Modular Chemical Blending & Delivery Solutions CT |CONTROL + DELIVERY + BLEND + TANK +VMB Advancing Chemical Technologies for Semiconductors, Clean Energy & Life Sciences.
Technologies that look further.
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CONTENT
Modular Chemical Blending & Delivery Solutions page 4
CT | Control ............................................................................... page 5
CT | Delivery Modules page 6
CT | Blend Modules page 8
CT | Tank Modules .................................................................... page 10
CT | Valve Manifold Box (VMB) page 12
CT | Options ............................................................................... page 13
CT | Custom projects page 15
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MODULAR CHEMICAL BLENDING & DELIVERY SOLUTIONS
FAST CHEMTECH chemical blending and delivery systems, unlike anything else available on the market today, allow our customers to configure and design chemical systems according to their individual process and factory requirements. The systems are designed to accurately blend and deliver ultra-pure chemicals to the point of consumption from any type of source container and with full redundancy, and metrology if required. The modular configuration allows for standardisation in the control but the ability and reconfigure should their process or volume demand change through the product lifecycle. Modules can be located in any configuration to accommodate various space and facility constraints.
FAST CHEMTECH systems are designed for demanding bulk chemical blending and delivery applications where ultra-pure and safe processing will ensure the highest yield.
Our systems offer:
• A configurable range (for all purity grades, all consumptions and all budgets)
• A modular concept that can be adapted to our customer needs
• High reliability
• Integrated metrology options
• Easy maintenance (user-friendly software, settings, etc.)
• Over 20 years’ experience
4 Modular Chemical Blending & Delivery Solutions
CT |CONTROL CT |DELIVERY
CT |BLEND
CT |TANK
CT |VMB
CT |CONTROL
The CT | CONTROL Modules incorporate a centralized means to corral the electrical and control components for the CT Modular series helping optimize the entire process, enhance safety, increase uptime and ensure blend and delivery stability.
It uses standard off the shelf components and an industrial PLC and HMI control displaying the system PI&D status, with user friendly input and output screens, recipe selection, along with alarm logging etc. The system can collect Key Input Process Variables that allows engineers to have full visibility of their process.
Product Name CT | CONTROL
Category Control
Dimensions
Cabinet Nominal Height: 2018mm
Cabinet Width: 400mm
Cabinet Depth: 890mm
Key Features
FM4910 PVC_C Cabinet
Industrial PLC & HMI touchscreen
Safety Features
Segregated maintenance compartments
Door interlocks
Audible alarms
Exhaust monitoring
Semi, CE compliant
Stack light
Password protected user interface
Password protected recipe manager for process parameters
Options Remote HMI
KPIV data publishing option
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CT |DELIVERY MODULES
The CT | Delivery Modules allow the automatic distribution of ultrapure chemical acids and bases, from totes and drums to the Points-of-Use (POU), or to the blending and day tank modules using controlled pumping. The design philosophy aims to achieve high uptime and reliability through the use of multiple back-up modes, and the various modular layouts with easy interchangeability allowing the end user to swap format easily without having to replace the complete system. A truly flexible system that can meet your changing production needs.
CT |CONTROL
6 Product CT | 2x25 CT | 200 CT | 400 CT | 1000 CT | 2000 Height (mm) 2018 2018 2018 2018 2018 Width (mm) 1000 1000 1800 600 600 Depth (mm) 890 890 890 980 980 Key Features CT | 2x25 CT | 200 CT | 400 CT | 1000 CT | 2000 Load cell disp volume measurement ✓ ✓ ✓ Tote empty notification ✓ ✓ Auto-switchover ✓ ✓ ✓ AODD dispense pumps ✓ ✓ ✓ ✓ ✓ PVC_C/PFA materials of construction ✓ ✓ ✓ ✓ ✓ FM4910 PVC_C cabinet ✓ ✓ ✓ ✓ ✓ Auto flushing of lines ✓ ✓ ✓ ✓ ✓ Drum capacity 2 x 25L 25L up to 220L Up to 2 x 220L Tote capacity Up to 1000L Up to 2 x 1000L Easyroll base / HMI interface Easyroll Base Easyroll Base HMI Interface HMI Interface Pre-mix recirculation sequence ✓ ✓ ✓ ✓ ✓ Leakproof quick connections ✓ ✓ ✓ ✓ ✓ Safety features CT | 2x25 CT | 200 CT | 400 CT | 1000 CT | 2000 Segregated maintenance compartments ✓ ✓ Cabinet leak detection and door ✓ ✓ ✓ ✓ ✓ Audible alarms ✓ ✓ ✓ Exhaust monitoring ✓ ✓ ✓ ✓ ✓ Semi, CE compliant ✓ ✓ ✓ ✓ ✓ 110% spill containment ✓ ✓ ✓Password protected user interface ✓ ✓ Password protected recipe manager for process parameters ✓ ✓ Options CT | 2x25 CT | 200 CT | 400 CT | 1000 CT | 2000 Redundant pump ✓ ✓ ✓ ✓ ✓ Auto variable speed indrum mixer ✓ ✓PH meter ✓ ✓ ✓ ✓ ✓ Conductivity meter ✓ ✓
Modular Chemical Blending & Delivery Solutions
CT |DELIVERY MODULES
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CT |2x25 CT |200 CT |400 CT |1000 CT |2000 fastchemtech.co.uk
CT |BLEND MODULES
The various CT | Blend Modules provide a medium to large volume chemical blending capability suitable for standard applications such as TMAH (TetraMethylAmmonium Hydroxide), HF (Hydrogen Fluoride) or NH4OH (Ammonia Solution) dilution etc. The system uses weight-based methodology blending. The blend tank is mounted on a scale and the constituents are added sequentially as required. A low shear maglev pump is used to homogenize the mix, that can be validated by various metrology options.
Inline blending modular options can also offer a costeffective option for low-medium volume post CMP chemistries etc.
CT |CONTROL
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Modular Chemical Blending & Delivery Solutions Product CT | INLINE CT | INLINE 2 CT | SBU (Single Blend Unit) CT | DBU (Double Blend Unit) CT | SBUD (Single Blend With Integrated Day Tank) Height (mm) 2018 2018 2018 2018 2018 Width (mm) 400 800 1000 1620 1620 Depth (mm) 890 890 890 890 890 Key Features CT | INLINE CT | INLINE 2 CT | SBU CT | DBU CT | SBUD Weight-Based Blending Technology InLine InLine Weight-Based Weight-Based Weight-Based Tank Options 5L Chemical hold tank 2 x 5L Chemical hold tank One blend tank & one day tank, various (user configurable) sizes Two blend tanks & two day tanks, various (user configurable) sizes Spike tank, blend tank & one day tank, various (user configurable) sizes Levitronix pumps Blend/dispense Blend/dispense Blend/dispense Blend/dispense Blend/dispense Blend capability resolution 0.01% By weight ✓ ✓ ✓ ✓ Blending chemicals Various Dilute Chemicals Two Dilute Chemicals Various Chemicals Various Chemicals Various Chemicals DI water rinsing of blend and day tanks ✓ ✓ ✓ ✓ ✓ PVC_C/PFA materials of construction ✓ ✓ ✓ ✓ ✓ FM4910 PVC_C Cabinet ✓ ✓ ✓ ✓ ✓ Accuracy to 1% by volume ✓ ✓ Safety features CT | INLINE CT | INLINE 2 CT | SBU CT | DBU CT | SBUD Cabinet leak detection and door interlocks ✓ ✓ ✓ ✓ ✓ Audible alarms ✓ ✓ Exhaust monitoring ✓ ✓ ✓ ✓ ✓ Semi, CE compliant ✓ ✓ ✓ ✓ ✓ 110% spill containment ✓ ✓ ✓ ✓ ✓ Options CT | INLINE CT | INLINE 2 CT | SBU CT | DBU CT | SBUD Single path filtration ✓ ✓ ✓ ✓ ✓ Dual path filtration ✓ ✓ Redundant pump ✓ ✓ ✓ PH meter ✓ ✓ ✓ ✓ ✓ Conductivity meter ✓ ✓ ✓ ✓ ✓ Density meter ✓ ✓ Concentration meter (ior) ✓ ✓ ✓ ✓ ✓ Sample port ✓ ✓ ✓
CT |BLEND MODULES
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CT |SBU (Single Blend Unit) CT |DBU (Double Blend Unit)
CT |INLINE CT |INLINE 2 fastchemtech.co.uk
CT |BUD (Single Blend with Integrated Day Tank)
CT |TANK MODULES
FAST CHEMTECH CT | TANK solutions offer multiple capacity and redundancy options that pair with the blending and delivery systems to provide continuous flow and pressure to the various processing systems within the fab.
CT |CONTROL
10 Product CT | DT100 CT | DT200 CT | DT400 CT | DT2x200 CT | DT1000 Height (mm) 2018 2018 2018 2018 2018 Width (mm) 1000 1000 1620 1800 2100 Depth (mm) 890 890 890 890 1750 Key Features CT | DT100 CT | DT200 CT | DT400 CT | DT2x200 CT | DT1000 Weight-based volume readabout ✓ ✓ ✓ ✓ ✓ Day Tank Size 100L Day tank 200L Day tank 400L Day tank 2 x 200L Day tank 1000L Day tank Levitronix dispense pumps ✓ ✓ ✓ ✓ ✓ Closed loop flow and pressure control ✓ ✓ ✓ ✓ ✓ DI water rinsing of day tanks ✓ ✓ ✓ ✓ ✓ PVC_C/PFA materials of construction ✓ ✓ ✓ ✓ ✓ FM4910 PVC_C Cabinet ✓ ✓ ✓ ✓ ✓ Safety features CT | DT100 CT | DT200 CT | DT400 CT | DT2x200 CT | DT1000 Cabinet leak detection and door interlocks ✓ ✓ ✓ ✓ ✓ Exhaust monitoring ✓ ✓ ✓ ✓ ✓ Semi, CE compliant ✓ ✓ ✓ ✓ ✓ 110% spill containment ✓ ✓ ✓ ✓ ✓ Options CT | DT100 CT | DT200 CT | DT400 CT | DT2x200 CT | DT1000 Single path filtration ✓ ✓ ✓ ✓ ✓ Dual path filtration ✓ ✓ Redundant filtration ✓ Redundant pump ✓ ✓ ✓ ✓ ✓ Auto variable speed InTank mixer ✓ ✓ InDrum Mixer ✓ PH meter ✓ ✓ ✓ ✓ ✓ Conductivity meter ✓ ✓ ✓ ✓ ✓ N2 for Blanketing ✓ ✓ ✓ ✓ ✓ Concentration meter (IOR) ✓ ✓ ✓ ✓ ✓
Modular Chemical Blending & Delivery Solutions
CT |TANK MODULES
11 fastchemtech.co.uk CT |DT100
|DT2x200 CT |DT200
|DT1000 CT |DT400
CT
CT
CT |VALVE MANIFOLD BOX
The CT VMB offers various standardised 4, 6, 8, 10 etc stick configurations installed in the supply loop of Delivery, Blend or Tanks Modules. The system features optimized layout and piping design to minimize equipment footprint and promote ease of installation, service and maintenance. The system is designed to have a large and clear PVC door for enhanced visibility and accessibility as well as a built-in leak sensor with remote communications to detect leaks inside the cabinet etc.
Product Name CT | Valve Manifold Box (VMB)
Category Valve Manifold Box (VMB)
Dimensions Varies by Option
Key Features FM4910 PVC_C Cabinet
Industrial PLC & HMI touchscreen
Safety Features Segregated maintenance compartments
Door interlocks
Audible alarms
Exhaust monitoring
Semi, CE compliant
Stack light
Password protected user interface
Password protected recipe manager for process parameters
Options Remote HMI
KPIV data publishing option
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Modular Chemical Blending & Delivery Solutions
CT |OPTIONS
Single path filtration
• 10" PFA filter housing
• Auto rinse and N2 purge
• Pressure differential
Dual path filtration
• Dual 10" PFA filter housing
• Auto rinse and N2 purge
• Pressure differential
Redundant pump
• Levitronix high purity pumps
• High MTBF
• Precision flow and pressure control
• Low shear
PH meter
• PH meter
• In line design
• Chemically compatible materials
Conductivity meter
• Inline measurement technology
• Chemically compatible materials
• Conductivity measurement100 μS/cm ... 2 S/cm
• Temperature measurement-15 ... +130 °C
• Measuring Range Resolution0.1 μS/cm
• Repeatability±(0.2% of the measured value+2 μS/cm)
• Response Time t90From 3 s (without filter) to 40 s (with slow filter)
Concentration meter
• Inline measurement technology
• Chemically compatible materials
• RI range**1.32 - 1.40 nD
Accuracy±2 x 104 nD (@ 20°C [68°F] from 1.332987 to 1.4000 nD)
Repeatability5 x 105 nD (in clear fluid @ 30°C [86°F])
Precision3 x 1-6 nD (in DI water (@ 20°C [68°F])
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CT |OPTIONS
Remote panel
• Remote HMI panel
Factory view software
• Centralised software monitoring platform
• User friendly
• Graphical user interface
• Remote monitoring
Process Parameter Monitoring
• Modbus data protocol
• Real time data publishing
• Event driven alarm control
• Communication with external building management system (BMS)
• Data logging & trending
Sample port
• To accommodate off-line analysis
• Protected Access
End of line pressure transducer
• For control / pressure loop
N2 blanket
• To prevent oxidation
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Modular Chemical Blending & Delivery Solutions
CT |CUSTOM PROJECTS
Most of our modular configurations meet the demands of our customers however some projects need bespoke customised solutions. We offer a consultation process that allows us to work closely with our stakeholders to define, understand and design a solution that meets their specific needs.
We have a partner network with significant chemical handling and processing knowledge and an experienced in-house team to provide the right solution for your process.
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T: +44 (0)28 7135 7740 E: info@fasttechnologies.com fastchemtech.co.uk