2000 501 641 701
The industry standard
BAK 761 901 1101 1250 1401
BAK 761
Platform summary Install up to three e guns Manual loading or “cassette to cassette” Standard or extended throw
The BAK 761 is the workhorse for optics, optoelectronics and semiconductor applications.
600
1. Choose your chamber geometry Standard Throw - for typical metals and dielectrics depostion Extended Throw - for “lift off” Split Chamber - for reactive materials Extended rear for custom dep & etch requirements
2100
1300
Split chamber and load lock variants
2. Choose your Sources Typical Layout
EBS electron beam guns (up to 3) A wide range of thermal sources Barrel sources and effusion cells Ion and plasma sources for PIAD or etch Back & front side heating Linear and round sputter cathodes
1900 2100
1200
1300
3300
3. Choose your tooling Dome as standard Additional options for:-- Flip systems -- Planetary -- Custom designs 4. Choose your process control 600
Khan system & process controller as standard Additional options for:-- Quartz or optical monitoring layer termination -- Optical pyrometry - temperature control
Substrate size 3” 4” 5” 6” 8”
Substrate handling 4 segments 64 40 20 16 8
Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland
3 segments 54 39 24 18 6
Knudsen 123 78 48 33 15
Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 info@evatecnet.com www.evatecnet.com
Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.