071_DOD_print.qxd
12/12/07
3:03 PM
Page 266
HBO速 MERCURY SHORT ARC FOR MICROLITHOGRAPHY
1
D I S P L A Y O P T I C D I S C H A R G E
Ordering Abbreviation Product Number Watts (W) Volts (V) Type of Current Current (A) Radiant Intensity 350..450 nm (mW/sr) Length l1 max (mm) Length l2 max (mm) Distance a (mm) Diameter d (mm) Electrode Gap -- cold (mm) Avg Rated Life (hrs) Operating Position Cooling Base Anode Base Cathode Fig No Symbols & Footnotes
2
4
HBO 3501 W/PIL 69165 3400 23 DC 148.0
HBO 3500 W/HK 69137 3500 55 DC 63.5
HBO 4500 W/CIL 69162 4500 30 DC 148.0
HBO 5000 W/TA 69135 5000 50 DC 100.0
HBO 5001 W/UF 69161 5000 62 DC 80.0
360 315 154 77 4.5 1500 Vertical, anode up Forced Base SFc32.5-6.7/50 SFaX40-6/50 1 163,266
315
360 315 154 77 4.5 1500 Vertical, anode up Forced Base SFAX40-6/50 SFC32.5-6.7/50 1 186
327.5 148.5 80 7.5 850 Vertical, anode up Forced Base SFa 33.5-12/50 SFa 33.5-12/50 3 183,266
486 355 206 85 7.5 850 Vertical, anode up Forced Base SFa 38-14/65 SFXa 38-14/65 4 135,266
For more complete product information visit www.sylvania.com
266
3
142.7 70 6.4 1000 Vertical, anode up Forced Base SFa 27-10/42 SFc 27-14-8/35 2 100,189
Symbols/Footnotes on page 275-281