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Singh Center for Nanotechnology

Member | NSF | National Nanotechnology Coordinated Infrastructure

University of Pennsylvania

Singh Center for Nanotechnology at Penn Located in the heart of the Mid-Atlantic region, the Singh Center for Nanotechnology at the University of Pennsylvania was created to offer a collaborative environment for research, education, and innovation. Our Center provides an opportunity to use specialized equipment in a shared multi-user facility, with individual laboratory space for faculty research in nanotechnology, as well as public and researcher interaction space to facilitate discussion of new ideas. The Center is designed to meet the complex, critical needs of investigators performing state-of-the-art research in all aspects of nanotechnology.

24/7 access to state-of-the-art equipment and world class facilities

Access to 50 researchers from the University of Pennsylvania

Staff expertise: 50% of our technical staff possess PhDs

National and Regional Impact UNIVERSITY OF PENNSYLVANIA Our facility encourages the collaboration, exchange, and integration of knowledge that characterizes the study of this emerging field, and combines the resources of both the School of Arts and Sciences (SAS) and the School of Engineering and Applied Science (SEAS). Our Center focuses on increased access by engaging the Greater Philadelphia Region and far beyond. Our core endeavors are to support teaching, research, service and Scholarly Commons commercialization at the micro- and nanoscale.

NNCI | National Nanotechnology Coordinated Infrastructure MANTH | Mid-Atlantic Nanotechnology Hub Scholarly Commons

University of Pennsylvania

NNCI | National Nanotechnology Coordinated Infrastructure

School of Arts and Sciences

MANTH | Mid-Atlantic Nanotechnology Hub University of Pennsylvania

Scholarly Commons

School of Arts and Sciences

NNCI | National Nanotechnology Coordinated Infrastructure

Singh Center

MANTH | Mid-Atlantic Nanotechnology Hub

Singh Center

School of Engineering and Applied Science University of Pennsylvania

School of Engineering and Applied Science

School of Arts and Sciences Singh Center

Working With Us

The Singh Center for Nanotechnology facilities are open to anyone interested in project development or research. Projects can be performed in any of the following options:


Self Directed* – Self-managed projects using facility equipment/resources


Assisted – Our staff has the experience and capability to provide assisted support to conduct experiments as desired


Collaborative – Singh Center staff and University of Pennsylvania faculty can work in collaboration with researchers from industry and other academic institutions.

For more information, please contact *users must complete facility orientation training before facility access is provided.

MANTH The Mid-Atlantic Nanotechnology Hub at the Singh Center for Nanotechnology has been created to enable researchers in the industry-dense and academically-rich environment of Philadelphia and the surrounding mid-Atlantic region by providing access to a state-of-theart fabrication and characterization facility and the associated intellectual nanotechnology expertise. • 5 Government Labs • 16 Major Research Universities • Highly accessible near major airports and US I95

Singh Center for Nanotechnology at Penn

NNCI National Nanotechnology Coordinated Infrastructure Facility Member The National Science Foundation (NSF) supports 16 user facility sites, their affiliated partners, and a coordinating office. The NNCI sites provide researchers from academia, small and large companies, and government with access to university user facilities with leading-edge fabrication and characterization tools, instrumentation, and expertise within all disciplines of nanoscale science, engineering and technology.

All of the NNCI facilities (many sites have partners and multiple locations) are open for access by students and professionals from around the country and globally. The facilities within NNCI are research and development facilities, supporting both academic research and product and process development. NNCI sites have experience supporting technology innovation and commercialization, for start-ups as well as larger and more established companies.

Educational Outreach ScholarlyCommons is a repository for the scholarly output of researchers at the University of Pennsylvania. It promotes dissemination of their work, and preserves it in a freely-accessible, long-term archive. An effort to alleviate recent pressures to restrict access to new knowledge, Scholarly Commons allows researchers and other interested readers anywhere in the world to learn about and keep up to date with Penn scholarship. Administered by the Penn Libraries, ScholarlyCommons contains materials chosen by participating units: departments, schools, centers and institutes at Penn. Users have access to materials in ScholarlyCommons free of charge.

67 Total Papers | Over 10,000 Downloads per Year

Singh Center for Nanotechnology Initiatives ESE 536 Course: The goal of this course is to give students a hands-on laboratory experience to complement their theoretical knowledge of nanoscience and nanotechnology.

User Profile

NNCI REU Summer Program: A summer research program where students who have a “Junior” academic standing participate in designed project hosted by the Singh Center for Nanotechnology. High School Outreach: Throughout the year, the Singh Center for Nanotechnology hosts facility tours to high school students from the Mid-Atlantic Region. Nano Day: Regional high school teachers bring their students for a packed day of tours, demos and activities that showcase the facilities, research and excitement of the Singh Center and Penn Engineering. League of United Latin American Citizen’s National Educational Service Centers (LULAC) Upward Bound Program Fieldtrip Site: The Singh Center coordinates monthly after-school programming in Penn labs and facilities for LNESC Upward Bound Students. Nano Master’s Program: This 10-course Nanotechnology Master’s in Engineering program provides a rigorous base in the fundamentals of micro- and nanotechnology within a curriculum that is flexible enough to tailor for a breadth of academic and professional goals.

Research & Initiatives Research Areas • Nanophotonics

Waveguide Structures

Diamond Photonics

• Mechanics

Micro-Mechanical Systems


• Microfluidics

Droplet Generators

Particle Sorting

• Nanomaterials

Nanowire Electronics

2-D Materials

• Biological Applications

Implantable Devices

Wearable Sensors

• Microsystems

Energy Harvester

Bio-Marker Detection

Access to over 50 researchers from the University of Pennsylvania

Singh Center for Nanotechnology Initiatives Seed Grant Competition: Designed to encourage individuals and companies from the Mid-Atlantic region to design or prototype technologies using nanotechnology related tools and equipment. Open Process Sessions: Each week during the semester, Singh Center staff members hold an open forum to users in the Penn fabrication community to offer solutions for fabrication problems researchers encounter.

Patent Achievements 2014













US Non-Provisional










Total Patent Applications









Disclosures Patent Applications

Cleanroom Summer School: The seven-series topic workshop consists of lectures, device design sessions and hands-on fabrication techniques. Nanotechnology Technician Training Program: The Singh Center for Nanotechnology, in partnership with the Community College of Philadelphia, is developing a workforce training program to provide essential training and skills to technicians in the field of Nanotechnology. Short Courses: Soft Lithography, Microfluidics, Electron Beam Lithography and Latest Advances in Microscopy courses are open to the public.

Workshops: Our workshops focus on sharing the latest innovative methods, tools, and training in nanoscience.

Patents Issued Foreign Patents Issued


US Patents Issued






Total Patents Issued












Patent License







Sponsored Research






Total Agreements






The totals provided are based on the UPenn fiscal calendar. Due to the timing of this publication 2016 totals are a six month accumulation.

World Class Facilities Quattrone Nanofabrication Facility

Scanning and Local Probe Facility

An 11,000 square-foot next-generation Cleanroom

The Scanning and Local Probe Facility is a unique

Facility for micro/nanofabrication, including tooling for

test bed for novel nanoscale devices and materials

nanoscale and soft materials integration and a novel

aiding nano/biotechnology research. The Facility

nano/bio bay serves as the home of the Quattrone

contains multiple atomic force microscopes for

Nanofabrication Facility (QNF). QNF supports

measuring the size, shape, and electro-mechanical

nanoelectronics, nanomaterials development and

properties of materials, devices, and structures with

integration, soft matter, and MEMS/NEMS. In addition,

nanometer precision. Two of these AFMs work with

a complimentary facility for soft materials and laser

a confocal Raman microscope for combined force

micromachining is maintained by QNF for diverse

and optical measurements, while another is paired

materials processing, microfluidics, and lab-on-chip

with a fluorescence microscope. High vacuum

activities. Our core tools provide process capabilities

AFMs/STMs provide even more precise imaging

in electron-beam and optical lithography, physical and

capabilities under ultra-clean conditions and our

chemical vapor deposition, dry and wet processing,

electronic probe station offers 0-20 GHz

metrology, and device characterization. For device

measurement of circuits and resonators from

packaging and hybridization, there is a suite of backend

-190 to 150 C.

equipment available for wirebonding, wafer bonding, electrical testing and wafer dicing.

Nanoscale Characterization

Property Measurement Facility

The Nanoscale Characterization Facility (NCF) supports

A Property Measurement Facility provides state-of-

state-of-the-art tools for electron- and ion-beam

the-art measurement capabilities in magnetometry,

analyses for Penn, as well as other university and

optics, electrical and thermal transport. The Property

industry users in the Philadelphia region. Our facility

Measurement Facility was established to provide

comprises a suite of rooms specifically designed to host

researchers on campus with access to state-of-the-art

current and next-generation scanning electron and

measurement capabilities that involve specialized

transmission electron microscopes. The facility

instrumentation not easily acquired or maintained

includes an integrated sample preparation laboratory

at the single-investigator level. Capabilities include

with complete sample coating and plasma cleaning

magnetometry, thermal and electrical transport, heat

capabilities, as well as cryogenic TEM sample

capacity, and UV-vis-IR optics. The goal of the facility

preparation equipment. The NCF also maintains an ion

is to catalyze research by allowing researchers to

scattering laboratory featuring a 5.1 MeV ion accelerator

obtain sophisticated data using experimental tools

for thin film characterization and ion implantation. A

with which they may have little to no prior experience.

computer suite for offline image and data analysis and

In this way, the facility helps scientists to explore

office and meeting space for staff and industrial users

new research avenues and expand their scientific

round out the facility in the Singh Center.


Our Research and Collaboration Facilities and Examples of Research:

Quattrone Nanofabrication Soft Lithography Microfluidics Biomedical (Bio Sensors) Medical Fundamental Materials Physics Research 2-D Materials

Nanoscale Characterization Facility High Resolution Electron Microscopy Ion Scattering Laboratory

Scanning and Local Probe Facility Material Characterization 2-D Materials (Graphene MoS2) Tribology Chemical Characterization Bio-Medical (Invivo/Cell Tissues)

Property Measurement Facility Temperature Characterization Magnetic Electronic Thermal Properties

24 / 7 Access to Equipment • 100 + pieces of equipment under one roof • 11,000 SF class 100/1000 cleanroom nanofabrication facility • Specialized fabrication facilities for laser micromachining, 3-D printing, soft lithography, packaging • 11,000 SF nanoscale characterization and processing facility • Full complement of characterization tools


© Weiss/Manfredi

• Extensive scanning probe facility for tip-based fabrication and characterization including aqueous, cellular, cryogenic, and vacuum environments • Focused ion beam fabrication • Advanced in situ testing from micro- to nanoscale • Dedicated microfluidics lab

Singh Center Equipment | Instrumentation Index

Quattrone Nanofabrication

Quattrone Nanofabrication


Lithography Nanoscribe GT 3-D Lithography Process Bake Stations Litho Simulation Tools: BEAMER, LAB and TRACER Dimatix Ink Jet DMP 2831 Elionix ELS-7500EX E-Beam Lithography System Heidelberg DWL 66+ Laser Writer Nanonex NX2600 Nanoimprint/Mask Aligner SUSS MicroTec SCIL Nanoimprint System Positive Resist Spinners Negative Resist Spinners E-Beam Resist Spinners SUSS MicroTec MA6 Gen3 Mask Aligner YES 1224P HMDS/IR Oven SUSS MicroTec AS8 AltaSpray KLA Tencor P7 2D profilometer Positive Rsist Oven Negative Resist Oven E-beam Resist/Vacuum Oven

ADT 7100 Dicing Saw EVG 510 Wafer Bonder EVG 620 Wafer Bond Aligner Kulicke 4523 Wire Bonder

Deposition: Kurt Lesker Nano36 Thermal Evaporator Kurt Lesker PVD-75 Thermal/E-Beam Evaporator Kurt Lesker PVD-75 DC/RF Sputter Kurt Lesker PVD075 E-Beam Evaporator Denton Explorer-14 DC/RF Sputter Ultratech/CNT Savannah S200 ALD Ultratech/CNT Fiji ALD Oxford PlasmaLab 100 PECVD MRL Cyclone Atmospheric and LPCVD Furnaces Specialty Coating Systems PDS2010 Parylene Deposition System Dry Etch:

Oxford Plasmalab 80 RIE Anatech SCE-108 Barrel Asher SPTS Deep Silicon Etch Oxford PlasmaLab 80 Plus RIE Oxford PlasmaPro Cobra ICP/RIE SPTS Xactix Xetch XeF2 Anatech SCE-106 Barrel Asher

Electrical Characterization Agilent Keithley Source Meter Lucas Labs 4 Point Probe Inspection Olympus Scope 1(2) Zeiss Axio Imager M2m (4) Zeiss SmartZoom

Metrology Filmetrics F40 Filmetrics F50 JA Woollam V Vase KLA Tencor P7 1 Profilometer KLA Tencor P7 2 Profilometer Rudolph Ellipsometer Zygo New View 7300 Soft Lithography: Anatech SCE-106 Barrel Asher ABM Mask Aligner Cee 200X Spinner 193nm Excimer Micromachining Laser 532nm Green Micromachining Laser Zeiss Smartzoom5 2D/3D Optical Microscope Wet Process Stations Tousimis Model 931-C Critical Point Dryer 13 Benches Verteq Superclean Spin Rinse Dryer

Singh Center Equipment | Instrumentation Index

Nanoscale Characterization

Property Measurement Group

Scanning Electron Microscopy JEOL 7500F HRSEM Quanta 600 FEG ESEM

Quantuum Design PPMS 9 Tesla with Evercool Quantuum Design PPMS 9 Tesla with Evercool II Quantuum Design PPMS 9 T Princeton Instruments TriVista Spectrometer with Si and InGAs array detectors

Focused Ion Beam FEI Strata DB235 FIB Transmission Electron Microscopy JEOL 2010F TEM/STEM JEOL 2100 HRTEM Ion Scattering NEC Mini-Tandem 5.1. MeV Ion Accelerator

Scanning and Local Probe Agilent 5500 AFM Asylum MFP-3D AFM Omicron / SPECS UHV Variable Temperature AFM / STM Omicron / RHK High Vacuum STM Asylum MFP-3D Bio with TIRF Optics Bruker Dimension Icon NT-MDT Confocal Raman / NSOM / AFM Lakeshore Cryogenic Probe Station

Facilities Contact: For more information, please contact Visiting Address Krishna P. Singh Center for Nanotechnology University of Pennsylvania 3205 Walnut Street Philadelphia, PA 19104 Nanorods


Website: Email: Visit us on Facebook: Follow us on Twitter:

Tissue Engineering

Soft Lithography

Magnetic Materials

MicroMechanical Systems


Wearable Technology

Carbon Nanotubes Sensors

Quantum Dots

Krishna P. Singh Center for Nanotechnology University of Pennsylvania 3205 Walnut Street Philadelphia, PA 19104

Energy Extraction



Molecular Imaging

Surfaces and Coatings

Cancer Detection

Solar Cells

Nano Bio-Medicine





MEMS Technology

DNA Synthesis



3-D Printing

2017 Singh Center for Nanotechnology Brochure  

A publication overview of the Singh Center for Nanotechnology at the University of Pennsylvania. A research facility serving the needs of i...

2017 Singh Center for Nanotechnology Brochure  

A publication overview of the Singh Center for Nanotechnology at the University of Pennsylvania. A research facility serving the needs of i...