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THE INVENTOR: MR. CLEAN Willis Whitfield (1919 – 2012) In 1960, while employed as a physicist at Sandia National Laboratories in New Mexico, Whitfield invented the modern cleanroom. In April 1962, Whitfield presented his first technical paper on the design at the National Meeting of the Institute of Environmental Sciences in Chicago. That same month, Time magazine dubbed him "Mr. Clean.” Before Whitfield's design, the air quality in the best cleanrooms contained 1,000 times more particles than in his. His concept of a laminar flow cleanroom would go on to create a new multitrillion-dollar industry. Photo: Sandia National Laboratories

UCI CLEANROOMS YELLOW LIGHT

Cleanrooms that employ photolithographic printing use yellow lights. The photoresist material used to coat wafers is not sensitive to yellow light, but light from other sources will cause chemical reactions in the film and alter the image.

AIR CHANGE

In a typical air-conditioned home, room air changes about twice per hour. Air in a cleanroom, depending on the class, changes from 10 to more than 600 times an hour.

CALIT2 Director G.P. Li oversees two UCI cleanroom facilities: BiON (Bio-Organic Nanotechnology) for biomedical device fabrication and testing; and INRF (Integrated Nanosystems Research Facility) for semiconductor, micromachining and MEMS (microelectromechanical systems) fabrication. Cleanrooms are available to UCI students, faculty and off-campus users.

17 INRF is a 9,600-square-foot Class 100/1,000/10,000 cleanroom equipped with all the major tools for micro– and nanofabrication.

BiON is a 4,000-square-foot, Class 1000 cleanroom dedicated to research and development of micro/nano devices using biological and organic materials.

http://www.inrf.uci.edu/

http://www.inrf.uci.edu/bion/

How clean is a cleanroom?

Cleanliness standards

An average cubic meter of city air contains about 35 million particles (.5 micron size or larger) for each cubic meter. A human red blood cell is about 5 microns in diameter. DIAMETER OF: Strand of human hair

Maximum particles per cubic meter CLASS

1 micron*

5 microns*

1

8.3

.29

10

83

2.9

832

29

8,320

293

83,200

2,930

832,000

29,300

100

(50-100 microns)

Pollen

(30-50 microns)

Ragweed

(17-23 microns) Sources: Intel, NASA, RMG and Associates, Angstrom Technology, Terra Universal, Sandia National Laboratories

innovate | integrate | incubate | ignite

Dust mite feces (10 microns)

One micron

1,000 10,000 100,000

*Less than or equal to

Profile for Shelly Nazarenus

INTERFACE Magazine, Spring 2019  

An award-winning semi-annual publication of the California Institute for Telecommunications and Information Technology (Calit2) at the Univ....

INTERFACE Magazine, Spring 2019  

An award-winning semi-annual publication of the California Institute for Telecommunications and Information Technology (Calit2) at the Univ....