UGIM | 2018 22nd International Symposium at Penn OVATIO N INN
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University Government Industry Micro/Nanotechnology
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UGIM 2018 SYMPOSIUM University of Pennsylvania June 24-27, 2018
Contents: UGIM Mission Statement
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Welcome from the Chair
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Sponsors pg 4 Committees pg 6 Keynote Speakers pg 8 Sessions & Program
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Presentations & Authors
pg 18
Campus Map pg 20 Irvine Auditorium Floor Plan
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Sponsor Directory pg 22 Historical UGIM Host Institutions
2018 UGIM Program Schedule PDF: ugim.nano.upenn.edu/program 2018 UGIM Symposium Abstracts PDF: ugim.nano.upenn.edu/program
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How to Connect Using Guest WiFi Select the AirPennNet-Guest SSID Open a browser Accept terms & conditions Enter a valid email address Click Submit
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Program Details: Session 1 - Registration, Bootie Camp & Facility Tours Sunday, June 24, 2018 Glandt Forum Singh Center for Nanotechnology University of Pennsylvania 3205 Walnut St, Philadelphia, PA 19104
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Session 2 - Process Control, Lab Design & Training Monday, June 25, 2018 Irvine Auditorium University of Pennsylvania 3401 Spruce St, Philadelphia, PA 19104
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Session 3 - Lithography & Nanolab Safety Tuesday, June 26, 2018 Irvine Auditorium University of Pennsylvania 3401 Spruce St, Philadelphia, PA 19104
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Session 4 - Marketing, Maintenance & Software Wednesday, June 27, 2018 Glandt Forum Singh Center for Nanotechnology University of Pennsylvania 3205 Walnut St, Philadelphia, PA 19104
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UGIM Mission Statement: The mission of the biennial UGIM Symposium is to bring together leading educators and researchers from university, government and industry around the world to promote the various exciting fields of micro/nanotechnology. Representatives of university micro/nano fabrication facilities, ranging from new labs to nationally recognized facilities, have found this symposium an excellent forum for exchanging information and presenting new research and educational concepts. Government agencies such as NSF, NIH, NIST, SEMATECH, SRC, DoD and ONR have participated with research papers and updates on funding opportunities. Industry interactions with universities, including technology transfer, collaborative research, and training efforts are frequently presented. This is a signature opportunity for those involved in the field of micro/nanotechnology or in the operation of micro/nano cleanroom facilities. OVATIO N INN
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Welcome Dear Colleagues, It is my great pleasure to welcome you to UGIM 2018 Symposium at the University of Pennsylvania. This is the 22nd meeting of this community and we are honored to be the host University in the City of Philadelphia. I am very grateful to the UGIM Steering Committee, particularly Greg Cibuzar (Chair, UGIM Steering Committee), for selecting the University of Pennsylvania and to our sponsors, who have contributed generously to this year’s event. During the course of the Conference, I encourage you to fully engage with exhibiting sponsors during breaks and the vendor shows. The latter will be held on both Monday and Tuesday evenings, June 25th and 26th. For a list of this year’s sponsors, please visit page 4 in the conference brochure. After each UGIM Symposium, I find myself wishing it were an annual event because meeting every other year does not allow ample time for this unique community to benefit from our collective experiences. Over the next few days, please maximize social networking opportunities during breaks, lunches, cocktail hours and dinners. Reach out to new staff members, lab managers, directors and researchers from across North America, Europe, Australia, Asia and the Middle East. I am sure that you will enjoy this part of UGIM as much as the program itself. Vincent Luciani (NIST, Gaithersburg), UGIM 2018 Program Chair, has delivered a great program for UGIM 2018, with keynote speakers Lloyd Whitman (Whitehouse, OSTP), Prof. Jered Haun (Univ. of California, Irvine), Donald Tennant (CNF, Cornell Univ.) and invited speakers, Robert Hamilton (Emeritus, Univ. of California, Berkeley) and Prof. Kenneth Shepard (Columbia Univ.). In addition to Vincent, I owe a special debt of gratitude to Jessie Zhang and Jerry Bowser, both from NIST Gaithersburg, for their devotion, skillful decision-making and thoughtful conversations that greatly contributed to this year’s symposium. Lastly, I would like to acknowledge John Russell and Charles Veith, both of Penn Engineering, for their attention to the many facets of this conference, their guidance and hard work on the logistics of UGIM. Without them, this event would not have been possible. I look forward to meeting with you and sincerely hope that you enjoy the program, social networking and your time in Philadelphia. Sincerely,
Noah S. Clay Conference Chair, UGIM 2018 University of Pennsylvania
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SPONSORS
UGIM 2018 SYMPOSIUM June 24-27, 2018 University of Pennsylvania
Platinum Sponsors
Lead Sponsor
Gold Sponsors
EVERBEING INT'L CORP.
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UGIM 2018 SYMPOSIUM | Program Schedule
COMMITTEES, SESSIONS AND CHAIRS UGIM 2018 SYMPOSIUM June 24-27, 2018 University of Pennsylvania
UGIM Steering Committee Julia Abersold, University of Louisville Greg Cibuzar, University of Minnesota Noah Clay, University of Pennsylvania Vicky Diadiuk, Massachusetts Institute of Technology
Session 1 Session Title: Bootie Camp Session Leader: Jerry Bowser, NIST, Gaithersburg Topic: Nanolab Infrastructure Chair: John Nibarger, NIST, Boulder
William Flounders, University of California, Berkeley Karl Hirschman, Rochester Institute of Technology Sandrine Martin, University of Michigan Mary Tang, Stanford University
Ian Harvey, University of Utah Past Host Chair
Topic: Nanolab Management Matthew Moneck, Carnegie Mellon University Topic: Nanolab Safety Chair: Sandrine Martin, University of Michigan Topic: Nanolab IT, Infrastructure & Controls Chair: Dylan Klomparens, NIST, Gaithersburg
Noah Clay, University of Pennsylvania Current Host Chair Vincent Luciani, NIST, Gaithersburg UGIM 2018 Symposium Program Chair
Session 2 Session Title: Process Control, Lab Design & Training Topic: Symposium Keynote Address Chair: Vincent Luciani, NIST, Gaithersburg Topic: Keynote Address – Emerging Technologies Chair: Prof. Flavia Vitale, University of Pennsylvania Topic : Process Control Chairs: Michael Skvarla, Cornell University Michael Khbeis, University of Washington Topic: Laboratory Design Chairs: Jörg Hübner, Danish Technical University John Nibarger, NIST, Gaithersburg Topic: Staff Development & Researcher Training Chairs: Ida Noddeland, Norwegian University of Science & Technology Brian Van Devener, University of Utah
Session 3 Session Title: Lithography & Nanolab Safety Topic: Lithography Chairs: Brian Thibeault, University of California, Santa Barbara Richard Kasica, NIST Gaithersburg Topic: Nanolab Safety Chairs: Vincent Genova, Cornell University Sandrine Martin, University of Michigan Topic: General Laboratory Topics Chairs: Jessie Zhang, NIST, Gaithersburg Paul Sunal, Army Research Laboratory
Session 4 Session Title: Marketing, Maintenance & Software Topic: Marketing Your Laboratory Chair: Peter Duda, University of Chicago Topic: Vacuum Pump Maintenance Chair: Meredith Metzler, University of Pennsylvania Topic: Software & Engineering Controls Chair: Jerry Bowser, NIST Gaithersburg, Jiangdeng Deng, Harvard University Topic: Workforce Development Chairs: David Gottfried, Georgia Institute of Technology, Jessie Zhang, NIST Gaithersburg
Topic: Nanolab Metrics & Programing Chairs: Nadia Court, University of Sydney Devin Brown, Georgia Institute of Technology
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KEYNOTE SPEAKERS UGIM 2018 SYMPOSIUM June 24-27, 2018 University of Pennsylvania
Lloyd Whitman, PhD Principal Assistant Director, Physical Sciences and Engineering White House Office of Science and Technology Policy Lloyd Whitman is the Principal Assistant Director for Physical Sciences and Engineering and co-leader of the Science Division in the White House Office of Science and Technology Policy (OSTP), on detail from his position as Chief Scientist at the National Institute of Standards and Technology (NIST). Lloyd provides senior leadership to OSTP and the National Science and Technology Council for a broad range of science and technology areas and national research and development programs and strategies, including advanced manufacturing, advanced materials, information technology, nanotechnology, physical sciences, prizes and challenges, robotics, semiconductors, technology to support aging adults, and technology transfer. Lloyd received a B.S. in Physics from Brown University, and M.S. and Ph.D. degrees in Physics from Cornell University. He spent most of his research career at the U.S. Naval Research Laboratory, where he led a diverse portfolio of research studying nanostructures and their integration into advanced sensor systems. He was subsequently the founding Deputy Director of NIST’s Center for Nanoscale Science and Technology, and served at OSTP for the last two years of the Obama administration as Assistant Director for Nanotechnology and Advanced Materials. Lloyd has over 160 publications and multiple patents in the areas of nanoscience, materials science, biotechnology, and sensor technology, and has been recognized with numerous media citations and awards.
Jered B. Haun, Ph.D Assistant Professor Biomedical Engineering, Chemical Engineering and Materials Science; Chao Family Comprehensive Cancer Center Center for Advanced Design and Manufacturing of Integrated Microfluidics (CADMIM) Jered Haun is an Assistant Professor in the Department of Biomedical Engineering at the University of California, Irvine, with a joint appointment in the Department of Chemical Engineering and Materials Science. He is also member of the Center for Advanced Design and Manufacturing of Integrated Microfluidics (CADMIM) and the Chao Family Comprehensive Cancer Center. He received a B.S. in Chemical Engineering from the University of Minnesota, M.S.E. in Biomedical Engineering from Johns Hopkins University, and Ph.D. in Bioengineering from the University of Pennsylvania. He then received postdoctoral training from Dr. Ralph Weissleder at Harvard Medical School and Massachusetts General Hospital. The Haun Laboratory for Nanoengineering and Molecular Medicine is focused on developing biomedical technologies that will enable molecular analysis of diseases both inside and outside of the body, including powerful nanomaterial probes, novel microfabricated devices, computational simulations, and advanced imaging methods. Awards include the Hellman Fellowship and the UCI BME Professor of the Year.
Patrick D. Mahoney President & Chief Executive Officer IEEE GlobalSpec, Inc. IEEE GlobalSpec is the leading provider of online marketing programs for industrial suppliers interested in reaching engineers and technical professionals. Its audience of over 8 million engineers and technologists rely upon IEEE GlobalSpec to search for and locate products and services, learn about suppliers, access comprehensive technical content including standards, and access trusted, authoritative news insights and analysis. The company also provides industry and product-focused e-newsletter publications and webinars. Mr. Mahoney’s career began in technical sales and product management, serving in a series of progressive domestic and international management roles with BICC Cables, Framatome, Pitney Bowes, Standard & Poor’s, and IEEE that expanded to general management and operations. Prior to his current position, he was Chief Marketing Officer at IEEE. Mr. Mahoney earned a B.A. degree in Political Science from St. Joseph’s University in Philadelphia, PA. He serves on the Board of Directors for McGraw-Hill Federal Credit Union and the St. Edmund’s Retreat Board of Trustees.
Donald M. Tennant Director of Operations Cornell NanoScale Science & Technology Facility
Robert M. Hamilton Emeritus, Marvell Nanofabrication Laboratory University of California, Berkeley
Donald M. Tennant is the Director of Operations at the Cornell NanoScale Facility (CNF) where he has managed the day to day operations since 2006. Prior to this Don enjoyed a 27-year career at Bell Labs, where he was a Distinguished Member of Technical Staff and managed the Advanced Lithography Group in the Nanofabrication Research Department. From 1979 until 2006 he worked at Bell in the area of high resolution electron beam lithography and related nanostructure technology. His work has had significant impact on a wide range of disciplines, including: soft x-ray imaging and extreme ultraviolet lithography (EUVL), high precision grating production for DWDM (dense wavelength division multiplexing), and gate technology for both high performance circuit applications and the exploration of the practical limits of silicon technology. His collaborative efforts with SUNY Stonybrook and Brookhaven National Laboratories have resulted in important advances in the field of x-ray optics and microscopy. He has authored or co-authored over 200 articles in these fields, organized major international conferences on the subjects, presented numerous invited technical talks and posters, and has been awarded eleven U.S. patents. He currently serves on the Advisory Committee and is the Financial Trustee for the International Conference of Electron, Ion, and Photon Beams and Nanotechnology (EIPBN). He has served on a number of scientific review panels for the National Labs. He is a Past Chairman of the Nanoscale Science and Technology Division of the AVS, is a member of the scientific advisory boards for Lawrence Berkeley National Lab’s Molecular Foundry and Argonne National Lab’s Center for Nanoscale Materials and has served as a panelist for the National Research Council of the National Academies. The focus of his efforts at the Cornell NanoScale Facility are to lead this comprehensive nanofabrication and characterization facility into new and expanded areas of expertise and to offer frontier capabilities to researchers for interdisciplinary projects and education.
I was born August 2, 1946 in the city of Berkeley, California, - home of the University of California. On the hills overlooking Berkeley resides the Lawrence Berkeley National Laboratory, which in those days was simply called the Rad Lab. Anyone looking to the hills had a view of the round building, which contained the 184” Cyclotron. Berkeley residents were keenly aware of the atomic bomb research war efforts done at Berkeley; and, the Rad Lab and the secrecy imposed on the Rad Lab increased curiosity. For Berkeley youth, the lab created a compelling interest in science. Being a close childhood friend of R. G. Sproul III, the grandson of then UC President Robert Gordon Sproul established a close connection with the Berkeley campus; it was our playground. I was educated in Berkeley public schools in a class that had several children of Nobel laureates, Carol Calvin, Carol Lawrence, and Wendy Teller. The Berkeley Public School system excelled in the sciences. My academic career began in state college with later coursework at UC; however, at 20 I made a decision to follow my passion, scientific glassblowing and dropped out of physics, a decision which I have never regretted. I eventually became UC Berkeley’s principal glassblower in charge of the Department of Electrical Engineering & Computer Science Microwave Tube Lab, a shop that created lasers and instruments for four Nobel laureates. As tube research waned, I took over the operations of an ion implanter and began designing and modifying semiconductor research tools. This led to being part of the design team for the UC Berkeley Microlab inaugurated in 1983. Under its Director Katalin Voros, I eventually became Equipment and Facilities Manager and continued in management with William Flounders at the Microlab’s successor, the Marvell Nanofabrication Laboratory. I retired June 30, 2017 after 50 years of UC service. Currently, I pursue my avocations, growing and hybridizing high elevation Andean orchids, collecting art, and studying classical music.
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ABSTRACTS: ugim.nano.upenn.edu/program
SESSION 1 Registration, Bootie Camp & Facility Tours Sunday, June 24, 2018 Glandt Forum Singh Center for Nanotechnology University of Pennsylvania, 3205 Walnut St, Philadelphia, PA 19104
Session Leader
S1-3 | 2:15 PM - 3:15 PM
Jerry Bowser National Institute of Standards & Technology (NIST), Gaithersburg
Nanolab Safety
S1-0 | 11:00 AM - 12:00 PM
Presentation by Session Chair & Open Discussion
Registration Opens
Chair Sandrine Martin University of Michigan
Lunch Provided
How to Select Appropriate Gloves & Wipers
S1-1 | 12:00 PM - 1:00 PM
CEO, Valutek
Nanolab Infrastructure Discussion Chair John Nibarger National Institute of Standards & Technology (NIST), Boulder Presentation by Session Chair & Open Discussion S1-2 | 1:00 PM - 2:00 PM Nanolab Management
Greg Heiland
S1-4 | 3:15 PM - 4:00 PM Nanolab IT, Infrastructure & Controls Chair Dylan Klomparens National Institute of Standards & Technology (NIST), Gaithersburg Presentation by Session Chair & Open Discussion
Chair Matthew Moneck Carnegie Mellon University
4:00 PM - 4:15 PM Break
Presentation by Session Chair & Open Discussion
S1-5 | 4:15 PM - 5:30 PM Penn Facilities Tour
2:00 PM - 2:15 PM Break
Nanofab & Microscopy Lead By Penn Technical Staff Singh Center for Nanotechnology S1-6 | 5:30 PM - 7:30 PM Welcome Reception & Dinner
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SESSION 2
Process Control, Lab Design & Training Monday, June 25, 2018 Irvine Auditorium University of Pennsylvania 3401 Spruce St, Philadelphia, PA 19104
Morning Session | 9:00 AM - 1:30PM S2-0 | 8:00 AM - 9:00 AM
Process Control
Registration Opens
Chairs:
Continental Breakfast
Michael Skvarla Cornell University
S2-1 | 9:00 AM - 9:15 AM
Michael Khbeis University of Washington
Opening Remarks Welcome Address & General Information Noah Clay Director, Nanofabrication, University of Pennsylvania S2-2 | 9:15 AM - 10:00 AM Keynote Address Chair Vincent Luciani National Institute of Standards & Technology NIST, Gaithersburg Keynote Speaker Lloyd Whitman, PhD Whitehouse, Office of Science & Technology Policy S2-3 | 10:00 AM - 10:45 AM
S2-5 | 11:00 AM - 11:20 AM Emerging Trends in Research Equipment & Systems Duane Bingaman V.P. Process Equipment Division Ryan Kremser Software & System Control Engineer S2-6 | 11:20 AM - 11:40 AM Setting-Up a Quality Framework for Multi-Application Cleanrooms Gerard Roelofs Head of MESA + Nanolab, University of Twente
Keynote Address - Emerging Technologies
S2-7 | 11:40 AM - 12:00 PM
Chair Flavia Vitale, Professor Dept. of Neurology, University of Pennsylvania
Defining the Grey Area - Materials and Control Ryan Rivers R&D Engineer, Marvell Nanolab, University of California, Berkeley
Integrated Devices for Molecular Analysis of Clinical Specimen
S2-8 | 12:00 PM - 12:20 PM
Keynote Speaker Jered Haun, Professor Department of Biomedical Engineering University of California, Irvine S2-4 | 10:45 AM - 11:00 AM Break
Random Defect Reduction in a Research, Development and Prototyping Cleanroom Craig Hill Process Mgr., Microelectronics Lab., MIT Lincoln Laboratory S2-9 | 12:20 PM - 1:30 PM Lunch @ Bodek Lounge, Houston Hall
Afternoon Session | 1:30 PM - 8:30PM Staff Development & Researcher Training Laboratory Design
Chairs:
Chairs:
Ida Noddeland, Norweigan University of Science & Technology
Jörg Hübner Danish Technical University
Brian Van Devener, University of Utah
John Nibarger National Institute of Standards & Technology (NIST), Boulder
S2-15 | 3:05 PM - 3:25 PM
S2-10 | 1:30 PM - 1:50 PM
Nadia Court, Facility & Program Manager, Research & Prototype Foundry, University of Sydney
Skills Development for Micro/Nano Facility Technical Staff
What is Clean in Biotech? Invited Speaker Joseph Morgan Associate, W. Wilson Architects S2-11 | 1:50 PM - 2:10 PM Energy Efficient Cleanroom Design Greg Owen Principle, GLO Consulting S2-12 | 2:10 PM - 2:30 PM Vibrational Control Strategies for Advanced Nanotechnology Research Facilities Steven Ryan Divisional V.P., TMC-Ametek S2-13 | 2:30 PM - 2:50 PM Cryo TEM Facility Requirements Jack Paul Principle Laboratory Planner, HDR
S2-16 | 3:25 PM - 3:45 PM User-Focused Characterization Tool Training Jörg Hübner, Director, DTU Danchip, Danish Technical University S2-17 | 3:45 PM - 4:05 PM A Scheme for Training Users on a Suite of Tools Leif Johansen, Head of Operations, DTU Danchip, Danish Technical University S2-18A | 4:05 PM – 4:25 PM INL Training Strategies and User Engagement Mariam Debs, Facility Manager, Microfabrication & Exploratory Nanotechnology, INL, Braga, Portugal S2-18B | 4:25 PM - 4:50 PM Shared Microfabrication Laboratories at UC Berkeley – Lessons Learned Invited Speaker Robert Hamilton, Emeritus, Marvell Nanolab, University of California, Berkeley
S2-14 | 2:50 PM - 3:05 PM Break S2-19A | 4:50 PM - 6:10 PM Vendor Show S2-19B | 6:10 PM - 8:30 PM Evening Reception & Dinner @ Singh Center for Nanotechnology 13
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SESSION 3 Lithography & Nanolab Safety Tuesday, June 26, 2018 Irvine Auditorium University of Pennsylvania 3401 Spruce St, Philadelphia, PA 19014
Morning Session | 9:00 AM - 1:10PM 8:00 AM - 9:00 AM
S3-24 | 10:45 AM - 11:00 AM Break
Registration Opens Continental Breakfast
Nanolab Safety Chairs:
Lithography Keynote Address & Related Topics Chairs:
Vincent Genova Cornell University
Brian Thibeault University of California, Santa Barbara
Sandrine Martin University of Michigan
Richard Kasica National Institute of Standards & Technology (NIST), Gaithersburg
S3-25 | 11:00 AM - 11:20 AM
S3-20 | 9:00 AM - 9:45 AM Electron Beam Lithography Systems and Methods for R&D Keynote Speaker Donald M. Tennant Director of Operations, Cornell Nanoscale Science &Technology Facility, Cornell University
Remote Fab Buddy System at MIT’s Microsystems Technology Labs Vicky Diadiuk MTL, Associate Director of Operations, MIT S3-26 | 11:20 AM - 11:40 AM Safety Considerations for 24-hour (Full Time) Operation of the University of Michigan’s Lurie Nanofabrication Facility
S3-21 | 9:45 AM - 10:05 AM
Pilar Herrera-Fierro Director of User Services, LNF, University of Michigan
Expanding Lithography Capabilities: Two Case Studies and a 15-Year History
S3-27 |11:40 AM - 12:00 PM
Jörg Scholvin Research Scientist, MIT
Safety Considerations in a Multi-User Facility Savitha P C.E.O., CeNSE, Indian Institute of Science
S3-22 | 10:05 AM - 10:25 AM A System for Precise Invoicing of Resist Costs
S3-28 | 12:00 PM - 1:10 PM
Leif Johansen Head of Operations, DTU Danchip, Danish Technical University
Lunch @ Bodek Lounge, Houston Hall
S3-23 | 10:25 AM - 10:45 AM Electron Beam Lithography Focusing on Material Management and Trainings Smitha Nair Senior Technologist, CeNSE, Indian Institute of Science
Afternoon Session | 1:10 PM - 9:00 PM General Laboratory Topics, Metrics & Programming
Nanolab Metrics & Programming Chairs:
General Laboratory Topics Chairs:
Nadia Court University of Sydney
Jessie Zhang National Institute of Standards & Technology (NIST), Gaithersburg
Devin Brown Georgia Institute of Technology
Paul Sunal Army Research Laboratory
S3-34 | 2:45 PM - 3:05 PM
S3-29 | 1:10 PM - 1:30 PM
Jörg Hübner Director, DTU Danchip, Danish Technical University
Reinforcing and Positioning Dual-Use Multi-Platform NanoLabs in Research & Innovation Eco-Systems
Getting the Most Out of It - Considerations on How to Maximize the Impact of Cleanroom Facilities
Janneke Hoedemaekers Managing Director MESA+Institute, University of Twente
S3-35 | 3:05 PM - 3:25 PM
S3-30 | 1:30 PM - 1:50 PM
Nasir Basit Director, NUFAB at Northwestern University
Measuring Success of a Government Funded National Infrastructure Facility Simon Doe National Facility Manager, ANFF, Australian Fabrication S3-31 |1:50 PM - 2:10 PM National Nanotechnology Coordinated Infrastructure: A Midterm Report David Gottfried Deputy Director, NNCI, Georgia Institute of Technology S3-32 | 2:10 PM - 2:30 PM Finding Peers and Benchmarking Operations in a Government R&D Fab Daniel Pulver Microelectronics Lab Manager, MIT Lincoln Laboratory
Building a New Cleanroom at Northwestern University
S3-36A | 3:25 PM - 3:45 PM Cost Impact/Advantage of a Pre/Dual Action Fire Suppression System in a Cleanroom Environment Dennis Schweiger Facilities Manager, LNF, University of Michigan S3-36B | 3:45 PM - 4:15 PM Invited Speaker Ben Franklin’s Impact on Science Kenneth Shepard, Professor Department of Electrical Engineering, Columbia University S3-37 | 4:15 PM - 5:35 PM Vendor Show S3-38 | 6:00 PM - 9:00 PM
S3-33 | 2:30 PM - 2:45 PM Break
Closing Reception & Dinner @ National Constitution Center Board Buses At 5:35PM (15 min Ride) Announce UGIM 2020 Location
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SESSION 4 Marketing, Maintenance & Software Wednesday, June 27, 2018 Glandt Forum, Singh Center for Nanotechnology University of Pennsylvania, 3205 Walnut St, Philadelphia, PA 19104
Morning Session | 9:00 AM - 1:00 PM
Afternoon Session | 1:00 PM - 2:30 PM
S4-39 | 9:00 AM - 10:00 AM
S4-44 | 1:00 PM - 2:30 PM
Marketing Your Laboratory
NNCI & NIST Approaches to Workforce Development
Chair: Peter Duda, University of Chicago
David Gottfried Deputy Director, NNCI, Georgia Institute of Technology
Keynote Speaker
Jessie Zhang Asst. Nanofabrication Mgr., NIST, Gaithersburg
Marketing Strategies for Your Nanolab Patrick Mahoney, Jr., CEO, IEEE Global Spec
UGIM 2018 – Conference Closes
Chair: Meredith Metzler University of Pennsylvania Ed Ho Product Manager, Pfeiffer Vacuum Robert Magiera Product Manager, Pfeiffer Vacuum S4-41 | 10:30 AM - 10:45 AM Break S4-42 |10:45 AM - 11:45 AM Software & Engineering Controls Chairs: Jerry Bowser, (NIST), Gaithersburg Jiangdeng Deng Harvard University Presentation by Session Chairs & Open Discussion Cost Recovery & Usage Tracking Thomas Ferraguto, University of Massachusetts, Lowell Improving Logistics and Policy through Specialized Software Dylan Klomparens, NIST, Gaithersburg S4-43 | 11:45 AM - 1:00 PM Lunch @ Singh Center
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PRESENTATIONS & AUTHORS UGIM 2018 SYMPOSIUM June 24-27, 2018 University of Pennsylvania
All UGIM 2018 abstracts, talk titles and complete author lists that were received are listed below. S2-3: Integrated Devices for Molecular Analysis of Clinical Specimen Author: Prof. Jered Haun University of California, Irvine, CA S2-6: Setting-Up a Quality Framework for Multi-Application Cleanrooms Authors: C.M. Bruinink, M.J. de Boer, B.R.M. van den Akker, G.P.M. Roelofs MESA+ NanoLab, University of Twente, The Netherlands S2-7: Defining the Grey Area: Materials Classification and Control Authors: Ryan Rivers, Allison Dove, A. William Flounders Marvell Nanolab, University of California, Berkeley S2-8: Random Defect Reduction in a Research, Development, and Prototyping Cleanroom Authors: Craig Hill, Scott Zarr, Daniel Pulver Microelectronics Lab, MIT Lincoln Laboratory, Lexington, MA
S2-13: Cryo TEM Facility Requirements Author: Jack Paul HDR Inc., Phoenix, AZ S2-15: Skills Development for Micro/Nano Facility Technical Staff Author: Nadia Court Research & Prototype Foundry, University of Sydney, Sydney, Australia S2-16: User-Focused Characterization Tool Training Authors: Anders M. Jorgensen, Adam Fuller, Jakob Birkedal Wagner, Jörg Hübner DTU Danchip, Technical University of Denmark, Lyngby, Denmark S2-17: A Scheme for Training of Users in a Suite of Tools Authors: Leif S. Johansen, Thomas Aarøe Anhøj, Anders Michael Jorgensen, Jörg Hübner DTU Danchip, Technical University of Denmark, Lyngby, Denmark S2-18A: INL Training Strategies and User Engagement Authors: Mariam González Debs, H. Fonseca, J. Rodrigues, J. Gaspar Microfabrication & Exploratory Nanotechnology, INL, Braga, Portugal
S2-10: What is Clean in Biotech? Author: Joseph Morgan W. Wilson Architects, Boston, MA S2-11: Energy Efficient Cleanroom Design: A Case Study of the Carnegie Mellon University Bertucci Nanotechnology Laboratory Author: Greg Owen GLO Consulting, Portland, OR S2-12: Vibrational Control Strategies for Advanced Nanotechnology Research Facilities Author: Steven Ryan TMC-Ametek, Peabody, MA
S2-18B: Shared Microfabrication Laboratories at UC Berkeley – Lessons Learned Author: Robert Hamilton, Emeritus Marvell Nanolab, University of California, Berkeley, CA S3-20: Electron Beam Lithography Systems and Methods for R&D Author: Donald M. Tennant Cornell Nanoscale Science & Technology Facility, Cornell University, Ithaca, NY
S3-21: Expanding Lithography Capabilities: Two Case Studies and a 15-Year History
S3-30: Measuring Success of a Government Funded National Infrastructure Facility
Author: Jörg Scholvin MIT, Cambridge, MA
Author: Simon Doe South Australian node of Australian National Fabrication Facility, University of South Australia, Adelaide, Australia
S3-22: A System for Precise Invoicing of Resist Cost Authors: Leif S. Johansen, Henrik Nyholt, Anders Gregersen, Jesper Hanberg, Thøger Eskilden, Anders Michael Jorgensen DTU Danchip, Technical University of Denmark, Lyngby, Denmark S3-23: E-Beam Lithography Focusing on Material Management and Trainings Authors: Smitha Nair T, Savitha P National Nanofabrication Centre, Indian Institute of Science, Bengaluru, India S3-25: Remote Fab Buddy System at MIT’s Microsystems Technology Labs Author: Vicky Diadiuk Microsystems Technology Labs, MIT, Cambridge, MA S3-26: Safety Considerations for 24-Hour Operation of the University of Michigan’s Lurie Nanofabrication Facility Authors: Pilar Herrera-Fierro (presenter), Sandrine Martin, Dennis Schweiger, Tony Sebastian
S3-32: Finding Peers and Benchmarking Operations in a Government R&P Fab Author: Daniel Pulver MIT Lincoln Laboratory, Lexington, MA S3-34: Getting the Most Out of it: Some Considerations on How to Maximize the Impact of Cleanroom Facilities Authors: Jörg Hübner , Anders Jorgensen DTU Danchip, Technical University of Denmark, Lyngby, Denmark S3-35: Building a New Cleanroom at Northwestern University Author: Nasir Basit NUFAB, Northwestern University, Evanston, IL S3-36: Cost Impact/Advantage of a Pre/Dual Action Fire Suppression System in a Cleanroom Environment Authors: Dennis Schweiger, Sandrine Martin, Tony Sebastian, Pilar Herrera-Fierro Lurie Nanofabrication Facility, University of Michigan, Ann Arbor, MI
S3-27: Safety Considerations in a Multi-User Facility Authors: Savitha P, Smitha Nair T, Raghupathy N, Arun Kumar K A National Nanofabrication Centre, Indian Institute of Science, Bengaluru, India S3-29: Reinforcing and Positioning Dual-Use Multi-Platform NanoLabs in Research & Innovation Eco-Systems Author: Janneke Hoedemaekers MESA+ NanoLab, University of Twente, The Netherlands
S4-42: Cost Recovery & Usage Tracking Author: Thomas Ferraguto Saab ETIC Nanofabrication Laboratory, University of Massachusetts, Lowell S4-42: Improving Logistics and Policy through Specialized Software Author: Dylan Klomparens National Institute of Standards (NIST), Gaithersburg
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CAMPUS MAP
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School of Enginneering and Applied Science Campus Pennsylvania UniversityUniversity City Scienceof Center 3205 Walnut St, Philadelphia, PA 19014 3335 Chestnut Garage
Axis Sheraton University City
Chestnut Street 34th Street
Nichols House ICA
Inn at Penn
33rd Street
Steve Murray's Way
New Ralston House
Singh Nanotechnology
L.R.S.M
3401 Walnut
Bookstore
The Left Bank
3101 Walnut
Walnut Street Annenberg School
Addams Hall
Dietrich Graduate Library
Annenberg PPC
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Fisher Bennett Hall
Van Pelt Library Meyerson Hall
The 36153609 ARCH 3619 3611 F
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College Hall
Steinhardt Plaza
Perelman Quad Wynn Commons Houston Hall
Wistar Institute
Music Bldg
Grad Research Wing Moore School Levine Hall Skirkanich Hall Towne Building
Morgan Bldg Fisher Fine Arts Library Duhring Wing
Irvine Auditorium
David Rittenhouse Labs
Shoemaker Green
Hayden Hall
1958 Wing
Dunning Coaches Ctr
Hutchinson Gymnasium Ringe Squash Crt
Weightman Hall
Chemistry 1973 Cret Wing Wing
Levy Tennis Pavilion
Palestra
Smith Walk Vagelos Labs IAST
Class of 1923 Ice Rink
3216 Chancellor
Paley Bridge
Spruce Street
Franklin Field
Hospital of the University of Pennsylvania Health System
Hamlin Tennis Center
Rhoads Pavilion
Claire M. Fagin Hall
Child Guidance Center
Se st
Cyclotron
Ea
StellarChance
Clinical Research Building
Children's Hospital of Philadelphia
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Penn Tower
Glandt Forum Singh Center for Nanotechnology University of Pennsylvania Walnut St University3205University Museum Museum PA 19104 AcademicPhiladelphia, Garage Wing
Penn Tower Garage
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University Museum
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Irvine Auditorium University of Pennsylvania 3401 Spruce St Philadelphia, PA 19014
Co nv
Johnson Building
Sheraton Philadelphia University City Hotel Stemmler St 3549 Chestnut Hall Philadelphia, PA 19104 Phone: (215) 387-8000
Penn Par
University City
South Green
VENDOR SHOW June 25-26, 2018 Irvine Auditorium University of Pennsylvania 3401 Spruce St, Philadelphia, PA 19014
Presentations
Vendors Exhibits
SEATING
Vendors Exhibits
Vendors Exhibits
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21
UGIM 2018 SYMPOSIUM | Program Schedule
VENDOR DIRECTORY UGIM 2018 SYMPOSIUM June 24-27, 2018 University of Pennsylvania
Advanced Dicing Technologies, Ltd. Robert Smith rhsmith@adt-co.com adt-co.com
EV Group, Inc. Mike Sexton m.sexton@evgroup.com evgroup.com
Leybold USA, Inc. Brad Creamer brad.creamer@leybold.com leybold.com
AdvanceTEC, LLC. Bryan Phelan bryanp@advancetecllc.com advancetecllc.com
Film Sense, LLC. Daniel Hadwiger dhadwiger@film-sense.com film-sense.com
NanoScribe, GmbH Benjamin Richter richter@nanoscribe.com nanoscribe.com
Agilent Technologies, Inc. Rick Chrisos rick.chrisos@agilent.com agilent.com
FOM Networks, Inc. Shuyou Li shuyou@fomnetworks.com fomnetworks.com
OEM Group, Inc. Peter Blanchet peter.blanchet@oemgroupinc.com oemgroupinc.com
Critical Systems, Inc. Tom Britton tbritton@criticalsystemsinc.com criticalsystemsinc.com
GenISys, GmbH Roger McCay mccay@genisys-gmbh.com genisys-gmbh.com
Oxford Instruments America, Inc. Jason Pham jason.pham@oxinst.com oxford-instruments.com
CS Clean Solutions, Inc. Peter Alibiso peter.alabiso@csclean-usa.com csclean-usa.com
Heidelberg Instruments, Inc. Niels Wijnaendts van Resandt nie@himt.us himt.us
Plasma-Therm, LLC. David Lishan david.lishan@plasmatherm.com plasmatherm.com
Denton Vacuum, LLC. Robert Magee rmagee@dentonvacuum.com dentonvacuum.com
JEOL USA, Inc. Edward Boyle boyle@jeol.com jeol.com
Expert Semiconductor Technology, Inc. Mark Cooper cooper@exper-tech.com exper-tech.com Ever Being International Corp. Yunyi Tang yunyi@everbeingprober.com everbeingprober.com
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Proton On Site, NEL ASA David Wolff dwolff@protononsite.com protononsite.com
Kurt J Lesker Company, Inc. Ryan Kremser ryank@lesker.com lesker.com
Rave NP, Inc. Jay Sasserath Jay.sasserath@ravenp.com amicropatterning.com
LatticeGear, LLC. Efrat Moyal efrat.moyal@latticegear.com latticegear.com
ReynoldsTech Fabricators, Inc. Vincent Reynolds vr@reynoldstech.com reynoldstech.com
Samco International, Inc. Henry Chan hchan@samcointl.com samcointl.com
Tystar Corporation Jim Smith jsmith@tystar.com tystar.com
Sandvik Thermal Process, Inc. Kevin Hartmann kevin.hartmann@sandvik.com mrlind.com
UC Components, Inc. Chris Malocsay chris@uccomponents.com uccomponents.com
Sparetech, Inc. Fred Bouchard fred.bouchard@sparetech.com sparetech.com SPTS – Orbotech, Inc. Jay Chess jchess@integritechsales.com spts.com STS-Elionix, Inc. Gerry O’Loughlin gerry@semtechsolutions.com sts-elionix.com Süss MicroTec, Inc. Emyr Edwards emyr.edwards@suss.com suss.com TMC – Ametek, Inc. Wes Wigglesworth wes.wigglesworth@ametek.com techmfg.com Tousimis, Inc. Hyun Park hjpark@tousimis.com tousimis.com
CNT Atomic Layer Deposition, Veeco Instruments, Inc. Eric Deguns edeguns@veeco.com veeco.com Valutek LLC. Greg Heiland gheiland@valutek.com valutek.com VEM, Vacuum Engineering & Materials, Inc. Diane Garver dgarver@vem-co.com vem-co.com Wafer World, Inc. Edward Curtin ed@waferworld.com waferworld.com Carl Zeiss Microscopy, LLC. John Treadgold john.treadgold@zeiss.com zeiss.com/microscopy
Transene Company, Inc. Christopher Christuk sales@transene.com transene.com 23
UGIM 2018 SYMPOSIUM | Program Schedule
Historical UGIM Host Institutions 1st*
1975
University of Cincinnati
2nd
1977
University of South Florida
3rd
1979
Texas Tech University
4th
1981
Mississippi State
5th
1983
Texas A&M
6th
1985
Auburn University
7th
1987
Rochester Institute of Technology
8th
1989
M2C Marlborough Massachusetts
9th
1991
Florida Institute of Technology
10th
1993
Research Triangle Park
11th
1995
University of Texas Austin
12th
1997
Rochester Institute of Technology
13th
1999
University of Minnesota
14th
2001
Virginia Commonwealth University
15th
2003
Boise State University
16th
2006
San Jose State University
17th
2008
University of Louisville
18th
2010
Purdue University
19th
2012
University of California Berkeley
20th
2014
Harvard University
21st
2016
University of Utah
22nd
2018
University of Pennsylvania
*Numbering based on extant proceedings. Please notify the host of any earlier meetings
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About the Singh Center for Nanotechnology Named in honor of Krishna P. Singh, a Penn alumnus, the Singh Center for Nanotechnology is centered around four major research facilities, all featuring state-of-the-art equipment for research in nanoscale characterization, measurement, and fabrication: the Quattrone Nanofabrication Facility, the Nanoscale Characterization Facility, the Scanning and Local Probe Facility, and the Material Property Measurement Facility. The multi-user facilities are vital to the research and educational programs at Penn and are leveraged by partner institutions as well as local industry within the Mid-Atlantic region. Unifying these central resources fosters the exchange of scientific ideas and the development of nanoscale science and technology, brings together crosscutting capabilities and the staffing to support these tools, and provides the modern infrastructure necessary to establish a regional center for nanotechnology. The Center is the Mid-Atlantic node of the NNCI, the National Nanotechnology Coordinated Infrastructure, which is funded by the National Science Foundation.
Credits Cover Photography: Scott Spitzer, Office of University Communications, University of Pennsylvania Additional Photography : John Carlano John Russell Albert Vecerka | Esto Felice Macera Design by Group M | www.group-m.com All rights reserved.
Krishna P. Singh Center for Nanotechnology University of Pennsylvania 3205 Walnut Street Philadelphia, PA 19104 Website: www.nano.upenn.edu Email: info@nano.upenn.edu Visit us on Facebook: www.facebook.com/singhcenternano/ Follow us on Twitter: twitter.com/UPennSinghNano
Member National Nanotechnology Coordinated Infrastructure
University of Pennsylvania