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large area nanostructures fabrication catalogue


type (1) | lines

SQUARE

TRIANGULAR

available features

SQUARE

type (2) | posts

ROUND

SQUARE

available features

ROUND


type (3) | holes

SQUARE

ROUND

available features

PYRAMIDAL

available materials Most structures shown in this brochure are made of silicon but many of them can be fabricated using other materials like glass, HfO2, chromium, aluminum, iron, titanium, gold, silver... As an example, this section shows images of structures made of HfO2, glass and gold. Glass

Gold on glass

HfO2 on GaAs


about FideNa FideNa (Foundation for R&D in Nanotechnology) is a research center working since 2007 to foster the use of nanotechnology by the industry in Navarra. Navarra is a strong industrial region of Spain home to some major players in Renewable Energies, Biotech, Automotive & Food Processing. On top of working as a technology provider for third parties, FideNa develops proprietary technology to be transferred to industry. With that aim FideNa defines its own R+D+i lines, which are often carried out in collaboration with universities and other tech centers. FideNa has a team of 17 people (growing), with several years of experience in nanotechnology & technology transfer. FideNa focuses its efforts in the following three areas: nanofab, nanobio and nanomat.

about nanofab [expertise] this catalogue shows FideNa’s capability for nanolithography fabrication. FideNa has been working on this field since 2008, in collaboration with MIT groups with more than 20 year’s experience. As an outcome, FideNa can make patterns of posts, holes or lines, with pitches down to 180nm and features down to 30nm, over areas as large as Ø10cm. Typical materials would be Silicon or Glass, coated with metals or semiconductors if necessary. [applications] energy (photovoltaic & thermo-solar); optics (control of transmission & emission of energy); surface related properties tailoring (hydrophobicity, hydrophilicity, tribology...); calibration standards for microscopy (period measurements can be provided with an accuracy lower than 0.2%); biosensing (increase in sensitivity to optical signals); etc.

© FideNa [fundación i+d en nanotecnología] 2013 | www.fidena.es |  info@fidena.es |  +34 948166177

Nanolithography | Large area structures  

Nanolithography brochure

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