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GENESIS MATERIAL TECHNOLOGY 895-F Hampshire Rd., Stow, Ohio, 44224 Office: (330) 920-8550 Fax: (330) 920-8551

www.genesismt.com

AQ 3000 DC (Dip Coating) Waterborne Liquid Photoresist For Photochemical Machining

General Information AQ Series Imaging Products AQ 3000 is a negative acting liquid photoimageable photoresist designed to eliminate VOCs and harmful solvents from the photoresist process. It is a completely waterborne product, which can be used in all standard coating dip coating equipment. AQ 3000 is completely water-reducible to meet specific viscosity requirements. It is compatible with standard coating, exposure and DES processes. The AQ series helps reduce the carbon footprint in the PCM manufacturing process by eliminating VOC emissions.

Waterborne VOC Free Hi Performance AQ 2000 Soldermask AQ 2100 Legend Ink AQ 3000 Photoresist

AQ 3000 Highlights • Completely Waterborne • Solvent-free. No VOCs • LDI Compatible • 10 mJ Exposures • Hi Resolution • Superior Adhesion • Cleans up in soap and water • Supplied as 42% solids • For all standard coating equipment • One part system

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Process Parameters Viscosity:

60-80 cps.

Drying Temperature:

250 F* (120 –125 C)

o

o

* Box oven temperature, actual surface temperature 180F

Drying Time:

2 Minutes

Exposure Energy:

35-80 mJ/cm Standard Exposure Equipment

2

(10-20 mJ/cm2 exposures have been achieved for 1 mil resolution ) Sensitivity

7-9 Steps (Stauffer 21 step tablet)

Developing solution:

Potassium Carbonate, 0.5-0.75%

Developing Temperature:

85F (30oC)

Developing Dwell:

60 Seconds

Developing Pressure:

15-30 PSI

Etching Solution:

Cupric Chloride, HCl, 2.5 – 2.8 N Also ferric chloride o

o

Etching Temperature:

122 F (50 C)

Etching Pressure:

15 – 30 PSI

Stripping Solution:

Sodium Hydroxide, 2-3%

Stripping Temperature:

140oF (60oC)

Stripping Pressure:

10 psi

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AQ 3000 DC is shipped at a ready to use viscosity of 60-80 cps, (Brookfield Viscometer, LV Spindle # 2 @ 100 RPM.) Resist viscosity should be monitored periodically due to water evaporation. Water adds can be made simply by adding DI water with sufficient mixing. Temperature should be maintained at a constant. The following charts show the dependence of AQ 3000 DC viscosity on temperature and % solids. AQ 3000 DC Viscosity VS Temperature (Brookfield DV-E Viscometer, LV spindle #2 at 100rpm) 70 59

Viscosity (cP)

60

55

51

50

47 42

40

44

30 20 10 0 10

15

20

25

30

35

40

45

o

Temperature ( C)

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-4AQ 3000 DC Viscosity vs. % Solids 100.00 95.00

Data from 5.29.07, Lab Book # 14 AQ 3000 DC Lot # 5.25.07.1

90.00 85.00 80.00 75.00 70.00

Viscosity cps

65.00 60.00 55.00 50.00 45.00 40.00 35.00 30.00 25.00 20.00 15.00 10.00 5.00 0.00 0

5

10

15

20

25

30

35

40

45

50

% Solids

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AQ 3000 DC