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Crystalline Solar Cells Production Equipment

晶硅太阳能电池 生产设备


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SINGULUS TECHNOLOGIES Developer, Enabler and Supplier for the PV Market 是光伏市场的开发者、推动者及供应商。

PRODUCTION EQUIPMENT for Crystalline Solar Cells

晶硅太阳能电池 生产设备


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SINGULUS TECHNOLOGIES

SINGULUS TECHNOLOGIES

SINGULUS TECHNOLOGIES is a supplier of manufacturing solutions and production equipment for the markets Optical Disc, Semiconductor and Solar. With new machine concepts and manufacturing processes in the crystalline and thin-film solar technology SINGULUS TECHNOLOGIES establishes itself as development partner and equipment supplier for investments in new high-performance solar cell concepts. As market leader for Optical Disc production systems we have gained extensive know-how in vacuum coating, automation, and process integration.

德国新格拉斯科技集团为光盘、半导体和太阳能电 池提供生产解决方案和生产设备。凭借晶硅和薄膜 太阳能科技领域的新颖设备概念和生产工艺,德国 新格拉斯科技集团成为高性能太阳能电池新概念的 领先开发伙伴和设备供应商。作为光盘生产系统的 领头羊,集团在真空镀膜、自动化和工艺整合方面 积累了广泛的技术经验。

SINGULUS TECHNOLOGIES cooperates with cell manufacturers worldwide and develops processes which improve the efficiency of solar cells and at the same time reduce production costs. Evolutionary improvement in cell concepts like PERC or PERT, n-type material, IBC cell or heterojunction cells will drive the future of crystalline solar cells. Production of PERC Solar Cells →→ Single side polish etch with LINEA II →→ Rear side passivation with SINGULAR XP →→ PERCEUS Production Package for PERC solar cells Other process applications improving cell performance →→ LINEA II parasitic emitter etching and edge isolation →→ LINEA II isotexture or PSG removal →→ Wet process equipment for poly silicon chunk etching, cleaning & drying – MATERIA →→ ICP-PECVD coating equipment – SINGULAR →→ IPA-free wet process equipment – SILEX →→ Evaporator for metallization of high-efficiency solar cells →→ Low-cost and high-efficient cleaning process (Upgrade SILEX with Ozone) →→ Complete production lines – SOLARE

德国新格拉斯科技集团携手世界各地的电池制造商 共同改进生产工艺,在提高太阳能电池的效率的同 时降低生产成本。电池概念方面的进展,如 PERC/ PERT,N型材料、全背面接触式电池或异质结太阳 电池将推动晶硅太阳能电池的未来。 PERC太阳能电池的生产 →→ LINEA II单面抛光腐蚀 →→ SINGULAR XP的背面钝化 →→ PERC太阳能电池的PERCEUS综合生产设备 其它提高电池性能的流程应用程序 →→ LINEA II寄生发射极蚀刻与边缘绝缘处理 →→ LINEA II均匀制绒或去磷硅玻璃(PSG)清洗 →→ 用于硅块蚀刻、清洁与干燥的湿处理设备– MATERIA →→ ICP-PECVD镀膜设备– SINGULAR →→ 无异丙醇(IPA)的湿法处理– SILEX →→ 用于高效太阳能电池金属喷镀的蒸发设备 →→ 低成本及高效能的清洁过程(用臭氧升级 SILEX) →→ 完整生产线– SOLARE


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MATERIA PCE/OCC Poly Silicon Chunk Etching, Cleaning & Drying 用于硅块蚀刻、清洁与干燥的湿处理

SINGULUS TECHNOLOGIES developed a new machine concept with the product name MATERIA PCE/OCC for the cleaning of Si chunks, Si-Off-Cuts and ingot saw off cuts for the manufacturing of crystalline solar cells. The first MATERIA cleaning machine was delivered to a renowned US customer. The system was successfully installed at the customer’s site in the 1st quarter 2012. In the MATERIA, silicon is cleared of interfering particles, organic and metallic contaminations. With state-of-the-art technology, the fully automated and intelligent carrier management, which is operating in the absence of manual labor, achieves a maximum throughput with reductions of operators. With very good process results, the efficient process steps and the economical use of water and chemical substances as well as the low energy consumption reduce the cost of operation compared with the traditionally available machines.

德国新格拉斯科技集团为清洁晶硅太阳能电池生产 所留下的硅块、硅下脚料和切锭锯下脚料而开发了 一种新的设备概念,产品名为MATERIA 。第一台 MATERIA 清洁设备交付给了一家知名美国客户。 该系统于2012年第一季度在客户现场成功安装。 MATERIA设备可以去除硅的干扰颗粒、有机和金属 污染。先进全自动的智能载流子管理技术无需人工 操作,就可以在减少操作员的同时最大程度地提高 产量。与传统可用设备相比,该设备能通过有效的 工序、节省水与化学物质的使用并降低运行能耗, 从而实现出色的加工结果。

Main Features MATERIA PCE/OCC

主要特点

→→ Surface cleaning & metal removal →→ Revolving barrel system →→ Smart DI rinse system →→ Clean, spot free & dry chunks →→ Excellent process results (metal values sufficiently lower than competitors)

→→ 表面清洁及去除金属 →→ 转筒系统 →→ 智能DI清洗系统 →→ 洁净、无污点的干燥硅块 →→ 优异的加工结果(金属含量显著低于竞争对手)


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GERULUS Wafer Block Pre-Clean & Deglue System 硅晶片预清洁及脱胶系统

Virtually all silicon based wafers are cut by wire saw technology. The SINGULUS Pre-clean & Deglue system processes the wafers after being cut. This includes removal of slurry as well as degluing the wafers from their carrier beam. The GERULUS system can be configured in a wide range to adapt to all kinds of slurry and glue types. To guarantee lowest possible water and surfactant consumption, the system can be equipped with a water & SiC recycling system.

几乎所有硅晶片都是通过线锯来切割的。德国新格 拉斯科技集团的预清洁及脱胶系统对切割后的硅晶 片进行了加工。其中包括去除泥浆,并将硅晶片从 其承载器上脱胶。 GERULUS 系统可通过多种配置方式来处理任何泥 浆和胶水型号。为保证水与表面活性剂的消耗量 达到最低,该系统可以配置一台水与碳化硅循环系 统。

Main Features

主要特点

→→ Patented wafer block cleaning →→ Proven, highly integrated design →→ High throughput up to 7,200 wph →→ Built for non-stop utilization: 24/7, 360 days/year →→ High availability (uptime > 95 %) →→ Sophisticated pre-cleaning concept for best process results and minimal process times →→ Compliance with international safety regulations

→→ 专利硅晶片清洁 →→ 高度集成的成熟设计 →→ 高达7,200 wph的产量 →→ 适合不间断使用: 24小时/7天,360天/年 →→ 高可靠性(工作时间> 95 %) →→ 尖端的预清洁概念实现了最佳加工结 果和最少的加工时间 →→ 符合国际安全规定

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1 Transport cart 2 Input buffer 3 Pre clean-bath 4 Deglue chamber 5 Output buffer 6 Installation area 7 Waste water pump stations (optional) 8 Hot DI water station (optional) 9 Surfactant dosage 10 Dirt and pure water tanks 11 Centrifuge

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1 运输车 2 输入缓冲区 3 预清洗-浸洗 4 除胶室 5 输出缓冲区 6 安装区域 7 废水泵站(自选) 8 去离子热水站(自选) 9 表面活性剂用量 10 污水与净水水箱 11 离心机


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SILEX Batch-Type IPA-Free Wet Process Equipment 间歇式无异丙醇(IPA)的湿法处理设备 Today’s dominating solar cell concept is based on cells made from crystalline silicon.

如今的主导性太阳能电池概念是以晶硅制成的电池 为本。

SINGULUS TECHNOLOGIES provides complete automated dry-in/dry-out solutions for wet-chemical treatment of Si-wafers in standard and high-efficiency cell lines.

德国新格拉斯科技集团为标准及高效电池生产线 上硅晶片的化学处理提供完整的干进/干出解决方 案。

Batch-type working wet benches (SILEX) offer a wide range of process options, highlighting them as the first choice for dedicated etching processes and sophisticated cleaning operations in Si-cell technology. With respect to highest flexibility in design configuration, the new generation of the SILEX machine is characterized by a clear modular design and compact footprint. In combination with new intelligent software solutions, the SILEX machines fulfill current and future requirements of capacity, flexibility, and stability for mass production. The SILEX system achieves an output of up to 3,000 wph with very low scrap rates of less than 0.05 % and high process yield. Processing wafer with thickness down to 120 μm, the SINGULUS TECHNOLOGIES plant is in advance to the newest

间歇式工作的湿台架(SILEX)提供了各种各样的 加工选项,成为硅电池技术专门蚀刻加工及复杂清 洁操作的首选。为了实现设计构型的最高灵活性, 新一代的SILEX设备采用了透明模块化设计,占地 空间紧凑。SILEX设备与新型智能软件方案相结 合,满足了目前和未来大规模生产对于产能、灵活 性和稳定性的需求。 SILEX系统实现了高达3,000 wph的产量,低于 0.05 %废品率以及较高的工艺出品率。德国新格拉 斯科技集团的工厂能处理薄至120μm的硅晶片, 在硅太阳能科技领域为前端电池工艺抢先推出最新 的SEMI路线图指南。


SILEX – Batch-Type IPA-Free Wet Process Equipment | 间歇式无异丙醇(IPA)的湿法处理设备

SEMI roadmap guidelines for front-end cell process in silicon solar technology.

目前和未来的批量加工应用的核心在于单晶硅的碱 性制绒加工,生成的角锥形蚀刻表面具有最适宜的 陷光性和接触性。

The core of the current and future batch process applications is the alkaline texturing process of mono-crystalline silicon, generating pyramidaletched surfaces with optimal light rapping and contacting properties. The SILEX ALTEX machine is designed to apply a new IPA-free texturing process, offering substantial cost advantages compared to traditional etching systems. This texturing process completely refrains from using flammable, volatile solvents such as Isopropanol (IPA) and enables a stable, wet-chemical texturing process for silicon wafers on the basis of commercialized additives. The application of this alkaline texturing process increase the etching bath lifetime significantly. At the same time, the texture etching can be operated in a shorter time. The resulting higher machine availability, outstanding texture performance and last but not least easier facility handling of process chemicals compared to traditional systems reduce the production costs for mono-crystalline silicon solar cells substantially.

SILEX ALTEX设备应用了新的无异丙醇变形工艺, 较之传统蚀刻系统,能显著节省成本。这一制绒工 艺完全不使用异丙醇(IPA)之类易燃、挥发性溶 剂,主要采用市场有售的添加剂来对硅晶片进行湿 法化学制绒加工。通过这种碱性制绒工艺,可显著 提高腐蚀液寿命,并同时减少制绒所需的时间。与 传统系统相比,机器的可靠性更高,制绒性能更出 色,而且不可忽视的一点是,工艺化学品的设备操 作更为简单,从而使单晶硅太阳能电池的生产成本 大大缩减。

The second pillar of wet batch process applications in front-end cell production are wet cleaning processes.

SILEX ALTEX

LOAD SCALE

PRE CLEAN

RINSE

SILEX SDE

LOAD SCALE

SDE

RINSE

PRE/ POST CLEAN

RINSE

POST CLEAN

SILEX P(B)SG+

LOAD

PSG ETCH

RINSE

CLEAN

RINSE

DRY

UNLOAD

SILEX CLEAN

LOAD

RCA CLEAN

RINSE

POST CLEAN

RINSE

POST CLEAN

RINSE

SILEX COMBI

LOAD SCALE

ISOTEX ISOTEX

RINSE

PRE CLEAN

RINSE

RINSE

SDE + ALTEX

RINSE

DRY

DRY

SDE + ALTEX

POST CLEAN

RINSE

DRY

UNLOAD SCALE

UNLOAD SCALE

UNLOAD

RINSE

POST CLEAN

RINSE

DRY

UNLOAD SCALE

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SILEX – Batch-Type IPA-Free Wet Process Equipment | 间歇式无异丙醇(IPA)的湿法处理设备

Advanced cleaning steps are going to become an indispensable part of existing present and future cell lines as a key for further improvement of cell performance and cost reduction. Ozone-based cleaning operations, applied on SILEX wet bench, combine efficient organic and metal removal with appropriate surface conditioning. Due to low chemical cost and consumption, simple process control, and high metal removal efficiency, ozonated acidic cleaning bathes are the perfect substitute for traditional, expensive multi-step RCA cleanings, known from semiconductor industry.

前端电池生产中湿法批量加工应用的第二大支柱在 于湿法清洗。在目前和未来电池生产线上,先进的 清洁程序将成为不可或缺的一环,成为进一步提高 电池性能和降低成本的关键所在。基于臭氧的清洁 操作在SILEX湿台架上进行,在进行表面修整的同时 能有效地去除有机和金属。由于化学品的成本和消 耗量较低,工艺控制简单且金属去除效率较高,根 据大家熟知半导体行业经验,臭氧化酸洗成为传统 昂贵的多步RCA清洗的理想替代品。 德国新格拉斯科技集团为扩散和表面钝化之前的湿 法清洁提供了集成的臭氧处理方案,可集成到新设 备中并为现有SILEX湿台架提供升级。

SINGULUS TECHNOLOGIES provides integrated ozone-based process solutions for wet cleaning prior to diffusion and passivation integrated into new equipment as well as an upgrade of existing SILEX wet benches.

Main Features

主要特点

→→ Proven, highly integrated design →→ High throughput up to max 3,000 wph →→ High availability (uptime > 95 %) →→ Low breakage rate (< 0.05 %) →→ High flexibility in process sequence, wafer type, wafer size →→ Wafer thickness down to 120 μm (post process) →→ Internal automatic chemical bath management →→ Reproducible process results by complex process parameter control →→ Network communication support →→ Carrier tracking and data logging →→ Compliance with international safety regulations.

→→ 成熟而高度集成的设计 →→ 最高达3,000 wph的高产量 →→ 高可靠性(工作时间> 95 %) →→ 低破损率(< 0.05 %) →→ 工序、硅晶片类型、硅晶片尺寸的高度灵活性 →→ 硅晶片厚度薄至120 μm (后期加工) →→ 内部自动化化学水浴管理 →→ 通过复杂的加工参数控制实现可重复加工结果 →→ 网络通信支持 →→ 载流子跟踪和数据记录 →→ 与国际安全规定的符合性


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LINEA II Inline Wet Process Equipment for Cleaning, Texturing and PSG Removal 用于清洁、制绒和清洗去磷硅玻璃的在线式湿法设备

SINGULUS TECHNOLOGIES provides complete automated dry-in/dry-out solutions for wet treatment of Si-wafers in standard and high-efficiency cell lines. Current and future market requirements of machines, processes, and materials for solar cell manufacturing sets new standards for cost reduction, productivity, process capability, and integrability of wet-chemical production. The ongoing evolution of proven concepts in process management and the integration of innovative approaches are the basis for the development of a new generation of horizontal etching systems. LINEA II is a horizontally working inline wet process platform for cleaning and etching of crystalline solar wafers. The SINGULUS LINEA II combines an advanced transportation system, sustainable and innovative processing modules with proven and efficient chemical etching and cleaning processes. In addition to proven processes like texture etching, PSG etching or RCA cleaning, the focus is on newer applications with one or two sides processes, such as polish etching, emitter etching, and ozonebased or ultrasonic cleaning respectively. The highly integrated design, high throughput, high availability, and low breakage rate make LINEA II attractive for solar cell manufacturers worldwide.

德国新格拉斯科技集团为标准及高效电池生产线 上硅晶片的化学处理提供完整的干进/干出解决方 案。当前和未来市场对于太阳能电池生产的设备、 工艺以及材料的需求,为成本节约、生产能力、 加工能力以及湿法化学生产的可集成性设定了新 标准。工艺管理方面成熟概念的不断进步以及创 新方式的集成为新一代蚀刻系统的开发奠定了基 础。LINEA II是用来清洁和蚀刻晶体太阳能硅晶片 的水平工作在线式湿法加工平台。德国新格拉斯科 技集团的LINEA II将先进的运输系统、可持续的创 新加工模块与成熟而有效的化学蚀刻和清洁工艺融 为一体。 除了制绒、去磷硅玻璃蚀刻或RCA清洁等成熟的工 艺,还侧重于较新颖的应用,涉及抛光蚀刻、发射 极蚀刻和臭氧或超声清洁等单面或双面加工。 高度集成的设计、高产能、高可靠性和低破损率使 LINEA II 获得世界各地的太阳能电池制造商青睐。


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LINEA II – Inline Wet Process Equipment for Cleaning, Texturing and PSG Removal | 用于清洁、制绒和清洗去磷硅玻璃的在线式湿法设备

Main Characteristics

主要特点

Effective, Economical, Flexible

有效、经济、灵活

→→ Platform for all inline processes →→ From R&D tool to the fully integrated 10-lane facility →→ Uniform media flow on wafer surface →→ Consistant flow conditions from lane to lane →→ Economical because of small bath volumes and high wafer throughput →→ Fast media exchange on wafer surface →→ Fast discharging of process reaction products →→ Low exhaust volumes through intelligent airflow next to each wafer lane →→ Future-proof and flexible with modular process units →→ Easy integration of new or additional process options

→→ 所有在线式加工的平台 →→ 从研发工具到完全一体化的10通道设施 →→ 硅晶片表面上统一的介质流动 →→ 通道之间的流动条件稳定 →→ 由于腐蚀液用量小和高硅晶片产量高而实现经 济节约 →→ 在硅晶片表面上实现快速介质交换 →→ 过程反应产品的快速排出 →→ 通过每条硅晶片通道旁的智能气流而降低排 气量 →→ 模块化加工单元灵活而永不过时 →→ 方便集成新加的工艺选项

Controlled, Precise, Intelligent →→ Fully automated tool with integrated process control →→ Compact process chambers with innovative media and process management →→ Simple and robust „spider-chain“ wafer transport system without mechanical contacts on top side →→ Shadow-free contact of the wafer surfaces with the process media →→ Wafer tracking and wafer thickness measurement

Safe, Clean, User-Friendly →→ Safe for persons, environment, and in the process →→ Cleanroom compatible design according to ISO and SEMI standards →→ Friction-free, gentle wafer transport through the process media →→ Excellent accessibility of the process chamber from all sides through the separation of process and installation modules

控制、精确、智能 →→ 采用集成工艺控制的全自动工具 →→ 紧凑的加工室运用了创新介质和工艺管理 →→ 简单而牢固的“蜘蛛链条”硅晶片传输系统, 正面无机械接触 →→ 硅晶片表面与加工介质的无暗影接触 →→ 硅晶片的跟踪和硅晶片厚度测量

安全、洁净、用户友好 →→ 在加工过程中,对人与环境都很安全 →→ 按照ISO和SEMI标准进行能兼容净化室的设计 →→ 通过加工介质进行无摩擦的温和硅晶片运输 →→ 通过将加工及安装模块分离,可方便地从各个 侧面进入加工室


LINEA II – Inline Wet Process Equipment for Cleaning, Texturing and PSG Removal | 用于清洁、制绒和清洗去磷硅玻璃的在线式湿法设备

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LINEA II – Standard and advanced production methods for crystalline solar cells

ISOTEX

Acidic SDE / Isotexturing

LOAD ISOTEX RINSE

PorSi

PSG

P-SiO2 -Glass / Removal

PSG-EE

P-SiO2 -Glass / Removal / Edge Isolation

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US-Clean / Alkaline / Acidic

PE

Polish Etching

RINSE CLEAN RINSE

DRY

LOAD

PSG ETCH

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DRY

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PSG ETCH

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EMITTER RINSE ETCH

PorSi

RINSE

DRY

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LOAD

US RINSE CLEAN

US ACIDIC RINSE RINSE CLEAN CLEAN

DRY

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POLISH RINSE ETCH

PorSi

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RINSE CLEAN RINSE


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LINEA II – Single Side Polish Etch | 单面抛光蚀刻

LINEA II Single Side Polish Etch 单面抛光蚀刻 SINGULUS TECHNOLOGIES cooperates with cell manufacturers worldwide and develops processes which improve the efficiency of solar cells and at the same time reduce production costs. Evolutionary improvement in cell concepts like PERC or PERT, n-type material, IBC cell or heterojunction cells will drive the future of crystalline solar cells. Standard silicon solar cells have a textured front and rear side. In order to optimize the light trapping within the cell and the conditions for a good rear side passivation with local contacts, a planar rear surface is most suitable. The differently structured front and rear surfaces of the wafer make the implementation of a single side etching process step essential. For the market of silicon solar cells, SINGULUS presents a new production solution for rear side passivated silicon solar cells (e.g. PERC – Passivated Emitter and Rear Cell). This solution was developed especially for the upgrade of existing cell production lines. For the upgrade of a production line, three additional production steps, which SINGULUS offers solutions for, are required. Before coating the rear side is smoothed with a wet-chemical polish in a LINEA II Single Side Polish Etch machine. The dielectric passivation layer is emitted in the ICP-PECVD machine SINGULAR. For the rear side contacts through a laser process, SINGULUS is closely cooperating with a partner.With the integration of these additional production steps into existing manufacturing lines PERC cells with levels of efficiency of up to 20 % can be achieved. SINGULUS TECHNOLOGIES offers for R&D single lanes up to 10 lanes for high throughput production tool.

德国新格拉斯科技集团携手世界各地的电池制造商 共同改进生产工艺,在提高太阳能电池的效率的同 时降低生产成本。电池概念方面的进展,如PERC/ PERT,N型材料、全背面接触式电池或异质结太阳 电池将推动晶硅太阳能电池的未来。 标准的硅太阳能电池的采用正反面制绒。为了优化 电池内的陷光并改善带有局部接触的背面钝化的条 件,最适宜采用平坦的背面。硅晶片正面和背面的 结构不同,因而有必要实施单面蚀刻工序。集团为 硅太阳能市场推出了背面钝化硅太阳能电池的一种 新生产方案(例如PERC——钝化发射极和钝化背 面电池)。这一方案是专门为了升级现有电池生产 线而开发的。 为了按新格拉斯科技集团的方案升级生产线,需要 增加三个生产工序。在镀膜之前,先用LINEA II 的 单面抛光蚀刻设备,通过湿法化学抛光来抛光背 面。 这一电介质钝化层在 ICP-PECVD设备SINGULAR中 进行放射。为了生产激光加工中的背面接触层,集 团是与合作伙伴进行了密切合作。 通过将附加的生产工序集成到现有生产线,可以将 PERC电池的效能提高20%。 德国新格拉斯科技集团为单个通道的研发提供了多 达10条通道,作为提高产量的工具。

Linea II SSE-PE Technical Data Linea II SSE-PE (Standard Production Tool)

Lanes

6

Dimensions

Process Compartment: 9500 * 1800 * 1400 Media Compartment: 9500 * 1000 * 2200

Throughput

3600 wph

Wafer

156 mm; > 150 µm; mono, multi, mono-cast

Utilities

N2, CDA, DI-water, PCW, Tap Water HF, KOH, HCl, HF, HNO3, Additives Waste Drains Exhaust Electrical Power 400 VAC 3/PE


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Main Characteristics

主要特点

Rear Polishing: →→ Increase of internal reflection →→ Reduction of surface defects →→ Reduction of recombination centres →→ longer carrier life time →→ Better passivation quality

背面抛光: →→ 增加内部反射 →→ 减少表面缺陷 →→ 减少复合中心 →→ 延长了少子寿命 →→ 提高了钝化质量

工具 Tool: →→ 通过创新的介质和工艺安排而实现紧凑的 →→ Compact process chambers with innovative 加工室 organisation of media and process →→ 简单而牢固的“蜘蛛链条”硅晶片传输系统, →→ Simple and robust „spider-chain“ wafer 正面无机械接触 transport system with no mechanical contact →→ 硅晶片表面与加工介质的无暗影接触 on top side →→ Shadow free contact of the wafer surfaces with →→ 通过加工介质进行无摩擦的温和硅晶片运输 →→ 通过将加工及安装模块分离,可方便地从各个 process media 侧面进入加工室 →→ Friction-free, gentle wafer transport through process media →→ Excellent accessibility of the process chamber from all sides by the separation process and PSG PRINTING SDE/TEXTURE DIFFUSION FIRING PECVD installing modules

SDE/TEXTURE

DIFFUSION

SELECTIVE EMITTER

LINEA II Single Side Polish Etch

PSG

SDE/TEXTURE

SINGLE SIDE POLISH

SDE/TEXTURE

DIFFUSION

PRINTING

SINGULAR XP Rear Side Passivation

▼ PERCEUS Upgrade Package for PERC Cells

PECVD

Laser Contact

▼ DIFFUSION

PSG

FIRING

PSG EE

REAR PECVD

FRONT PECVD

LCO

PRINTING

FIRING

SINGLE SIDE POLISH/ CLEANING

REAR PECVD

FRONT PECVD

LCO

PRINTING

FIRING


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SINGULAR XP The innovative SINGULAR XP tool is based on static inline production, which combines the advantages of inline substrate transport and static processing. 创新的SINGULAR XP工具基于静态在线式生产,集在线式衬底传输和 静态加工的优点于一身。

SINGULAR XP Fully automized ICP-PECVD Production Platform

SINGULAR XP 全自动 ICP-PECVD生产平台

SINGULAR XP ICP-PECVD is a fully automated innovative and modular PECVD coating tool for the mass production of crystalline silicon solar cells. In addition, SINGULAR is increasingly being applied for the development of passivation layers for high-efficiency solar cells following conventional and new cell concepts. Thereby, the coating system meets the demands for both current and future PV cell production.

SINGULAR XP ICP-PECVD是一种全自动的创新模 块化PECVD镀膜工具,适用于晶硅太阳能电池的大 规模生产。此外,SINGULAR正越来越多地应用于 适用于高效太阳能电池钝化层的开发,不论电池是 采用传统的还是新的电池概念。借此,镀膜设备同 时满足了当前和未来光伏电池生产的需求

The SINGULAR system provides an automation module and a coating module. The coating module consists of several customizable vacuum chambers.

创新的SINGULAR工具以静态在线式生产为基础, 集在线式衬底传输和静态加工的优点于一身。它方 便了复杂膜层的镀膜,例如AlOx/SiNy等不同材料的 堆积。这一工具的关键特点在于ICP-PECVD 技术。 电感耦合等离子体(ICP)的激发可以在高沉积速 度下完美控制SiNx、AlOx、 SiOxNy等各种材料的 膜层性能。

The innovative SINGULAR tool is based on static inline production which combines the advantages of inline substrate transport and static processing. It allows the coating of complex layers, such as layer stacks of different materials e. g. AlOx/SiNy. The key feature of the tool is the ICP-PECVD technology. The inductively coupled plasma (ICP) excitation allows ideal control of film properties for various materials such as SiNx, AlOx, SiOxNy at high deposition rates. The process variability, the small tool footprint in combination with an excellent total ”Cost Of Ownership“ makes SINGULAR ideally suitable for upgrades of existing production lines. SINGULAR allows developing new manufacturing processes for cell efficiencies above 20 % on proven production platforms. Therewith, SINGULUS makes a valuable contribution to continuous improvements with respect to efficiency and manufacturing cost of PV modules, being a necessity to reduce the costs and enable the largescale deployment of PV electricity.

SINGULAR系统具有自动化模块和镀膜模块。镀膜 模块由多个可定制的真空腔组成。

过程可变性、较小的工具占地面积,再加上低廉的 总体“购置成本”,使得SINGULAR成为为现有生 产线实现升级换代的理想之选。SINGULAR有助于 开发新的制造工艺,使成熟生产平台生产的电池效 能提高20%以上。 这一系统成为降低成本、部署大面积的光伏发电所 不可或缺的设备;而新格拉斯科技集团通过这一系 统,为持续改善光伏模块的效能和降低制造成本做 出了宝贵的贡献。


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SINGULAR XP Fully Automized ICP-PECVD Production Platform 全自动ICP-PECVD生 产平台 Main Characteristics

主要特点

→→ Industrial proven multi-chamber ICP-PECVD coating tool →→ Lowest cost of ownership →→ Modular design for various processes (e. g. SiNx, SiOxNy, AlOx, a-Si …) →→ Single- and multi-layer capability →→ Double-side coating capability →→ Small footprint →→ Integrated electrical and gas cabinets →→ Efficient use of raw materials like electrical power, process gases … →→ Low noise level (no grey room necessary) →→ High uptime →→ Easy to operate →→ Easy to maintain →→ Inline cleaning processes available (e. g. for a-Si) →→ Customized tool configuration, e. g. usage of special gases e. g. TMB, phosphine, organic precursors like TMAl →→ Integrated automation solution →→ Inline and cluster operation possible →→ All types of automation cassettes suitable

→→ 业内成熟的多腔ICP-PECVD镀膜工具 →→ 低廉的购置成本 →→ 适合各种工序的模块化设计(如SiNx、 SiOxNy、AlOx、 a-Si …) →→ 单层和多层镀膜能力 →→ 双面镀膜能力 →→ 占地面积小 →→ 电器柜与气体柜合二为一 →→ 有效利用电力、加工气体等原材料 →→ 低噪音(无需灰区 ) →→ 工作时间长 →→ 便于操作 →→ 便于维修 →→ 在线式清洁工序(例如清洁a-Si) →→ 定制工具配置,如使用TMB、磷化氢等特别气 体,TMAl 等有机前驱体 →→ 集成的自动化解决方案 →→ 可进行在线式集群操作 →→ 各类自动片架盒都适合

Standard Configuration

singular xp for Rear Side Passivation PECVD SiNy

PECVD Process Station 3

PECVD Process Station 2

PECVD Process Station 4

IR-Process Station 1

PECVD Process Station 5

Load Lock

PECVD AlOx

IR-Station

PECVD SiNy

PECVD SiNy


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PERCEUS Production Package for PERC Solar Cells PERC太阳能电池综合生产设备 PERCEUS 通过LINEA/SINGULAR背面钝化与激光接触

PERCEUS Up to 1 % Improvement of Cell Performance with LINEA/SINGULAR Rear Passivation & Laser Contacting

为了提升硅光伏模块生产的竞争力,需要在提高效 率的同时进一步降低成本。

In order to make the manufacturing of silicon photovoltaic modules competitive, a further reduction of the production costs with an increase of the efficiency at the same time is required. SINGULUS presents PERCEUS, a new production solution for rear side passivated silicon solar cell. PERCEUS was developed to upgrade existing cell production lines to manufacture PERC-type silicon solar cells (PERC – Passivated Emitter and Rear Cells).

德国新格拉斯科技集团为背面钝化硅太阳能电池的 生产推出了一种新的方案——PERCEUS。PERCEUS 的开发目的在于为制造PERC型硅太阳能电池 (PERC——钝化发射极和钝化背面电池)而对现 有电池生产线进行升级。

SINGULUS TECHNOLOGIES offers additional process steps for the production upgrade PERCEUS. A wet-chemical process step polishes the rear side of the cell using a LINEA II Single Side Polish

SDE/TEXTURE

DIFFUSION

PSG

SDE/TEXTURE

DIFFUSION

SELECTIVE EMITTER

LINEA II Single Side Polish Etch

PECVD

PSG

SDE/TEXTURE

SINGLE SIDE POLISH

SDE/TEXTURE

DIFFUSION

PECVD

FIRING

PRINTING

SINGULAR XP Rear Side Passivation

▼ PERCEUS Upgrade Package for PERC Cells

PRINTING

Laser Contact

▼ DIFFUSION

PSG

FIRING

PSG EE

REAR PECVD

FRONT PECVD

LCO

PRINTING

FIRING

SINGLE SIDE POLISH/ CLEANING

REAR PECVD

FRONT PECVD

LCO

PRINTING

FIRING


PERCEUS – Production Package for PERC Solar Cells | PERC太阳能电池综合生产设备

Etch. The dielectric passivation layer on the rear of the solar cell, consisting of a layer stack of AlOx and SiNx, is coated by the ICP-PECVD production tool SINGULAR XP. For the final step, the rear contact formation done by Laser Contact Opening (LCO), SINGULUS TECHNOLOGIES is cooperating closely with partners. With the integration of these additional production steps into existing production lines, PERC cells with efficiencies of up to 20 % can be made. In March 2012, the Institute for Solar Energy Research Hameln (ISFH) increased the conversion efficiency of screen-printed silicon solar cells in cooperation with SINGULUS from today’s industry typical 18.5 % to a record value of 20.1 %. This was also confirmed by an independent measurement from the photovoltaics calibration laboratory of the Fraunhofer ISE (CalLab). An improved cell rear side with an ICP-AIOx/SiNy double layer (ICP: “Inductively Coupled Plasma”) enables this progress without “selective emitter” technology. 20.1 % is one of the highest efficiencies worldwide reported for industrial type silicon solar cells with screen-printed metallization.

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德国新格拉斯科技集团为生产升级PERCEUS而推 出了附加的加工工序。在湿法化学加工工序中,通 过LINEA II 单面抛光蚀刻设备来抛光电池的背面。 太阳能电池背面的电介质钝化层由AlOx 和 SiNx 堆 积而成,通过ICP-PECVD生产工具SINGULAR XP进 行镀膜。在最后一步,通过 激光开槽形成背面接触 层,集团与合作伙伴进行了密切合作。通过将这些 附加的生产工序集成到现有生产线,PERC电池的 效能可提高到20 %。 2012年3月,哈默尔恩太阳能研究机构(ISFH)通 过与SINGULUS合作,将丝网印刷硅太阳能电池的 转换效率从行业内通常的18.5 % 提高到创纪录的 20.1 %。Fraunhofer ISE (CalLab)的光伏校准实验 室通过独立检测对这一点也进行了证实。改进后的 电池带有ICP-AIOx/SiNy双重镀层(ICP:“电感耦 合等离子体”),无需“选择性发射极”就能实现 这一转换过程。20.1 %据说是全球范围内采用丝网 印花金属化的工业类硅太阳能电池的最高转化率。


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SOLARE Turn-key Production System for Crystalline Cells 晶硅电池的交钥匙生产系统

SOLARE Turn-key Production Systems for Standard Cells as well as new PERC Cells

SOLARE 标准电池及 新PERC 电池的交钥匙生产系统

SINGULUS TECHNOLOGIES cooperates with cell manufacturers worldwide and develops processes which improve the efficiency of solar cells and at the same time reduce production costs. Evolutionary improvement in cell concepts like PERC or PERT, n-type material, IBCcell or heterojunction cells will drive the future of crystalline solar cells. A standard SOLARE system consists typically of the following production steps:

德国新格拉斯科技集团携手世界各地的电池制造商 共同改进生产工艺,在提高太阳能电池的效率的同 时降低生产成本。电池概念方面的进展,如PERC/ PERT,N型材料、全背面接触式电池或异质结太 阳电池将推动晶硅太阳能电池的未来。一个标准的 SOLARE系统一般包括以下生产步骤:

01 Wafer Stack Splitting, Loading/Inspection 02 Saw Damage Etch (SDE) and Texturing 03 Junction Formation 04 Phosphorus Silicate Glass Removal/ Edge Isolation 05 SINGULAR – ICP-PECVD Production Platform for Passivation and Anti-reflection Coatings 6/7 Printing/Firing 08 Testing/Sorting

01 硅晶片分离、装载/检验 02 锯状损伤蚀刻(SDE)与制绒 03 结合点形成 04 去磷硅玻璃/边缘隔离 05 钝化和防反光镀膜的ICP-PECVD生产平台 6/7 印刷/烧制 08 测试/分拣

1

2

3

4

5

6

7

8


SOLARE – Turn-key Production System for Crystalline Cells | 晶硅电池的交钥匙生产系统

Extended Standard Production Line

SDE/TEXTURE

DIFFUSION

PSG

PECVD

PRINTING

FIRING

SDE/TEXTURE SDE/TEXTURE

DIFFUSION DIFFUSION

SELECTIVE EMITTER PSG

PSG PECVD

PECVD PRINTING

PRINTING FIRING

SDE/TEXTURE SDE/TEXTURE

SINGLE DIFFUSION SIDE SELECTIVE DIFFUSION POLISH EMITTER

REAR PECVD

FRONT PECVD PRINTING

REAR REAR PECVD

FRONT FRONT PECVD PECVD

PSG EE PSG

PECVD

19

FIRING

LCO

FIRING

PRINTING

FIRING

PRINTING PRINTING

FIRING FIRING

扩充了的生产线 Production Line for PERC Cells PERC电池生产线

SDE/TEXTURE SDE/TEXTURE

PSG SINGLE DIFFUSION DIFFUSION SIDE POLISH

SINGLE SIDE POLISH/ PSG EE CLEANING

SINGLE

SINGULUS TECHNOLOGIES offers turn-key SIDE PSG SDE/TEXTURE DIFFUSION POLISH/ production lines for all cell types of today CLEANING and tomorrow.

PECVD

LCO LCO

REAR目前和未来,德国新格拉斯科技集团为各种类型的 FRONT LCO PRINTING FIRING PECVD PECVD 电池提供交钥匙生产线。

Delivery Range of Products

交付的产品范围

→→ Standard production line →→ Extended standard production line with selective emitter →→ Production line for PERC like cells

→→ 标准生产线 →→ 含选择性发射极的扩充了的标准生产线 →→ 際最減用政経企動見最題確 PERC类电池的生产线及其升级版

and as upgrade →→ 适用于PERC电池的PERCEUS综合生产设备 →→ PERCEUS production package for PERC cells


总部

全球子公司

Subsidiaries Offices

Headquarters

中国 SINGULUS TECHNOLOGIES SHANGHAI Tel. +86 13918298537 junwan.ren@singulus.de

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印度 SOLAR TECH GROUP Tel. +91-2266-923-263 odt@bom5.vsnl.net.in

日本 MEDIKEN INC. Tel. +81-3-6228-7651 hyakusoku@mediken.jp

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韩国 DKSH Korea Ltd. Tel. +82-2-2192-9742 tae-hwan.Joo@dksh.com 中东/非洲 Disc Tech FZE Tel. +971-655-748-46 yasserg@disctech.net

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德国总部 SINGULUS TECHNOLOGIES AG Hanauer Landstrasse 103 D - 63796 Kahl, Germany Tel. +49 6188 440-0 Fax +49 6188 440-110 sales@singulus.de www.singulus.de


晶硅太阳能电池