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INTERNATIONAL

NEW: Target Bonding cleaning

Our achievements We supply bonded sputter targets with exceptional reliability and a very strong bonding strength based on our new bonding technique.

The measurable advantages of the new bonding are: •

it tolerates improved mechanical and thermal load, allowing sputter rates of up 50% higher and accelerated production

there is no debonding or breakage of targets in process, no associated contamination of tools

high thermal and electric conductivity, minimized rise of target and backing plate temperatures during bonding process

it is performed at room temperature leaving no residual stress from bonding

bonds basically all materials with melting point above 250 C°

bond is free of lead

high dimensional accuracy of bond, exceptional parallelism of target and backing plate for homogeneous layers

bonding

technologies

materials


©

INTERNATIONAL

NEW: Target Bonding All kinds of sputter targets and materials can be bonded. The bonding technology utilizeds Nanofoil® from RNT, USA Nano bonding has been successfully established and is used in volume production by many customers: •

for a wide range of materials like metals, their alloys, oxides, or carbides

with up to 50% higher power densities/sputter rates compared to solder or elastomer bonding

Grafics courtesy of RNT

Contact AVALUXE International GmbH

Waldstromerstrasse 59 Germany 90453 Nuremberg

E-Mail:info@avaluxe.com Web: www.avaluxe.com

Tel.: +49 (0) 911 / 64 1551 100 Fax: +49 (0) 911 / 64 1551 199

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• it is performed at room temperature leaving no residual stress from bonding • high dimensional accuracy of bond, exceptional parallelism o...

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