NANOTECHNOLOGY MINOR 371
Basic nanotech Process (NANO 312) Materials in Nanotechnology (NANO 313) Patterning in Nanotechnology (NANO 314) Materials Modifications and Applications (NANO 315) Characterization, Testing and Structures (NANO 316)
3 Credits 3 Credits 3 Credits 3 Credits 3 Credits
It is recommended but not required that students complete Biochemistry at Gannon (CHEM 366). Nanotechnology research opportunities are also available at Gannon.
COURSE DESCRIPTIONS: The following courses are offered and must be completed, concurrently, at Pennsylvania State University’s NACK Center. Courses are offered every semester, Fall, spring, and summer but space availability is limited so applicants must notify the advisor promptly of their intention to attend. Course will be awarded to the Gannon University transcript. NANO 311: Materials, Safety, and Equipment Overview for Nanotechnology This course provides an overview of the materials, safety and equipment issues encountered in the practice of “top down” and “bottom up” nanofabrication. It focuses on environment, health, and safety (EHS) issues in equipment operation and materials handling. Topics to be covered include: cleanroom operation, OSHA lab standard safety training, health issues, biosafety levels (BSL) guidelines, and environmental concerns. Safety issues dealing with nanofabrication equipment, materials, and processing will also be discussed including those pertinent to biological materials, wet benches, thermal processing tools, plasma based equipment, optial, e-beam, stamping and embossing lithography tools, vacuum systems and pumps, gas delivery systems and toxic substance handling and detection. Specific material handling procedures to be discussed will include corrosive, flammable, and toxic materials, biological materials, carcinogenic materials, DI water, solvents, cleaners, photo resists, developers, metals, acids, and bases. The course will also concentrate on safe and responsible equipment maintenance and operation. This aspect will be carried out as part of the equipment overview emphasizing EHS issues. 3 credits NANO 312: Basic Nanotechnology Processes This course is the hands-on introduction to the processing involved in “top down”, “bottom up”, and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow needed to fabricate devices and structures. Students learn to appreciate processing and manufacturing concerns including process control, contamination, yield, and processing interaction. The students design process flows for micro- and nano-scale systems. Students learn the similarities and differences in “top down” and “bottom up” equipment and process flows by undertaking hands-on processing. This hands-on exposure covers basic nanofabrication processes including colloidal chemistry, self-assembly, catalyzed nanoparticle growth, lithography, wet and dry etching, physical vapor deposition, and chemical vapor deposition. 3 credits NANO 313: Materials in Nanotechnology This course is an in-depth, hands-on exposure to materials fabrication approaches used in nanofabrication. Students learn that these processes can be guided by chemical or physical means or by some combination of these. Hands-on exposure will include self-assembly; colloidal chemistry; atmosphere, low-pressure and plasma enhanced chemical vapor deposition; sputtering; thermal and electron beam evaporation; nebulization and spin-on techniques. This course is designed to give students hands-on experience in depositing, fabricating and self-assembling a wide variety of materials tailored for their mechanical, electrical, optical, magnetic, and biological properties. 3 credits NANO 314: Patterning for Nanotechnology This course is a hands-on treatment of all aspects of advanced pattern transfer and pattern