Autumn98

Page 1

VOLUME I ISSUE

2

AUTUMN 1998

$5.00 US

Yield Management

S O L U T I O N S Yield Enhancement and Process Control Strategies for the Semiconductor Industry

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COVER STORY: LITHOGRAPHY DEFECTS — THE HIDDEN YIELD KILLERS

13 IDENTIFYING PROCESS DRIFT WITH CD SEMS 25 INSPECTION IMPLICATIONS A DESIGN RULE SHRINK

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