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Take a look at the results

60 55

100

System Data

50

95 90 85 80

45

75

530

65 60  

Transmission [%]

70

540

55

Light Sources

2 Quartz-Tungsten Halogen lamps, Plug & Play, 6000hrs life

Wavelength Range

Standard: 380nm to 1100nm Custom: According to customer specification

Operation Modes

Reflection, transmission on test glass or directly onto substrates

Detectors

Monochromatic: Photodiode according to wavelength range Broadband: Temperature stabilized, CCD array, 1024 pixels

GTC 621

6 measurement positions, transmission or reflection

GTC 1100

140 heated test glasses, mixed measurement

50 45 40 35 30 25 20 15 10 5 0

460

470

480

490

500

510

520

530

540

550

560

570

580

590

600

610

620

630

640

650

660

670

680

  Wavelength [nm]

Batch 1

Batch 2

Batch 3

Batch 4

Batch 5

Design

Batch 6

Batch 1 Batch 2 Batch 3 Batch 4 Batch 5 Batch 6 Design

max-min max-min (nm) (%)

T=50% 531.04 (rising edge)

531.19

532.45

531.84

530.86

530.66 531.71

1.79

0.34

T=50% 566.89 (falling edge)

566.91

568.53

567.88

566.81

566.50 568.07

2.03

0.36

Technique: Sputtering in MSP batch tool. Test schedule: 6 batches spread over 30 days, including non-consecutive runs. No prior test runs. GSM Mode: Broadband

Process repeatability: T50 ± 0.18% overall, even with non-consecutive runs.

About Evatec Evatec offers complete solutions for thin film deposition and etch in the optical and semiconductor markets. Evatec engineers are able to offer practical production advice from R&D to prototyping and mass production. We recognize that no single technique offers the answer to all problems. With a technology portfolio including standard and enhanced

Dichroics Bandpass & Edge Filters AR Coatings Laser Mirrors IR Blocking

evaporation as well as sputter, we are ready to offer sampling services and custom engineering to meet our customers individual needs. We provide sales and service through our global network of local offices. For more information visit us at www.evatecnet.com or contact our head office.

Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 info@evatecnet.com www.evatecnet.com

Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.

GSM Optical Monitor


GSM

GSM

Why Optical Monitoring?

GSM

The Evatec Solution

Configure Your System

Today’s enhanced electron beam and sputter deposition processes enable the production of thin films with high density, excellent temperature and environmental stabilities and a minimum of absorption making them ideal for high end optical applications including laser mirrors, sensors and colour separation. As demands on filter performance increase,

GSM Design Features

optical stacks become more complex and process times extend. Accurate, repeatable process control technology becomes essential for cost effective high yield production. Conventional, indirect quartz monitoring techniques measure changes

BAK Evaporator BAK Evaporator

Long lamp lifetimes Temperature drift elimination

Test Test glass glass Test glass

of oscillation frequency of a quartz crystal as it gets coated. Insitu optical monitoring techniques make direct measurements

Real Time “Unix” operating system

Calotte Calotte Calotte with with with Substrate Substrate Substrate

of changes of intensity from a beam of light transmitted through or reflected from a substrate (or test glass) during the coating

Optical Optical Head Head Optical Sender Sender Head Sender

Test Glass Glass Test Test Glass Changer Changer Changer

Optical fibre system connections

Evaporation Evaporation Evaporation Sources Sources Sources Sender Sender (in Sender (in reflection) reflection) (in reflection)

process. Such precise techniques enable edge repeatibilities of ± 0.3% or better making them ideal for the most demanding

Powerful endpoint detection algorithms

Receiver Receiver Receiver

thin film stack designs.

Monochromatic

Optical Optical Optical Head Head Head

In standard operation, the light intensity subsequent to

1

alongside the actual production substrates is measured at Thin Film Design Software

coating layer is terminated upon reaching predefined

operation. When operated in conjunction with our Khan process

intensities, with options including maxima or minima,

controller it offers a seamless production route from thin film stack Process File

generation, coating itself and customised process data logging. GSM SCREENSHOT Target Spectrum Start Spectrum Current Spectrum

Monitoring Strategy Generator

2

set up, operation and maintenance are simpler than ever. Plug and

mounting and alignment outside the vacuum system. We support industry standard thin film design software and offer a choice of algorithms for end point detection

Sputter Sputter Sputter Sources Sources Sources

absolute, or intensity values relative to the last measured maximum and minimum. A choice of GTC 621, or GTC1100 test glass changers is available according to application

Sender Receiver Sender Receiver Sender Receiver

excellent signal to noise ratios and test glasses can be

KHAN Coating Process Controller

elements allowing easy configuration of the system. Mechanical

standard 19 inch rack control unit, and compact heads have easy

Optical Head Head Optical Optical Head

needs. The technique has tight spectral resolution,

Our third generation modular concept integrates practical design

play sources and receivers are exchanged from the front of the

Drum with Drum with substrates substrates substrates

a specified wavelength through a monochromator. Each

Thin Film Design

The GSM1100 is available for both stand alone and fully integrated

design through user choice of end point strategy, process recipe

MSP Tool MSP Sputter Sputter Tool Drum with

transmission through or reflection from a test glass coated

Office

kept conveniently as permanent production records. Broadband

3

The GSM monitors the optical performance of the actual

RADIANCE Cluster Tool RADIANCE Cluster Tool Sender Sender Sender

substrate or test glass and the standard receiver is replaced

GSM1100 BB Optical Monitoring System

by a high performance spectrometer with temperature stabilized CCD array. This ensures optimum results over

Coating Tool

a whole spectral range and compensates for variation in coating rate and refractive indices. Measured spectra of each layer are stored for analysis.

Deposition Deposition Deposition Source Source Source

Receiver Receiver Receiver

Optical Optical Head Head Head Height Adjustment HeightOptical Adjustment Height Adjustment Table with with Table Table with substrates substrates substrates


GSM

GSM

Why Optical Monitoring?

GSM

The Evatec Solution

Configure Your System

Today’s enhanced electron beam and sputter deposition processes enable the production of thin films with high density, excellent temperature and environmental stabilities and a minimum of absorption making them ideal for high end optical applications including laser mirrors, sensors and colour separation. As demands on filter performance increase,

GSM Design Features

optical stacks become more complex and process times extend. Accurate, repeatable process control technology becomes essential for cost effective high yield production. Conventional, indirect quartz monitoring techniques measure changes

BAK Evaporator BAK Evaporator

Long lamp lifetimes Temperature drift elimination

Test Test glass glass Test glass

of oscillation frequency of a quartz crystal as it gets coated. Insitu optical monitoring techniques make direct measurements

Real Time “Unix” operating system

Calotte Calotte Calotte with with with Substrate Substrate Substrate

of changes of intensity from a beam of light transmitted through or reflected from a substrate (or test glass) during the coating

Optical Optical Head Head Optical Sender Sender Head Sender

Test Glass Glass Test Test Glass Changer Changer Changer

Optical fibre system connections

Evaporation Evaporation Evaporation Sources Sources Sources Sender Sender (in Sender (in reflection) reflection) (in reflection)

process. Such precise techniques enable edge repeatibilities of ± 0.3% or better making them ideal for the most demanding

Powerful endpoint detection algorithms

Receiver Receiver Receiver

thin film stack designs.

Monochromatic

Optical Optical Optical Head Head Head

In standard operation, the light intensity subsequent to

1

alongside the actual production substrates is measured at Thin Film Design Software

coating layer is terminated upon reaching predefined

operation. When operated in conjunction with our Khan process

intensities, with options including maxima or minima,

controller it offers a seamless production route from thin film stack Process File

generation, coating itself and customised process data logging. GSM SCREENSHOT Target Spectrum Start Spectrum Current Spectrum

Monitoring Strategy Generator

2

set up, operation and maintenance are simpler than ever. Plug and

mounting and alignment outside the vacuum system. We support industry standard thin film design software and offer a choice of algorithms for end point detection

Sputter Sputter Sputter Sources Sources Sources

absolute, or intensity values relative to the last measured maximum and minimum. A choice of GTC 621, or GTC1100 test glass changers is available according to application

Sender Receiver Sender Receiver Sender Receiver

excellent signal to noise ratios and test glasses can be

KHAN Coating Process Controller

elements allowing easy configuration of the system. Mechanical

standard 19 inch rack control unit, and compact heads have easy

Optical Head Head Optical Optical Head

needs. The technique has tight spectral resolution,

Our third generation modular concept integrates practical design

play sources and receivers are exchanged from the front of the

Drum with Drum with substrates substrates substrates

a specified wavelength through a monochromator. Each

Thin Film Design

The GSM1100 is available for both stand alone and fully integrated

design through user choice of end point strategy, process recipe

MSP Tool MSP Sputter Sputter Tool Drum with

transmission through or reflection from a test glass coated

Office

kept conveniently as permanent production records. Broadband

3

The GSM monitors the optical performance of the actual

RADIANCE Cluster Tool RADIANCE Cluster Tool Sender Sender Sender

substrate or test glass and the standard receiver is replaced

GSM1100 BB Optical Monitoring System

by a high performance spectrometer with temperature stabilized CCD array. This ensures optimum results over

Coating Tool

a whole spectral range and compensates for variation in coating rate and refractive indices. Measured spectra of each layer are stored for analysis.

Deposition Deposition Deposition Source Source Source

Receiver Receiver Receiver

Optical Optical Head Head Head Height Adjustment HeightOptical Adjustment Height Adjustment Table with with Table Table with substrates substrates substrates


GSM

GSM

Why Optical Monitoring?

GSM

The Evatec Solution

Configure Your System

Today’s enhanced electron beam and sputter deposition processes enable the production of thin films with high density, excellent temperature and environmental stabilities and a minimum of absorption making them ideal for high end optical applications including laser mirrors, sensors and colour separation. As demands on filter performance increase,

GSM Design Features

optical stacks become more complex and process times extend. Accurate, repeatable process control technology becomes essential for cost effective high yield production. Conventional, indirect quartz monitoring techniques measure changes

BAK Evaporator BAK Evaporator

Long lamp lifetimes Temperature drift elimination

Test Test glass glass Test glass

of oscillation frequency of a quartz crystal as it gets coated. Insitu optical monitoring techniques make direct measurements

Real Time “Unix” operating system

Calotte Calotte Calotte with with with Substrate Substrate Substrate

of changes of intensity from a beam of light transmitted through or reflected from a substrate (or test glass) during the coating

Optical Optical Head Head Optical Sender Sender Head Sender

Test Glass Glass Test Test Glass Changer Changer Changer

Optical fibre system connections

Evaporation Evaporation Evaporation Sources Sources Sources Sender Sender (in Sender (in reflection) reflection) (in reflection)

process. Such precise techniques enable edge repeatibilities of ± 0.3% or better making them ideal for the most demanding

Powerful endpoint detection algorithms

Receiver Receiver Receiver

thin film stack designs.

Monochromatic

Optical Optical Optical Head Head Head

In standard operation, the light intensity subsequent to

1

alongside the actual production substrates is measured at Thin Film Design Software

coating layer is terminated upon reaching predefined

operation. When operated in conjunction with our Khan process

intensities, with options including maxima or minima,

controller it offers a seamless production route from thin film stack Process File

generation, coating itself and customised process data logging. GSM SCREENSHOT Target Spectrum Start Spectrum Current Spectrum

Monitoring Strategy Generator

2

set up, operation and maintenance are simpler than ever. Plug and

mounting and alignment outside the vacuum system. We support industry standard thin film design software and offer a choice of algorithms for end point detection

Sputter Sputter Sputter Sources Sources Sources

absolute, or intensity values relative to the last measured maximum and minimum. A choice of GTC 621, or GTC1100 test glass changers is available according to application

Sender Receiver Sender Receiver Sender Receiver

excellent signal to noise ratios and test glasses can be

KHAN Coating Process Controller

elements allowing easy configuration of the system. Mechanical

standard 19 inch rack control unit, and compact heads have easy

Optical Head Head Optical Optical Head

needs. The technique has tight spectral resolution,

Our third generation modular concept integrates practical design

play sources and receivers are exchanged from the front of the

Drum with Drum with substrates substrates substrates

a specified wavelength through a monochromator. Each

Thin Film Design

The GSM1100 is available for both stand alone and fully integrated

design through user choice of end point strategy, process recipe

MSP Tool MSP Sputter Sputter Tool Drum with

transmission through or reflection from a test glass coated

Office

kept conveniently as permanent production records. Broadband

3

The GSM monitors the optical performance of the actual

RADIANCE Cluster Tool RADIANCE Cluster Tool Sender Sender Sender

substrate or test glass and the standard receiver is replaced

GSM1100 BB Optical Monitoring System

by a high performance spectrometer with temperature stabilized CCD array. This ensures optimum results over

Coating Tool

a whole spectral range and compensates for variation in coating rate and refractive indices. Measured spectra of each layer are stored for analysis.

Deposition Deposition Deposition Source Source Source

Receiver Receiver Receiver

Optical Optical Head Head Head Height Adjustment HeightOptical Adjustment Height Adjustment Table with with Table Table with substrates substrates substrates


Take a look at the results

60 55

100

System Data

50

95 90 85 80

45

75

530

65 60  

Transmission [%]

70

540

55

Light Sources

2 Quartz-Tungsten Halogen lamps, Plug & Play, 6000hrs life

Wavelength Range

Standard: 380nm to 1100nm Custom: According to customer specification

Operation Modes

Reflection, transmission on test glass or directly onto substrates

Detectors

Monochromatic: Photodiode according to wavelength range Broadband: Temperature stabilized, CCD array, 1024 pixels

GTC 621

6 measurement positions, transmission or reflection

GTC 1100

140 heated test glasses, mixed measurement

50 45 40 35 30 25 20 15 10 5 0

460

470

480

490

500

510

520

530

540

550

560

570

580

590

600

610

620

630

640

650

660

670

680

  Wavelength [nm]

Batch 1

Batch 2

Batch 3

Batch 4

Batch 5

Design

Batch 6

Batch 1 Batch 2 Batch 3 Batch 4 Batch 5 Batch 6 Design

max-min max-min (nm) (%)

T=50% 531.04 (rising edge)

531.19

532.45

531.84

530.86

530.66 531.71

1.79

0.34

T=50% 566.89 (falling edge)

566.91

568.53

567.88

566.81

566.50 568.07

2.03

0.36

Technique: Sputtering in MSP batch tool. Test schedule: 6 batches spread over 30 days, including non-consecutive runs. No prior test runs. GSM Mode: Broadband

Process repeatability: T50 ± 0.18% overall, even with non-consecutive runs.

About Evatec Evatec offers complete solutions for thin film deposition and etch in the optical and semiconductor markets. Evatec engineers are able to offer practical production advice from R&D to prototyping and mass production. We recognize that no single technique offers the answer to all problems. With a technology portfolio including standard and enhanced

Dichroics Bandpass & Edge Filters AR Coatings Laser Mirrors IR Blocking

evaporation as well as sputter, we are ready to offer sampling services and custom engineering to meet our customers individual needs. We provide sales and service through our global network of local offices. For more information visit us at www.evatecnet.com or contact our head office.

Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 info@evatecnet.com www.evatecnet.com

Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.

GSM Optical Monitor


Take a look at the results

60 55

100

System Data

50

95 90 85 80

45

75

530

65 60  

Transmission [%]

70

540

55

Light Sources

2 Quartz-Tungsten Halogen lamps, Plug & Play, 6000hrs life

Wavelength Range

Standard: 380nm to 1100nm Custom: According to customer specification

Operation Modes

Reflection, transmission on test glass or directly onto substrates

Detectors

Monochromatic: Photodiode according to wavelength range Broadband: Temperature stabilized, CCD array, 1024 pixels

GTC 621

6 measurement positions, transmission or reflection

GTC 1100

140 heated test glasses, mixed measurement

50 45 40 35 30 25 20 15 10 5 0

460

470

480

490

500

510

520

530

540

550

560

570

580

590

600

610

620

630

640

650

660

670

680

  Wavelength [nm]

Batch 1

Batch 2

Batch 3

Batch 4

Batch 5

Design

Batch 6

Batch 1 Batch 2 Batch 3 Batch 4 Batch 5 Batch 6 Design

max-min max-min (nm) (%)

T=50% 531.04 (rising edge)

531.19

532.45

531.84

530.86

530.66 531.71

1.79

0.34

T=50% 566.89 (falling edge)

566.91

568.53

567.88

566.81

566.50 568.07

2.03

0.36

Technique: Sputtering in MSP batch tool. Test schedule: 6 batches spread over 30 days, including non-consecutive runs. No prior test runs. GSM Mode: Broadband

Process repeatability: T50 ± 0.18% overall, even with non-consecutive runs.

About Evatec Evatec offers complete solutions for thin film deposition and etch in the optical and semiconductor markets. Evatec engineers are able to offer practical production advice from R&D to prototyping and mass production. We recognize that no single technique offers the answer to all problems. With a technology portfolio including standard and enhanced

Dichroics Bandpass & Edge Filters AR Coatings Laser Mirrors IR Blocking

evaporation as well as sputter, we are ready to offer sampling services and custom engineering to meet our customers individual needs. We provide sales and service through our global network of local offices. For more information visit us at www.evatecnet.com or contact our head office.

Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 info@evatecnet.com www.evatecnet.com

Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.

GSM Optical Monitor


EVA_GSM_iWEB