübingen, Tübingen, 72076, Germany
11:45
“Aluminium micromachining in phosphoric acid via through-mask electrochemical micromachining” Tobias Baldhoff1; Volker Nock2; Aaron T. Marshall1 1 - Department of Chemical and Process Engineering, University of Canterbury; 2 - Department of Electrical and Computer Engineering, University of Canterbury
“InGaN-based Nanocolumn Photonic Crystal LEDs Fabricated by Nanotemplate Selective Area Growth” Katsumi Kishino1; Yuzo Matsui1; Jun Yoshida1; Takao Oto1; Koji Yamano1 1 - Sophia University
“A nanofiltration technique for analyte extraction from complex matrix and surface enhanced Raman spectroscopy based sensing” Onur Durucan1; Tomas Rindzevicius1; Michael Stenbaek Schmidt1; Oleksii Ilchenko1; Anja Boisen1 1 - Technical University of Denmark
MNE2017
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Wednesday, Sep 20th 12:00
Invited - “OSTEMERs – New opportunities for micro- and nanostructuring” Wouter van der Wijngaart KTH Royal Institute of Technology, Sweden
12:15
“Fabrication of chip-scale single-photon sources for quantum technologies Søren Stobbe1; Leonardo Midolo1; Irina Kulkova2; Tommaso Pregnolato1; Nicolas Taba1; Toke Lund-Hansen2 1 - Niels Bohr Institute, University of Copenhagen; 2 - Sparrow Quantum A/S
“Fabrication of solid-state nanoporous membranes made of amorphous carbon and SiO2 with high aspect-ratio nanopores” Stefano Varricchio1; Arnaud Bertsch1; Philippe Renaud1 1 - École Polytechnique Fédérale de Lausanne EPFL
“InGaAs/GaAs multi-quantum-well core-shell nanowires for optoelectronic applications” Suzanne Lancaster1; Donald Macfarland1; Mattia Capriotti1; Aaron Maxwell Andrews1; Werner Schrenk1; Gottfried Strasser1; Hermann Detz2 1 - TU Wien; 2 - Austrian Academy of Sciences
“Microfluidic Reactors for Nanotechnology: Highly Controlled Synthesis of Spiky Gold Nanoparticles in Microdroplets” Sara Abalde-Cela3,4; Patricia Taladriz-Blanco1,2; Chris Abell3 1 - Univ Estadual Campinas, UNICAMP; 2 - Institut für Mikrotechnik (IMT); 3 - Department of Chemistry, University of Cambridge; 4 - International Iberian Nanotechnology Laboratory (INL)
SESSION 4C
LUNCH
Lunch
12:30 - 13:30
Lunch at INL
SESSIONS
SESSION 2C Room A / Parallel Session
SESSION 3C
Topic: 2. Fabrication and Integration of Micro/Nano
Topic: 3. Micro/Nano Engineering for Physical and
Topic: 4. Micro/Nano Engineering for the Life Scienc-
Chemical Applications
es
Sub-topics: 3.2. Energy
Sub-topics: 4.3. Micro and Nano Fluidic Systems
13:30 - 15:00
Structures, Devices and Systems
Sub-topics: 2.1. Fabrication & Integration of Micro/Nano Electronic Devices
Room B / Parallel Session
Room C / Parallel Session
and Their Fabrication,
4.4. Applications of Micro and Nano Engineeried Fluidic Systems for Life Sciences
MNE2017
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Wednesday, Sep 20th 13:30
Invited - “Engineering and Processing of 10 nm 3D structures for FET applications” Lars-Erik Wernersson Lund University, Sweden
13:45
“Micro Solid Oxide Fuel Cells, towards a new generation of miniaturized portable power sources” Nerea Alayo1; Tammy Leung1; Iñigo Garbayo1; Francesco Chiabrera1; Marc Salleras2; Alex Morata1; Luis Fonseca2; Albert Tarancón1 1 - IREC (Institut de Recerca en Energia de Catalunya); 2 - Institut de Microelectrònica de Barcelona (IMB-CNM, CSIC)
“Modeling the pre-invasive breast cancer microenvironment using high-throughput microfluidic cell encapsulation” Jelle Jan Freerk Sleeboom1,2,3; Cecilia M. Sahlgren2,3,4; Jaap M. J. Den Toonder1,3 1 - Microsystems, Eindhoven University of Technology; 2 - Soft Tissue Engineering & Mechanobiology, Eindhoven University of Technology; 3 - Institute for Complex Molecular Systems, Eindhoven University of Technology; 4 - Åbo Akademi University, Finland
“One-Step Anodization Synthesis of Ti-Nb-Ta-Zr-O Nanotubes Arrays for Photoelectrochemical Water Oxidation” Yi-Hsuan Chiu1,2; Chun-Yi Chen1,3; Mitsuo Niinomi4; Tso-Fu Mark Chang1,3; Yung-Jung Hsu2; Nobuhiro Matsushita1; Masato Sone1,3 1 - Tokyo Institute of Technology, Japan; 2 - National Chiao Tung University, Hinschu, Taiwan; 3 - CREST JST, Japan; 4 - Tohoku University, Japan
“Lab on-Chip for Bacteria Capture, Lysis and DNA Amplification Addressing Foodborne Pathogens” 1; Georgia Kaprou2; Angeliki Tserepi1; Evangelos Gogolides1 1 - Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”; 2 - Nanoplasmas P.C. Τechnology Park “Lefkippos”, NCSR “Demokritos”; 2 - Institute of Nanoscience and Nanotechnology, NCSR “Demokritos”
14:00
“Room Temperature Double Quantum Dots in Silicon Point-Contact SETs” Zahid Durrani1; Mervyn Jones1; Chen Wang1; Dixi Liu1; Vlad-Petru Veigang-Radulescu1; Jonathan Griffiths2 1 - Imperial College London; 2 - University of Cambridge
“Novel fabrication method of highly porous polymer-based triboelectric nanogenerators via microwave irradiation” Shin Jang1; Samgon Lee1; Je Hoon Oh1 1 - Hanyang University
“A Lab-in-a-foil microfluidic reactor based on phaseguiding” Eriksen Johan1; Julien Schira2; Nadine Vincent2; Celine Sabatel3; Anders Kristensen1; Rodolphe Marie1 1 - DTU Nanotech, Technical University of Denmark; 2 - Fasteris SA, Switzerland; 3 - Diagenode SA, Belgium
14:15
“Room-temperature single electron transistors fabricated by field-emission scanning probe lithogra-
“Magnetoelastic Vibrational Energy Harvester with Enhanced Robustness”
“Automated rolling circle amplification and optomagnetic product detection in an injection molded MNE2017
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Wednesday, Sep 20th phy and cryogenic plasma etching” Claudia Lenk1; Marcus Kaestner1; Yana Krivoshapkina1; Diana Nechepurenko1; Martin Hofmann1; Burkhard Volland1; Tzvetan Ivanov1; Steve Lenk1; Mathias Holz2; Ahmad Ahmad1; Tihomir Angelov1; Ivaylo Atanasov1; Alexander Reum1; Zahid Durrani3; Mervyn Jones3; Chen Wang3; Dixi Liu3; Ivo Rangelow1 1 - Dept. Micro- und Nanoelectronic Systems, Technische Universität Ilmenau; 2 - Nano Analytik GmbH; 3 - Department of Electrical and Electronic Engineering, Imperial College London
Lucia R. Alcala Jimenez1; Thommas Passer Jensen1; Erik V. Thomsen1 1 - DTU Nanotech
all-polymer chip – Optimization of amplification temperature” Francesca Garbarino1; Gabriel Khose Antonio Minero1; Jeppe Fock1; Giovanni Rizzi1; Felix Neumann2; Narayanan Srinivasan2; Pavan Asalapuram2; Mats Nilsson2; Mikkel Fougt Hansen1 1 - Technical University of Denmark; 2 - Stockholm University
14:30
“Protective molecular passivation of black phosphorous” Vlada Artel1; Qiushi 2; Raimond Gasper3; Hagai Cohen5; Ashwin Ramasubramaniam4; Fengnian Xia2; 6 1 - Faculty of Engineering, Bar-Ilan University, Israel; 2 - Department of Electrical Engineering, Yale University; 3 - Department of Chemical Engineering, University of Massachusetts; 4 - Department of Mechanical and Industrial Engineering, University of Massachusetts; 5 - Department of Chemical Research Support, Weizmann Institute of Science, Israel; 6 - Faculty of Engineering, BarIlan University, Ramat-Gan, Israel
Invited - “Micro energy conversion and storage based on nanomaterials” Xiaohong Wang Tsinghua University, China
“Single-cell trapping by passive pumping using NOA81 replica molded stencils” Emma Moonen1; Regina Luttge1; Jean-Philippe Frimat1 1 - Microsystems, Department of Mechanical Engineering, Eindhoven University of Technology
14:45
“Ion Beam Planarization techniques optimized for the nanofabrication of Magnetic Tunnel Junction Nanopillar Devices” Mohammad Tarequzzaman1; Leandro Martins2; Jose Diogo Costa1; Jerome Borme1; Francis
“An optimized droplet split designed for acoustic intra-droplet particle enrichment” Anna Fornell1; Mathias Ohlin2; Johan Nilsson1; Maria Tenje2 1 - Lund University; 2 - Uppsala University MNE2017
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Wednesday, Sep 20th Leonard Deepak1; Elvira Paz1; João Ventura2; Ricardo Ferreira1; Paulo Freitas1 1 - INL-International Iberian Nanotechnology Laboratory (INL); 2 - IFIMUP-IN, Porto POSTER
Poster
15:00 - 15:15
Invited Poster Pitch 2 - 10 posters
COFFEE BREAK
Coffee Break
15:15 - 17:00
Coffee Break / Exhibition Poster Session 2
SESSIONS 17:00- 18:30
SESSION 1D
Room A / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrica-
WORKSHOP
Room B / Parallel Session
Workshop
SESSION 4D
Room C / Parallel Session
Topic: 4. Micro/Nano Engineering for the Life
tion Methods and Processes
Sciences
Sub-topics: 1.6. Resists and Materials
Sub-topics: 4.5. Design and Fabrication of Micro/Nano Devices for Life Sciences: Biosensors, Prosthesis
17:00
“Cr2O3 – A New and Flexible Material for Nanofabrication” J. Alexander Liddle1; B. Robert Ilic1; Christopher Ray1; Kerry Seibein1 1 - Center for Nanoscale Science and Technology, National Institute of Standards and Technology
17:00
“Atlas 46 – novel negative tone photoresist which combines the good properties of the established SU-8 and CAR 44” Tobias Mai1; Matthias Schirmer1; Georg Schmidt2; Maik Gerngroß1; Frank Syrowatka3;
“Scientific Communication in Society” Elisabeth Nilsson (Lund University)
“Effect of water-DNA interactions on elastic properties of DNA self-assembled monolayers” Daniel Ramos1; Carmen M. Dominguez1; Javier Tamayo1; Montserrat Calleja1 1 - CSIC
“Miniaturized localized surface plasmon resonance shift sensor integrated on a gradient index lens in a microfluidic channel” Andreas Horrer1; Jonas Haas1; Dieter P. Kern1; MNE2017
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Wednesday, Sep 20th Katrin Lehmann2 1 - Allresist GmbH; 2 - Institut für Physik, Martin-Luther Universität Halle-Wittenberg; 3 - Interdisziplinäres Zentrum für Materialwissenschaften, Martin-Luther Universität Halle-Wittenberg
Monika Fleischer1 1 - Institute for Applied Physics, Eberhard Karls University Tübingen, Germany
W orkshop: “Scientific Communication in Society” Elisabeth Nilsson (Lund University)
17:30
“Organic ice resists: condensed small molecules as spin-free volatile e-beam resists” William Tiddi1; Hoa Thanh Le1; Anna Elsukova1; Marco Beleggia1; Anpan Han1 1 - DTU Danchip-CEN, Technical University of Denmark
“Microcontainers for oral vaccine delivery” Line Hagner Nielsen1; Christoffer Von Halling Laier1; Zarmeena Abid1; Stephan Sylvest Keller1; Anja Boisen1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Department of Micro- and Nanotechnology, Technical University of Denmark
17:45
“Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning” Boon Teik Chan1; Jean-François De Marneffe1; Martin Spieser2; Armin Knoll3; Werner Knaepen4 1 - imec; 2 - SwissLitho AG; 3 - IBM Research Zurich; 4 - ASM International
“Rapid micro fluorescence in situ hybridization for chromosomal interrogation of tissues“ Deborah Huber1; Nadya Ostromohov2; Govind V. Kaigala1 1 - IBM Research Zurich; 2 - Technion – Israel Institute of Technology
18:00
Invited - “Amphiphilic polymeric networks as a tool for the design of new functional materials” Cristina Hoppe INTEMA, Argentina
“Split ring resonators for detection of circulating tumor cells through variation of capacitive properties” Angelo Leo1,2; Anna Grazia Monteduro3; Maria Serena Chiriacò2; Elisabetta Primiceri2; Giuseppe Maruccio1,2 1 - Dipartimento di Matematica e Fisica, Università del Salento; 2 - CNR Nanotec - Istituto di Nanoscienze; 3 - IRCCS de Bellis MNE2017
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Wednesday, Sep 20th “Stretched polycarbonate nanopillars for high efficient capture of bladder epithelial cancer cells” Yi-Jui Chen1; Yi-Chun Chiu2; Shang-Hui Yu1; Chih-Chia Huang1; Chun-Hung Lin1; Wen-Huei Chang3 1 - Department of Photonics, National Cheng Kung University; 2 - Division of Urology, Department of Surgery, Zhong Xiao Branch, Taipei City Hospital; 3 - Department of Applied Chemistry, National Pingtung University
17:30
BREAK
Break
18:30 - 18:45
Break
TRANSFER
Transfer to Conference Dinner Location
18:45 - 20:00
Transfer from INL to Conference Dinner Location
CONFERENCE
Conference Dinner
DINNER
Conference Dinner at Real Companhia Velha (V.N. Gaia)
20:00- 22:45
Incl. announcement of poster and µngraph awards
TRANSFER
Transfer from Dinner Location
22:45- 23:45
Transfer from Dinner Location
MNE2017
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Thursday, Sep 21st PLENARY TALK
Plenary Talk
9:00 - 9:45
Andreas Manz (KIST Europe, Germany) - MNE fellow recipient – “Lab on chip” – biomimetic channel networks
SESSIONS
SESSION 1E Room A / Parallel Session
SESSION 2D
Topic: 1. Novel Developments in Nano/Micro Fab-
Topic: 2. Fabrication and Integration of Micro/Nano
rication Methods and Processes
Structures, Devices and Systems
Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics 4.6: Interfacing Biomaterials and
Sub-topics 1.6: Resists and Materials
Sub-topics 2.1: Fabrication & Integration of
Bio-Entities with Devices and Systems
9:45 - 10:30
Room B / Parallel Session
SESSION 4E
Room C/ Parallel Session
Micro/Nano Electronic Devices 9:45
“Direct Patterning of Functional Zinc Sulfide on a Sub-10 nm Scale via Electron Beam Lithography” Mohammad S. M. Saifullah1; Mohamed Asbahi1; Maryam Binti-Kamran Kiyani1; Sudhiranjan Tripathy1; Esther A. H. Ong2; Asadullah Ibn Saifullah3; Hui Ru Tan1; Tanmay Dutta4; Ramakrishnan Ganesan5; Suresh Valiyaveettil2; Karen S. L. Chong1 1 - Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology, and Research); 2 - Department of Chemistry, National University of Singapore; 3 - Hills Road Sixth Form College, Cambridge; 4 - Department of Electrical and Computer Engineering, National University of Singapore; 5 - Department of Chemistry, Birla Institute of Technology & Science, Pilani, India
“Practical steps towards wafer-scaled III-V vertical FETs fabrication by means of plasma etching” Alexey Milenin1; Anabela Veloso1; Nadine Col-
“Invited - Computation with biological agents” Dan Nicolau McGill University, Canada
laert1; Daniele Piumi1 1 - IMEC
MNE2017
16
Thursday, Sep 21st 10:00
10:15
“Healing effect of controlled anti-electromigration on conventional and high-Tc superconducting nanowires” Xavier D. A. Baumans1; Joseph Lombardo1; Jérémy Brisbois1; Shaw Gorky1; Vyacheslav S. Zharinov2; Ge He3; Heshan Yu3; Jie Yuan3; Beiyi Zhu3; Kui Jin3; Roman B. G. Kramer4,5; Joris Van De Vondel2; Alejandro V. Silhanek1 1 - Experimental Physics of Nanostructured Materials, Q-MAT, CESAM, Université de Liège; 2 - INPAC – Institute for Nanoscale Physics and Chemistry, Department of Physics and Astronomy, K. U. Leuven, Belgium; 3 - National Laboratory for Condensed Matter Physics, Institute of Physics Chinese Academy of Sciences, China; 4 - Université Grenoble Alpes, Institut NEEL; 5 CNRS, Institut NEEL, Grenoble
“Exploring strategies to contact 3D nano-pillars below 100 nm”
“Investigation of the protective coating Electra 92 for electron-beam lithography on dielectrics” Katharina Goth1; Aina Quintilla1; Silvia Diewald1; Gernot Goll1 1 - Center for Functional Nanostructures – Nanostructure Service Laboratory (CFN-NSL), Karlsruhe Institute of Technology (KIT), Germany
“Self-aligned Gate-last Process for Quantum-well InAs Transistor on Insulator”
“Nanofabrication of Bacterial Biocomputation Networks”
Qi Cheng1; Zilun Wang1; Kazy Shariar1; Sufi Md
Falco Van Delft1; Anja Van Langen-Suurling2;
Abu1; Sourabh Khandelwal2; Yuping Zeng1
Charles De Boer2; Frank Dirne2; Ayyappasamy
1 - University of Delaware; 2 - Macquarie
Sudalaiyadum Perumal3; Sara Kheireddine3; Saba
University
Roozbahani3; Viola Tokárová3; Ondřej Kašpar3;
Esteve Amat1; Marta Fernandez-Regulez1; Laura Evangelio1; Ahmed Gharbi2; Cyrille Laviron2; Joan Bausells1; Francesc Perez-Murano1 1 - IMB-CNM; 2 - CEA-Leti
Dan Nicolau3 1 - Nanovalk, Valkenswaard; 2 - Kavli Nanolab, Delft; 3 - McGill University, Montreal
COFFEE BREAK
Coffee Break
10:30 - 11:00
Coffee Break / Exhibition
MNE2017
17
Thursday, Sep 21st SESSIONS 11:00 - 12:30
SESSION 2E Room A / Parallel Session
SESSION 3D
Topic: 2. Fabrication and Integration of Micro/Nano
Topic: 3. Micro/Nano Engineering for Physical and
Structures, Devices and Systems
Sub-topics 2.3: Inspection, Process Control &
Room B / Parallel Session
Chemical Applications
Sub-topics 3.3: Physical and Chemical Sensors
SESSION 4F
Room C / Parallel Session
Topic: 4. Micro/Nano Engineering for the Life Sub-topics: 4.5. Micro/Nano Devices for Life Sciences: Biosensors, Prosthesis;
4.6. Interfacing Biomaterials and Bio-Entities
Manufacturing Testing
with Devices and Systems “Laterally resolved in-situ 4D topography of electrochemical etching by Digital Holographic Microscope” Shenqi Xie1; P.-F. Chauvy2; Jerome Parent1; Yves Emery1 1 - Lyncée Tec SA, Lausanne; 2 - Micropat SA, Lausanne
“Collective nano-optomechanics for sensing applications” Eduardo Gil-Santos1; William Hease2; Aristide Lemaitre3; Labousse2; Cristiano Ciuti2; Ivan Favero2 1 - Instituto de Microelectronica de Madrid; 2 Universite Paris Diderot; 3 - Centre de Nanosciences et Nanotechnologies
11:15
“Advanced defect classification by optical metrology” Paul Alkemade1; Esther Kramer1; Silvania Pereira1; Peter Van Der Walle2; Wouter Mulckhuyse2; Jacqueline Van Veldhoven2; Loek Nijsten2; Anton De Jong2; Christiaan Hollemans2; Elfi Van Zeijl2; Helma Spruit2; Emile Van Veldhoven2; Jacques Van Der Donck2; Felipe Bernal Arango2; Diederik Maas2 1 - Delft University of Technology; 2 - TNO
“Effect of varying gate distance on the threshold voltage shift in carbon nanotube field effect transistor gas sensors” Sebastian Eberle1; Cosmin Roman1; Christofer Hierold1 1 - ETH Zürich, D-MAVT, Micro- Nanosystems
11:30
“3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB” Takeyoshi Ohashi1; Atsuko Yamaguchi1; Kazuhisa Hasumi2; Masami Ikota2; Chi Lim Tan3; Tom
“Hysteresis characteristics of nanoFET sensor with a floating gate by the sweep of backgate voltage” Kook-Nyung Lee1; Sumi Yoon1; Dong-Ki Hong1;
11:00
Invited - “How to interface the brain with MEMSbased implants” Patrick Ruther University of Freiburg, Germany
“High density, multifunctional neural probes for massively parallel read out and control” Vittorino Lanzio4; Stefano Cabrini4; Simone SasMNE2017
18
Thursday, Sep 21st Raymaekers3; Geert Van Den Bosch3; Arnaud Furnémont3; Gian Lorusso3 1 - Hitachi, Ltd.; 2 - Hitachi High-Technologies Corporation; 3 - imec
In-Bok Jung1; Yung-Jae Won1; Wookyeong Seong1 1 - Korea Electronics Technology Institute (KETI)
solini4; Melanie West4; Scott Dhuey4; Alexander Koshelev1; Paolo Micheletti4; Raquel Lambert4; Hillel Adesnik2; Gregory Telian2; Peter Denes3 1 - A Beam Technologies; 2 - UC Berkeley, Life Sciences; 3 - ALS, Lawrence Berkeley National Laboratory; 4 - Molecular Foundry, Lawrence Berkeley National Laboratory
11:45
“Extracting Height Information from Top-Down SEM Images through Monte-Carlo Simulation” Kerim T. Arat1; Cornelis W. Hagen1; Jens Bolten2; Nezih Ünal3 1 - Delft University of Technology; 2 - AMO GmbH; 3 - GenISys GmbH
“Highly sensitive GaN based hydrogen sensors using nanostructure sensing materials” Sunwoo Jung1; Kwang Hyeon Baik2; Fan Ren3; Stephen Pearton3; Soohwan Jang1 1 - Dankook University; 2 - Hongik University; 3 University of Florida
“Direct Laser Writing of tapered optical fibers for spatial selective control of neural activity” Alessandro Rizzo1; Enrico Domenico Lemma1; Leonardo Sileo1; Marco Pisanello1; Filippo Pisano1; Massimo De Vittorio1; Ferruccio Pisanello1 1 - Instituto Italiano di Tecnologia (IIT), Center for Biomolecular Nanotechnologies
12:00
12:15
“Establishing Nanoimprint Lithography on an Industrial Level” Hubert Teyssedre1; Martin Eibelhuber2; Stefan Landis1; Sandra Bos1; Laurent Pain1; Marie Laure2; Jonas Khan2; Christine Thanner2; Gerald Mittendorfer2; Markus Wimplinger2 1 - CEA-LETI; 2 - EV Group E.Thallner GmbH, Austria
“The 2017 EIPBN Best Invited Poster - Aberration-Corrected Quantum Electron Microscopy” M. Turchetti, C-S. Kim, R. G. Hobbs, N. Abedzadeh, K. K. Berggren Research Laboratory of Electronics, Massachusetts Institute of Technology
“Lithography-free gold capped fused silica nanostructures as dual functionality sensor for electrochemical and SERS based detection” Kuldeep Sanger1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Department of Micro- and Nanotechnology, Technical University of Denmark
“Brain-inspired nano-optoelectronic circuits for
“FM accelerometer design based on thermal-piezoresistive amplification” Cláudia Coelho1,2; João Gaspar2; Luís Rocha1,2 1 - CMEMS-UM, University of Minho; 2 - International Iberian Nanotechnology Laboratory
“o-Phenylenediamine-based Molecularly Imprinted
neuromorphic computing” Bruno Romeira1; Julien Javaloyes2,3; José Figueiredo1 1 - Center for Electronics Optoelectronics and Telecomunications (CEOT), Department of Physics, Universidade do Algarve, Campus de Gambelas, 8005-139, Faro, Portugal; 2 - ; 3 - Departament de Física, Universitat de les Illes Baleares
Layer for Multi-Analyte Neurotransmitter Sensing” Bo Si1; Edward Song1 1 - University of New Hampshire MNE2017
19
Thursday, Sep 21st LUNCH
Lunch
12:30 - 13:30
Lunch at INL
SESSIONS
SESSION 1F Room A / Parallel Session
SESSION 3E Room A / Parallel Session
SESSION 4G Room A / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrica-
Topic: 3. Micro/Nano Engineering for Physical and
tion Methods and Processes
Chemical Applications
Sub-topics: 1.4. Scanning Probe Lithography
Sub-topics: 3.4. Optics and Photonics
Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics: 4.5. Design and Fabrication of Mi-
13:30 - 15:00
cro/Nano Devices for Life Sciences: Biosensors, Prosthesis
“Fabrication of high resolution nano-devices by thermal scanning probe lithography” Yu Kyoung Ryu1; Colin Rawlings2; Martin Spieser2; Heiko Wolf1; Urs Duerig2; Zahid Durrani3; Mervyn Jones3; Sajedeh Manzeli4; Andras Kis4; Armin Knoll1 1 - IBM Zurich Research Laboratory; 2 SwissLitho; 3 - Imperial College London; 4 - EPFL Lausanne
“Accurate and automated fabrication of coupled gaussian microcavities using closed loop thermal Scanning Probe Lithography” Colin Rawlings1 :: Martin Spieser2 :: Darius Urbonas1 :: Thilo Stoeferle1 :: Rainer Mahrt1 :: Armin Knoll1 1 - IBM Research - Zurich :: 2 SwissLitho AG
13:45
“Sub-20 nm patterning of thin layer WSe2 by scanning probe lithography” Arancha I. Dago1; Yu Kyoung Ryu1; Ricardo Garcia1 1 - Instituto de Ciencia de Materiales de Madrid (CSIC)
“Micro-moirés combining metallic patterns and micro-lenses” Thomas Walger1 :: Juergen Brugger1 :: Roger Hersch2 :: 1 - Microsystems Laboratory, EPFL, Lausanne; 2 School of Computer and Communication Sciences, EPFL, Lausanne
14:00
“Atomic force microscopy as a tool for nanoscience, top-down fabrication and nanomechanicanical characterization”
“Integration of tunable liquid crystal microcells on 1.55µm photodetector arrays using nanoimprint technology”
13:30
Invited - “Multi-functional 3D scaffolds for organon-a-chip developments” Jenny Emneus Technical University of Denmark
“3D microdevice for the in vivo trapping of cancer-associated circulating cells” Alejandro Kayum Jiménez Zenteno1 :: Aurore EsMNE2017
20
Thursday, Sep 21st Matteo Lorenzoni1; Francesc Perez-Murano1; Laura Evangelio1; Steven Gottlieb1; Jordi Llobet2 1 - IMB-CNM; 2 - International Iberian Nanotechnology Laboratory
Benattou Sadani1 :: Benjamin Boisnard1 :: Thierry Camps1 :: Jean-Baptiste Doucet1 :: Véronique Bardinal1 :: Christophe Levallois2 :: Cyril Paranthoen2 :: Sophie Bouchoule3 :: Laurent Dupont4 1 - CNRS, LAAS, Univ de Toulouse; 2 - UMR FOTON, CNRS, INSA de Rennes, Université de Rennes; 3 - Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay; 4 - IMT Atlantique Technopôle Brest-Iroise
teve1 :: Hélène Cayron1,2 :: Sylvain Sanson3 :: Charline Blatché1 :: Christophe Vieu1 :: Bernard Malavaud3 :: Aline Cerf1 1 - LAAS-CNRS, Université de Toulouse; 2 - Innopsys; 3 - Department of Urology, Hôpital de Rangueil
14:15
“High-resolution thermal scanning probe lithography on silk fibroin as a fully water-based resist” Samuel Tobias Zimmermann1; Ya Wang1; Xiaosheng Zhang1; Juergen Brugger1 1 - Microsystems Laboratory, École Polytechnique Fédérale de Lausanne
“Light-driven reconfigurable GRIN optical element” Angelo Angelini1 :: Federica Pirani1,2 :: Francesca Frascella1 :: Emiliano Descrovi1 1 - Department of Applied Science and Technology (DISAT), Politecnico di Torino; 2 - Center for Space Human Robotics@Polito, Istituto Italiano di Tecnologia (IIT), Torino
“Fabrication of Three Dimensional Microelectrode Arrays with Carbon Nanotube Electrodes for in-vitro Investigation of Tissue Slices and 3D Cell Cultures” Lisa Kollmannthaler1 :: Pranoti Kshirsagar1 :: Stefan Klaus1 :: Gerhard Heusel1 :: Claus J. Burkhardt1 1 - NMI Natural and Medical Sciences Institute at the University of Tübingen, Reutlingen
14:30
Invited - “Probing emergent phenomena through large-scale atom manipulation” Sander Otte Delft University of Technology
“Sub-micron High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium” Joan Vila Comamala1 :: Lucia Romano2 :: Vitaliy Guzenko2 :: Mathias Kagias2 :: Konstantins Jefimovs2 :: Stampanoni Marco2 1 - ETH Zurich; 2 - Paul Scherrer Institut
“Two-photon Lithography Fabrication of 3D Stiffness-gradient Microscaffolds for Cancer Cell Invasiveness Studies” Enrico Domenico Lemma1 :: Barbara Spagnolo1 :: Francesco Rizzi1 :: Sara Sergio1 :: Marco Pisanello1 :: Massimo De Vittorio1 :: Ferruccio Pisanello1 1 - Istituto Italiano di Tecnologia, Center for Biomolecular Nanotechnologies
“Use of EBL, Dot-Matrix and DLW for fabrication of true color rainbow hologram, OVD, micro-nanooptics... designed by s/w “RainBow”
“Blister-Actuated Laser Induced Forward Transfer as a novel immobilisation approach for biosensor
14:45
activation” MNE2017
21
Thursday, Sep 21st
COFFEE BREAK
Coffee Break
15:00 - 15:30
Coffee Break / Exhibition
SESSIONS
SESSION 1G
15:30 - 16:30
Room A / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes
Sub-topics: 1.5: Pattern Transfer
Maxim Knyazev1 :: Alexander Svintsov1 :: Sergey Zaitsev1 :: Nazim Gusseinov1 :: Maratbek Gabdullin2 1 - Institute of microelectronics technology RAS; 2 - Al-Farabi Kazakh National University, Almaty, Kazakhstan
Lars Hecht1; Korbinian Rager1; Patricia Weber2; Andreas Dietzel1 1 - Technische Universität Braunschweig - Institute of Microtechnology; 2 - University of Tübingen – Institute for Physical and Theoretical Chemistry
SESSION 2F
Industrial Session
Room B / Parallel Session
Room C / Parallel
Topic: 2. Fabrication and Integration of Micro/Nano Structures, Devices and Systems
Sub-topics: 2.4: Smart System Design & Integration
15:30
15:45
“Easy alignment strategy for multi-level patterning” Aurore Estève1; Xavier Dollat1; Charline Blatché1; Aline Cerf1 1 - LAAS-CNRS, Université de Toulouse, CNRS, INSA, UPS, Toulouse, France
“Microfabrication strategies for magnetic nanoparticle manipulation on continuous bio-flows” Vania Silverio1; Maria J. López-Martínez1; João Gaspar2; Susana Cardoso De Freitas1; Paulo P. Freitas1,2 1 - Institute for Systems Engineering and Computers—Microsystems and Nanotechnologies (INESC-MN); 2 - International Iberian Nanotechnology Laboratory (INL)
“3D free forms in c-Si via gray-scale lithography and RIE” Isman Khazi1; Ulrich Mescheder1; Uma Maragatham Muthiah1
“SAW and EIS biosensors for environmental particulate monitoring” Maria Serena Chiriacò1; Silvia Rizzato1,2; Sandro Spagnolo2; Angelo Leo1,2; Giuseppe Maruc-
Industrial Session Presentations / Match Making / Exhibition
MNE2017
22
Thursday, Sep 21st
16:00
16:15
1 - Institute for Microsystem Technology, Furtwangen University
cio1,2 1 - CNR NANOTEC - Institute of Nanotechnology, 73100 Lecce, Italy; 2 - University of Salento, Dpt of Mathematics and Physics, via per Monteroni, 73100, Lecce
“Barium fluoride etch masks for dry etching applications” Valentin Mueller1; Jonas Strunz1; Tatjana Borzenko1; Johannes Kleinlein1; Laurens W. Molenkamp1 1 - Physikalisches Institut der Universitaet Wuerzburg, Wuerzburg, 97074, Germany
“Highly linear three-axial microprobing system built from orthogonally mounted silicon parallelogram linkages” David Metz1; Justin Chaillot1; Andreas Dietzel1 1 - TU Braunschweig, Institute of Microtechnology, Braunschweig, 38124, Germany
“Wide Area Plasmonic Colours by Nanoimprinted Lithography in Plastic Substrates” Keith Morton1; Teodor Veres1 1 - National Research Council Canada
“Thermal treatment for enhanced performance of NPDS(Nano Particle Deposition System) to fabricate large scale(1 m x 1 m) electrochromic windows” Jisoo Kim1; In-Gyu Choi1; Samuel Park1; Sung-Ik Park1; Doo-Man Chun2; Caroline S. Lee3; SungHoon Ahn1; Won-Shik Chu4 1 - Department of Mechanical and Aerospace Engineering, Seoul National University; 2 - School of Mechanical Engineering, University of Ulsan; 3 - Department of Materials Engineering, Hanyang University; 4 - Institute of Advanced Machinery and Design, Seoul National University
COFFEE BREAK
Coffee Break
16:30 - 17:00
Coffee Break / Exhibition
Industrial Session Presentations / Match Making / Exhibition
MNE2017
23
Thursday, Sep 21st SESSIONS 17:00 - 18:30
SESSION 1H
Room A / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes
Sub-topics: 1.7: Bottom-Up Methods
17:00
Invited - “Applications of smart monomolecular films in IC microelectronics for organic-inorganic interface engineering” Silvia Armini IMEC, Belgium
Room A / Parallel Session
Topic: 2. Fabrication and Integration of Micro/Nano
SESSION 4H
Room A / Parallel Session
Structures, Devices and Systems
Topic: 4. Micro/Nano Engineering for the Life Sciences Sub-topics: 4.5: Design and Fabrication of Mi-
Sub-topics: 2.5: Packaging Technology & Reli-
cro/Nano Devices for Life Sciences: Biosensors,
ability
Prosthesis
“Surface-modified Scalable Silicon Heat Sink Technology for Electronics Cooling” Yichi Zhang1; Nicolas Green1; Shinichi Saito1; Yoshishige Tsuchiya1 1 - University of Southampton Nano Group
“Invited - Quantum dots for nanobioimaging and diagnostics” Beate Santos Universidade Federal de Pernambuco, UPFE, Brazil
“Mechanical production of thin electro-optical membranes” Nadege Courjal1; Florent Behague1; Alexis Caspar1; Ludovic Gauthier-Manuel1; Anthony Pérignon1; Venancio Calero1; Gwenn Ulliac1; Miguel Suarez1; Maria-Pilar Bernal1 1 - FEMTO-ST institute, Univ. Bourgogne Franche
17:15
17:30
SESSION 2G
“DNA-Protein Self-Assemblies for Bigger, Better Nanostructures” J. Alexander Liddle1; Veronika Szalai1; Daniel Schiffels2 1 - Center for Nanoscale Science and Technology, National Institute of Standards and Technology; 2 - Maryland NanoCenter, University of Maryland
Invited - “Stretching fan-out wafer level packaging to new limits and markets” Andre Cardoso Nanium, Portugal
“Drug loaded polymer microneedles fabricated by hot embossing” Thor Emil Andersen1; Alina Joukainen Andersen1; Ritika Singh Petersen1; Line Hagner Nielsen1; Stephan Sylvest Keller1 1 - The Danish National Research Foundation and Villum Foundation’s Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics (IDUN), Department of Micro- and Nanotechnology, Technical University of Denmark MNE2017
24
Thursday, Sep 21st 17:45
“Diblock on Diblock Copolymers for In Situ-Directed Self-Assembly and Multilayer Masking” Sozaraj Rasappa1 1 - Tampere University of Technology
18:00
“Lithographically Templated Organization of Nanodumbbells” Avichai Marcovici1; Guillaume Le Saux2; Pazit Rukenstein2; Taleb Mokari2; Mark Schvartzman2 1 - Ben_Gurion University of the Negev; 2 Ben-Gurion University of the Negev
“A method to alleviate hot spot problem in 3D IC” Ligang Hou1; Tongyang Ye1; Qiming Luo1; Jingyan Fu2; Jinhui Wang2 1 - VLSI and System Lab, Beijing University of Technology, Beijing; 2 - Department of Electrical and Computer Engineering, North Dakota State University
“Nanoparticle Assembly: Controlling Topography and Capillary Forces at the Nanoscale to Build Functional Devices” Valentin Flauraud1; Massimo Mastrangeli2; Gabriel D. Bernasconi3; Jeremy Butet3; Duncan T.L. Alexander4; Elmira Shahrabi1; Olivier J.F. Martin3; Juergen Brugger1 1 - Microsystems Laboratory, (EPFL) Ecole Polytechnique Federale de Lausanne; 2 - Department of Bio, Electro and Mechanical Systems, Université Libre de Bruxelles; 3 - Nanophotonics and Metrology Laboratory, École Polytechnique Fédérale de Lausanne; 4 - Interdisciplinary Center for Electron Microscopy, École Polytechnique Fédérale de Lausanne
“A Prediction Methodology of Reliability Test Result Using Wafer Test Pattern Classification in DRAM” Beomjun Kwon1,2; Jee-Hyong Lee1; Hyungsin Kwon2; Heeil Hong2; Hongsun Hwang2; Kangyong Cho2; Sungjin Jang2 1 - Sungkyunkwan Univ.; 2 - Samsung Electronics Co. Ltd.
18:15
“Biosensing with Graphene Field-Effect Transistors” Jerome Borme1; Rui Campos1; Elisabete Fernandes1; George Machado Jr.1,2; Patricia D. Cabral1,2; Maria F. Cerqueira2; Pedro Alpuim1,2 1 - International Iberian Nanotechnology Laboratory (INL); 2 - Department of physics, University of Minho
Invited - Nanomechanics for the life sciences Montserrat Calleja Microelectronics Institute of Madrid, CSIC, Spain
MNE2017
25
Thursday, Sep 21st SPECIAL SESSIONS 18:30 - 20:00
Lab Tours
Industrial Session
Lab tours to INL flagship facilities Refreshments
Room B / Parallel
QIL and IP Session
Room C / Parallel
Industrial Session Presentations / Match Making / Exhibition
Quality, Innovation, Legal and IP Session V
BARBECUE
Exhibitors / Sponsors Barbecue
20:00 - 22:00
Exhibitors / Sponsors Barbecue (only for exhibitors/sponsors)
MEETING
Young people meeting
22:00 - 23:45
Young people meeting
MNE2017
26
Friday, Sep 22nd PLENARY TALK
Plenary Talk
9:00 - 9:45
Naomi Halas (Rice University, USA) - Plasmonics for Sustainability
SESSIONS
SESSION 1I
9:45 - 10:30
Room A / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrication Methods and Processes
Sub-topics: 1.8: Other (Printing I)
SESSION 2H
Room A / Parallel Session
SESSION 3F
Room A / Parallel Session
Topic: 2. Fabrication and Integration of Micro/Nano
Topic: 3. Micro/Nano Engineering for Physical and
Structures, Devices and Systems
Chemical Applications
Sub-topics: 2.1: Fabrication & Integration of
Sub-topics: 3.5: Nanomagnetism
Micro/Nano Electronic Devices 9:45
“Invited - Scalable Printing of Nano and Microscale Electronics and Wearable Sensors
“Tip-Enhanced Raman characterization of He-ion-irradiated CVD graphene channels”
“Magnetic vortex states in concentric asymmetric
Ahmed Busnaina”
Taharh Zelai1; Takuya Iwasaki2; Stuart Boden3;
Jhonny Avila1; Iuri Stefani Brandt2; Jérôme
Nano OPS, Inc. and Northeastern University,
Harold Chong3; Hiroshi Mizuta2; Yoshishinge
Borme3; Milton Andre Tumelero2; Alexandre
Boston
Tsuchiya3
Viegas2; Paulo Freitas3; André Avelino Pasa2
1 - Nanoelectroincs and Nanotechnology Group,
1 - Departement de Physique, Universite de
Department of Electronics and Computer Sci-
Liege; 2 - Laboratório de Filmes Finos e Super-
ence, University of Southampton; 2 - School of
fícies, Departamento de Física, Universidade
Materials Science, Japan Advanced Institute of
Federal de Santa Catarina, Brazil; 3 - Internation-
Science and Technology; 3 - Nanoelectroincs
al Iberian Nanotechnology Laboratory
nanorings”
and Nanotechnology Group, Department of Electronics and Computer Science, University of Southampton 10:00
“Observation of Single Carrier Transport Behavior
“Functional Oxides for nano-eletronics and spin-
in Graphene Nano Constrictions”
tronics”
Zhongwang Wang1; Takuya Iwasaki1; Manoha-
Anna Grazia Monteduro1,2; Silvia Rizzato1,2;
ran Muruganathan1; Hiroshi Mizuta1
Zoobia Ameer1,2; Angelo Leo1,2; Chiara Leo1;
1 - School of Material Science, Japan Advanced
Shilpi Karmakar2; Vittorianna Tasco2; Anna Paola MNE2017
27
Friday, Sep 22nd Institute of Science and Technology (JAIST)
Caricato1; Maurizio Martino1; D.D. Sarma3; Giuseppe Maruccio1,2 1 - Department of Mathematics and Physics, University of Salento, Italy; 2 - CNR-Nanotec, Italy; 3 - SSSC Indian Institute of Science
10:15
“Multimaterial Multilayer Inkjet Printing”
“Precise determination of microwave modes in
Anita Fuchsbauer1; Florian Durst1; Helene
“Wafer-scale measurements of the specific contact resistance between different metals and mono-
Außerhuber1; Vanessa Tober1; Michael Mühl-
and multi-layer graphene”
R. Dutra1; D. E. Gonzalez-Chavez1; L. Guerra1;
berger1
Sten Vollebregt1; Manvika Singh1; Dominique
G. C. F Navarro1; R. L. Sommer1
1 - PROFACTOR GmbH, Functional Surfaces and
Wehenkel2; Richard Van Rijn2; Pasqualina Sarro1
1 - Centro Brasileiro de Pesquisas Físicas, Rio de
Nanostructures, Austria
1 - Delft University of Technology; 2 - Applied
Janeiro
arrays of Py micro stripes”
Nanolayers COFFEE BREAK
Coffee Break
10:30 - 11:00
Coffee Break / Exhibition
SESSIONS
SESSION 1J
11:00 - 11:30
Room A / Parallel Session
SESSION 2I
Room B / Parallel Session
SESSION 3G
Room C / Parallel Session
Topic: 1. Novel Developments in Nano/Micro Fabrica-
Topic 2. Fabrication and Integration of Micro/Nano
Topic 3. Micro/Nano Engineering for Physical and
tion Methods and Processes
Structures, Devices and Systems
Chemical Applications
Sub-topics: 1.8: Other (Printing I)
Sub-topics: 2.1: Fabrication & Integration of
Sub-topics: 3.5: Nanomagnetism
Micro/Nano Electronic Devices 11:00
“Invited - Closing the gap – High precision printing from lab to fab” Ruth Houbertz Multiphoton Optics GmbH, Germany
“Strain coupling optimization in Magnetoelectric Cells”
“Magnetic Vortices in Lithographed Nanostructures”
Davide Tierno1; Rutger Duflou2; Florin Ciubota-
Luiz Carlos Sampaio Lima1; Jeovani Brandão2;
ru3; Iuliana Radu3; Christoph Adelmann3
Paulo Roberto Soledade1; Danilo Froes1; Pablo
1 - imec, KU Leuven; 2 - KU Leuven; 3 - imec
Ramon Batista1; André Luiz Pinto1; Alexandre MNE2017
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Friday, Sep 22nd Martins De Souza1; Flavio Garcia1; Alberto Passos Guimarães1; Joao Paulo Sinnecker1 1 - Centro Brasileiro de Pesquisas Físicas, Rio de Janeiro, Brazil.; 2 - LNLS - CNPEM - Campinas, Brazil 11:15
“MnO and CeO2 based resistive switching memory for a high resistance ratio crossbar application”
“Patterned T-shaped Magnetic Structures Exhibit-
Quanli Hu1; Tae Su Kang1; Haider Abbas1; Tae
Elis H.C.P. Sinnecker1; José Miguel Garcia Mar-
Sung Lee1; Nam Joo Lee1; Mi Ra Park1; Tae-Sik
tin2; Joao Paulo Sinnecker3
Yoon2; Chi Jung Kang1
1 - Instituto de Física, UFRJ, Rio de Janeiro, Bra-
1 - Department of Physics, Myongji University; 2
zil; 2 - Instituto de Microelectronica de Madrid,
- Department of Materials Science and Engineer-
CSIC, Madrid, Spain; 3 - Centro Brasileiro de
ing, Myongji University
Pesquisas F ́ısicas, Rio de Janeiro, RJ, Brazil
ing Four Different Stable Magnetic States”
MEE
MEE Young Investigator Award
11:30 - 12:00
MEE Young Investigator Award
PLENARY
Plenary Talk
TALK
Plenary talk - Vincent Hayward (Institute of Philosophy, School of Advanced Study, University of London & Actronika SAS, Paris) - Tactile
12:00 - 12:45
mechanics — a new avenue for nano-engineering?
CLOSING
Closing Remarks
12:45 - 13:15
Closing Remarks
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MNE2017
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THANK YOU! INL - International Iberian Nanotechnology Laboratory Avenida Mestre JosĂŠ Veiga s/n 4715-330 Braga - Portugal
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Phone: Tel. (351) 253 140 112 Fax: (351) 253 140 119 Email: info@mne2017.org