James Watt Nanofabrication Centre The James Watt Nanofabrication Centre is one of the premiere cleanrooms working with over 250 international companies Glasgow has over 35 years experience of developing solutions for science, nanoelectronics, optoelectronics, healthcare, energy harvesting, security & defence, .... The 750 m2 cleanroom is run by 18 dedicated technical staff as a pseudo-industrial operation The Centre has sub-5 nm electron beam lithography over 200 mm wafers and low damage process transfer capability The Centre presently collaborates with over 90 universities & research institutes from around the world Kelvin Nanotechnology provide full commercial access and have delivered services to over 250 international companies MSc in Nanoscience & Nanotechnology provides education in the science & technology of present & future micro/nanofabrication http://www.jwnc.gla.ac.uk/NanoMSc.html The Centre holds many world records including the smallest electron beam lithography patterned devices of 2.5 nm, the smallest layer-to-layer alignment (0.46 nm rms), the highest performance III-V HEMT and the smallest diamond transistor
Director: Prof Douglas J. Paul Douglas.Paul@glasgow.ac.uk Tel: +44 (0)141 330 5219 http://www.jwnc.gla.ac.uk/