071_DOD_print.qxd
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HBO速 MERCURY SHORT ARC FOR MICROLITHOGRAPHY
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D I S P L A Y O P T I C D I S C H A R G E
Ordering Abbreviation Product Number Watts (W) Volts (V) Type of Current Current (A) Radiant Intensity 350..450 nm (mW/sr) Length l1 max (mm) Length l2 max (mm) Distance a (mm) Diameter d (mm) Electrode Gap -- cold (mm) Avg Rated Life (hrs) Operating Position Cooling Base Anode Base Cathode Fig No Symbols & Footnotes
2
4
5
HBO 200 W/DN-I 69136 200 25 DC 8.0
HBO 201 W/HS-D2 69168 200 25 DC 8.0
HBO 510 W/FU 69134 200 59 DC 3.0
HBO 250 W/BY 69246 250 40 DC 6.5
HBO 250 W/HS 69364 250 40 DC 6.25
145.8 131
150 127
20 1.9 1000 Horizontal Convection
20 2 1000 Vertical, anode up Convection SFcX32-22 SFcX12-4/15 2 129,160,186
111 120 55 16 2.4 400 Vertical, anode down Convection Cable connection SfcY 10-4/14 3 182
152 125 62 20 2 1000 Vertical, anode down Forced Base SFc13-5/20 SFc13-5/20 4 186
143 125 62 20 2 1000 Vertical, anode down Convection SFa 13-5/20 Special 5 160,186
1 129,160,186
For more complete product information visit www.sylvania.com
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Symbols/Footnotes on page 275-281