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M-02025 Robot Brochure.qxd

8/31/06

3:25 PM

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PREALIGNERS

TRACK SYSTEMS

Both integrated and external prealigners use transmissive sensors located within the prealigner

Kensington Laboratories’ standard track

to sense the wafer’s edge and accurately measure location and orientation during a single rotation.

solutions provide high acceleration and overall

They accurately detect any combination of SEMI standard wafer alignment features.

speed in a reliable and proven design. The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered

External

systems. Our track systems can also be

Our external prealigner is designed to mount

equipped with integrated alignment features

inside the front end of the tool. It provides

that assure the locational accuracy of other

high throughput, up to 450 wafers per hour,

critical automation elements of the system,

while maintaining cleanliness, accuracy,

such as 300mm pod doors and load ports.

and reliability. It also allows our edge grip and

Integrated

Unlike typical linear motor driven track systems

transmissive sensor equipped robots to

Track System

Length

Specifications/ Features

perform an automated one-step self teach.

2 Station Track

26 in. (660.4mm)

Acceleration

3 Station Track

40.62 in. (1031.8mm)

Velocity

4 Station Track

60.5 in. (1536.7mm)

Accuracy

The integrated prealigner is designed to mount on the shoulder of the robot, minimizing

Wafer Sizes

the footprint of the robot and prealigner

Rotational Accuracy

< 2 arc sec

system and maximizing cleanliness, accuracy,

Centration Accuracy

< 0.002 in (0.051mm)

125mm

150mm

200mm

and

that are incapable of sensing objects and can

125 in./s2, 2G's (3175.0mm/s2) Max 50 in./s (1270.0mm/s) Max 0.0001 in. (0.003mm)

300mm

125mm

150mm

200mm

and

Rotational Accuracy

< 2 arc sec

Centration Accuracy

< 0.002 in (0.051mm)

and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage.

and reliability. Wafer Sizes

be extremely dangerous to both operators

END EFFECTORS

300mm

Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications. Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements. Wafer Sizes

100mm

125mm

150mm

t r a n s m i s s i v e

300mm vacuum grip

Kensington Laboratories’ single arm robots can be equipped with a supinating wrist for an

Single Arm Robots

340˚

Dual Arm Robots

n/a

and

300mm

Edge Grip and Vacuum Grip

Grip Types

S U P I N AT I O N

200mm

b e a m

t e c h n o l o g y

300mm edge grip

200mm vacuum grip

standard vacuum grip double

additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or inverted mode.

forked vacuum grip double

standard vacuum grip

forked vacuum grip

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Meet your 300mm Automation Partner  

Kensington Laboratories’ is an advanced robotics technology leader committed to developing and manufacturing the highest quality, most relia...

Meet your 300mm Automation Partner  

Kensington Laboratories’ is an advanced robotics technology leader committed to developing and manufacturing the highest quality, most relia...

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